Volume 493, Issue 1 | MRS Online Proceedings Library

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Volume 493, Issue 1

December 1997

Symposium U — Ferroelectric Thin Film VI

Issue Editors:

S.B. Desu,
C.M. Foster,
R.E. Jones,
R.E. Treece,
I.K. Yoo

81 articles in this issue

Leakage Degradation in BST Dielectric Capacitors with Oxide and Metal Electrodes
N. Fukushima
K. Abe
T. Kawakubo
OriginalPaper 15 November 1997 Pages: 3 - 8
An Important Failure Mechanism in MOCVD (Ba,Sr)TiO₃ thin Films: Resistance Degradation
C. Basceri
S. E. Lash
S. R. Summerfelt
OriginalPaper 15 November 1997 Pages: 9 - 14
Investigation of Dielectric Constant and Dispersion in Barium Strontium Titanate Capacitors
Sufi Zafar
Peir Chu
Sherry Gillespie
OriginalPaper 15 November 1997 Pages: 15 - 19
Stoichiometric Effects of Sputtered Barium Strontium Titanate Films
B. A. Baumert
T.-L. Tsai
B. M. Melnick
OriginalPaper 15 November 1997 Pages: 21 - 26
Electrical and Microwave Properties of Mn Implanted (Ba,Sr)TiO₃ Thin Films
J. D. Baniecki
R. B. Laibowitz
Q. Y. Ma
OriginalPaper 15 November 1997 Pages: 27 - 32
Microstructure Control of (Ba, Sr)TiO₃ Films for Gigabit Dram
H. Shen
D. E. Kotecki
H. Cerva
OriginalPaper 15 November 1997 Pages: 33 - 38
A Study on the Improvement of Characteristics of BST Thin Films Fabricated on Iridium Electrode
Deok-Sin Kil
Byung-Il Lee
Seung-Ki Joo
OriginalPaper 15 November 1997 Pages: 39 - 44
Compositional Control of Ferroelectric Domain Structures in Eteroepitaxial PLZT Thin Films
K. S. Lee
Y. M. Kang
S. Baik
OriginalPaper 15 November 1997 Pages: 47 - 51
Nanoscale Investigation of Polarization Retention Loss in Ferroelectric Thin Films VIA Scanning Force Microscopy
A. Gruverman
S. A. Prakash
H. Tokumoto
OriginalPaper 15 November 1997 Pages: 53 - 58
The Impact of Domains on the Dielectric and Electromechanical Properties of Ferroelectric Thin Films
S. Trolier-McKinstry
P. Aungkavattana
F. Xu
OriginalPaper 15 November 1997 Pages: 59 - 68
High-Resolution Optical Microscopy Of Ba_XSr_1-xTio₃ Films
C. Hubert
J. Levy
D. B. Chrisey
OriginalPaper 15 November 1997 Pages: 69 - 74
Domain Wall Pinning by Grain Boundaries During Electric Field Poling of KNbO₃ Thin Films
Venkatraman Gopalan
Rishi Raj
OriginalPaper 15 November 1997 Pages: 75 - 79
The Effects of Film Thickness and Texture on the high and Low-Field stress Response of Lead Zirconate Titanate Thin Films
J. F. Shepard
F. Chu
S. Trolier-McKinstry
OriginalPaper 15 November 1997 Pages: 81 - 86
Reparation and Characterization of BST Thin Films with Hybrid Bottom Electrodes
Joon-Hyung Ahn
Jeong-Ho Park
Ho-Gi Kim
OriginalPaper 15 November 1997 Pages: 87 - 92
Ferroelectric Properties and Crystal Structure of YBa₂Cu₃O₇/Ba_xSr(_1-x)TiO₃ Heterostructures
CH. Schwan
F. Martin
H. Adrian
OriginalPaper 15 November 1997 Pages: 93 - 98
Surface and size effects on the Ferroelectric Phase Transition and Surface Polarization of Thin Films: Monte Carlo Simulations
J. Romero
L. F. Fonseca
OriginalPaper 15 November 1997 Pages: 99 - 104
Formation of Ultra Smooth Bi-Based Ferroelectric Films and their size effect on Dielectric Constant
H. Tabata
T. Yanagita
T. Kawai
OriginalPaper 15 November 1997 Pages: 105 - 110
Polydomain Structure of Epitaxial PbTiO₃ films on MgO
S. P. Alpay
A. S. Prakash
M. Greenblatt
OriginalPaper 15 November 1997 Pages: 111 - 116
Investigation of ETCH Profiles in Etching of PZT and Pt Thin Films
Chee Won Chung
Inyong Song
Jong Sig Lee
OriginalPaper 15 November 1997 Pages: 119 - 129
The Effect of RuO₂/Pt Hybrid Bottom Electrode Structure on The Microstructure and Ferroelectric Properties of Sol-Gel Derived PZT Thin Films
Seung-Hyun Kim
J. G. Hong
Angus I. Kingon
OriginalPaper 15 November 1997 Pages: 131 - 136
Hillock Growth at the Surface of Pt/TiN Electrodes for Ferroelectric Capacitors During Annealing in N₂/O₂ Ambient
H. Miura
Y. Kumagai
Y. Fujisaki
OriginalPaper 15 November 1997 Pages: 137 - 142
Oxygen-Induced Inhibition of Noble Metal Silicide Formation: Implications for Electrode/Barrier Structures used with Perovskite Materials
K. L. Saenger
A. Grill
D. E. Kotecki
OriginalPaper 15 November 1997 Pages: 143 - 151
Composition and Electrode Effects on the Electrical Properties of SrBi₂Ta₂O₉
Darin T. Thomas
Norifumi Fujimura
Angus I. Kingon
OriginalPaper 15 November 1997 Pages: 153 - 158
Effects of Sputtered Ir and IrO₂ Electrodes on the Properties of PZT Thin Films Deposited by MOCVD
M. Shimizu
H. Fujisawa
T. Shiosaki
OriginalPaper 15 November 1997 Pages: 159 - 164
Dielectric Properties of Sputtered BST on Ir Electrodes
B. E. White
Peir Y. Chu
Sherry Gillespie
OriginalPaper 15 November 1997 Pages: 165 - 170
Microstructure Investigations and Structure-Property Correlations in Ferroelectric thin film Capacitors
H. Li
B. Yang
R. Ramesh
OriginalPaper 15 November 1997 Pages: 171 - 176
Synthesis of Photodefinable RuO₂ Precursors For Electrode Contacts
K. J. Law
Y. H. Spooner
OriginalPaper 15 November 1997 Pages: 177 - 182
The Effects of the Addition of CF₄, Cl₂, and N₂ TO O₂ ECR Plasma on the ETCH Rate, Selectivity and Etched Profile of RuO₂ Film
Eung-Jik Lee
Jong-Sam Kim
Won-Jong Lee
OriginalPaper 15 November 1997 Pages: 183 - 188
Characterization of Highly Textured PZT Thin Films Grown on LaNiO₃ Coated Si Substrates by MOCVD
C. H. Lin
B. M. Yen
G. E. Stillman
OriginalPaper 15 November 1997 Pages: 189 - 194
Domain Structures of Epitaxial SrRuO₃ Thin Films
J. C. Jiang
X. Pan
C. L. Chen
OriginalPaper 15 November 1997 Pages: 195 - 200
Ir Electrodes for Ferroelectric Capacitors
Sung Won Jung
Ilhwan Bang
Jiyoung Kim
OriginalPaper 15 November 1997 Pages: 201 - 206
Crystallization Mechanism of Ferroelectric SBT Thin Films
Yuji Ikeda
Katsuyuki Hironaka
Chiharu Isobe
OriginalPaper 15 November 1997 Pages: 209 - 214
(1-x)SrBi₂Ta₂O_9-xBi₃Ti(Ta_yNb_1-y)O₉ Layered Structure Solid Solutions for Ferroelectric Random Access Memory Devices
P. C. Joshi
S. O. Ryu
S. B. Desu
OriginalPaper 15 November 1997 Pages: 215 - 224
MOCVD of SrBi₂Ta₂O₉ for Integrated Ferroelectric Capacitors
Bryan C. Hendrix
Frank Hintermaier
Carlos Mazure
OriginalPaper 15 November 1997 Pages: 225 - 230
Characterization of New SBT Sol System and its thin film on the Platinum Electrode for Fram Application
YongSoo Choi
WooSik Kim
HanSang Song
OriginalPaper 15 November 1997 Pages: 231 - 236
A Thickness Dependent Study of SrBi₂Nb₂O₉ Thin Films
W. Pérez
E. Ching-Prado
A. S. Bhalla
OriginalPaper 15 November 1997 Pages: 237 - 242
Surface Microstructures of Ferroelectric SrBi₂Ta₂O₉, BaTiO₃ and Metallic SrRuO₃ Epitaxial Thin Films
Q. D. Jiang
Z. J. Huang
C. W. Chu
OriginalPaper 15 November 1997 Pages: 243 - 248
Electronic Structure and Surface Properties of SrBi₂Ta₂O₉ and Related Oxides
J. Robertson
C. W. Chen
OriginalPaper 15 November 1997 Pages: 249 - 254
Crystallization and Electrical Properties of Bi₄TiO₁₂ Films Derived from Bismuth Acetate and Bismuth Nitrate Precursor Solutions
Chang Jung Kim
C. W. Chung
Kyu Sang Lee
OriginalPaper 15 November 1997 Pages: 255 - 260
Ferroelectric Thin Films of Bi-Containing Layered Perovskites
Xiaofeng Du
I-Wei Chen
OriginalPaper 15 November 1997 Pages: 261 - 266
Reversible and Irreversible Contributions to the Polarization in SrBi₂Ta₂O₉ Ferroelectric Capacitors
O. Lohse
D. Bolten
G. Schindler
OriginalPaper 15 November 1997 Pages: 267 - 278
An Optimized Process and Characterization of Pb(Zr,Ti)O₃ Ferroelectric Capacitor for 1T/1C Ferroelectric RAM
Dong-Won Shin
Soo-Ho Shin
Kinam Kim
OriginalPaper 15 November 1997 Pages: 281 - 286
CMOS Compatible Integrated PZT Capacitors
Joe T. Evans
Leonard L. Boyer
Geri Velasquez
OriginalPaper 15 November 1997 Pages: 287 - 290
Nonvolatile, Reversible Writing of Electronic Nanostructures in Epitaxial Ferroelectric / Metallic Oxide Heterostructures using a Field Effect
C. H. Ahn
T. Tybell
J.-M. Triscone
OriginalPaper 15 November 1997 Pages: 291 - 297
Retention Studies on Ferroelectric Media for High Data Storage Application
I. K. Yoo
B. M. Kim
S. J. Park
OriginalPaper 15 November 1997 Pages: 299 - 304
Laser-Assisted Low Temperature Processing of PZT Thin Films
Yongfei Zhu
Jinsong Zhu
S. B. Desu
OriginalPaper 15 November 1997 Pages: 305 - 309
Frequency Spectra of Fatigue of PZT and other Ferroelectric Thin Films
Xiaofeng Du
I-Wei Chen
OriginalPaper 15 November 1997 Pages: 311 - 316
Suppression of the Tetragonal Distortion in Thin Pb(Zr,Ti)O₃ Films Grown on MgO(001)
H. C. Kang
D. Y. Noh
H. K. Kim
OriginalPaper 15 November 1997 Pages: 317 - 322
Seeded Epitaxial Growth of PbTiO₃ Thin Films on (001) LaAlO₃ using the Chemical Solution Deposition Method
J. H. Kim
F. F. Lange
OriginalPaper 15 November 1997 Pages: 323 - 326
Large Area PbZr_1-xTi_xO₃ (PZT) Thin Films Deposited by MOCVD Processes
Tingkai Li
Elliot Hartford
Richard A. Stall
OriginalPaper 15 November 1997 Pages: 327 - 332