1. Preface: Harmst2003

   • Jill Hruby

   OriginalPaper Pages: 439 - 439

2. Three-dimensional micro-structures consisting of high aspect ratio inclined micro-pillars fabricated by simple photolithography

   • H. Sato
   • Y. Houshi
   • S. Shoji

   OriginalPaper Pages: 440 - 443

3. Two-dimensional modeling of nickel electrodeposition in LIGA microfabrication

   • K. S. Chen
   • G. H. Evans

   OriginalPaper Pages: 444 - 450

4. Effects of microstructure on the mechanical properties of copper films for high aspect ratio structures

   • M. J. Cordill
   • T. Muppidi
   • D. F. Bahr

   OriginalPaper Pages: 451 - 455

5. Micro gas bearings fabricated by deep X-ray lithography

   • D. Kim
   • S. Lee
   • J. Goettert

   OriginalPaper Pages: 456 - 461

6. Combination of thick resist and electroforming technologies for monolithic inkjet application

   • C. K. Chung
   • C. J. Lin
   • M. Q. Tsai

   OriginalPaper Pages: 462 - 466

7. Selection of mold materials for electroforming of monolithic two-layer microstructure

   • C. K. Chung
   • C. J. Lin
   • Y. Z. Hong

   OriginalPaper Pages: 467 - 471

8. Effect of workpiece springback on micromilling forces

   • C. R. Friedrich
   • V. P. Kulkarni

   OriginalPaper Pages: 472 - 477

9. Active positioning device for a perimodiolar cochlear electrode array

   • B. Y. Arcand
   • P. T. Bhatti
   • K. D. Wise

   OriginalPaper Pages: 478 - 483

10. Replication of LIGA structures using microcasting

    • G. Baumeister
    • R. Ruprecht
    • J. Hausselt

    OriginalPaper Pages: 484 - 488

11. Determination of mechanical properties of slip cast, micro powder injection moulded and microcast high aspect ratio microspecimens

    • M. Auhorn
    • T. Beck
    • D. Löhe

    OriginalPaper Pages: 489 - 492

12. Deep sub micron high aspect ratio polymer structures produced by hard X-ray lithography

    • S. Achenbach

    OriginalPaper Pages: 493 - 497

13. Electrodeposited nickel–manganese: an alloy for microsystem applications

    • S. H. Goods
    • J. J. Kelly
    • N. Y. C. Yang

    OriginalPaper Pages: 498 - 505

14. The mechanical properties, dimensional tolerance and microstructural characterization of micro-molded ceramic and metal components

    • T. J. Garino
    • A. M. Morales
    • B. L. Boyce

    OriginalPaper Pages: 506 - 509

15. The role of microstructure in the electrical and thermal conductivity of Ni-alloys for LIGA microsystems

    • S. Graham
    • J. Kelley
    • T. Borca-Tasciuc

    OriginalPaper Pages: 510 - 516

16. High density and through wafer copper interconnections and solder bumps for MEMS wafer-level packaging

    • C.-J. Lin
    • M.-T. Lin
    • F.-G. Tseng

    OriginalPaper Pages: 517 - 521

17. A Micro corona motor fabricated by a SU-8 built-on X-ray mask

    • S. Lee
    • D. Kim
    • J. Goettert

    OriginalPaper Pages: 522 - 526

18. Shape deviations in masks for optical structures produced by electron beam lithography

    • A. Last
    • H. Hein
    • J. Mohr

    OriginalPaper Pages: 527 - 530

19. Replication of microlens arrays by injection molding

    • B.-K. Lee
    • D. S. Kim
    • T. H. Kwon

    OriginalPaper Pages: 531 - 535

20. Fabrication of grids and collimators using SU-8 as a mold

    • O. V. Makarova
    • V. N. Zyryanov
    • C.-M. Tang

    OriginalPaper Pages: 536 - 539

21. Fabrication of focused two-dimensional grids

    • O. V. Makarova
    • D. C. Mancini
    • C.-M. Tang

    OriginalPaper Pages: 540 - 543

22. SOI wafer mold with high-aspect-ratio microstructures for hot embossing process

    • Y. Zhao
    • T. Cui

    OriginalPaper Pages: 544 - 546

23. Replication of micro components by different variants of injection molding

    • V. Piotter
    • N. Holstein
    • J. Hausselt

    OriginalPaper Pages: 547 - 551

24. Production of identical pyramid wavefront sensors for multi-conjugate adaptive optic systems using the LIGA process

    • F. Pérennès
    • M. Ghigo
    • S. Cabrini

    OriginalPaper Pages: 552 - 555

25. Metrology of high aspect ratio MEMS

    • J. F. Nichols
    • T. R. Kurfess

    OriginalPaper Pages: 556 - 559

26. Evaluation of optical qualities of a LIGA-spectrometer in SU-8

    • T. Mappes
    • S. Achenbach
    • R. Truckenmüller

    OriginalPaper Pages: 560 - 563

27. High aspect ratio spiral and vertical meander micro coils for actuator applications

    • V. Seidemann
    • T. Kohlmeier
    • S. Büttgenbach

    OriginalPaper Pages: 564 - 570

28. High-aspect-ratio microstructure filling by centrifugal force field modeling

    • T.-H. Tsai
    • H. Yang
    • R. Chein

    OriginalPaper Pages: 571 - 577