Volume 388, Issue 1

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December 1995

Symposium Q — Film Synthesis and Growth Using Energetic Beams

Issue Editors:

H. A. Atwater,
J. T. Dickinson,
D. H. Lowndes,
A. Polman

65 articles in this issue

Dynamical Modeling of Laser ablation Processes
J. N. Leboeuf
K. R. Chen
R. F. Wood ‡
OriginalPaper 21 February 2011 Pages: 3 - 13
Mechanisms of Excimer Laser induced Positive Ion Emission From Ionic Crystals
J. T. Dickinson
J.-J. Shin
S. C. Langford
OriginalPaper 21 February 2011 Pages: 15 - 20
Collisional Effects of Background Gases on Pulsed Laser Deposition Plasma Beams
David B. Geohegan
Alex A. Puretzky
OriginalPaper 21 February 2011 Pages: 21 - 26
Laser-Solid Interaction and Dynamics of the Laser-Ablated Materials
K. R. Chen
J. N. Leboeuf
A. A. Puretzky
OriginalPaper 21 February 2011 Pages: 27 - 32
Planar Laser-Induced Fluorescence Diagnostics of Pulsed Laser Ablation of Silicon
D. G. Goodwin
D. L. Capewell
P. H. Paul
OriginalPaper 21 February 2011 Pages: 33 - 38
Velocity Selection of Laser Ablated Metal Atoms by a Novel Non-Mechanical Technique
Mario E. Fajardo
Michel Macler
OriginalPaper 21 February 2011 Pages: 39 - 44
In Situ Monitoring and Model Simulation of BaTiO₃ Pulsed Laser Thin Film Deposition
Albert J. Paul
Peter K. Schenck
John W. Hastie
OriginalPaper 21 February 2011 Pages: 45 - 50
Pulsed Laser Deposition of Cadmium Stannate, a Spinel-Type Transparent Conducting Oxide
Jeanne M. Mcgraw
Philip A. Parilla
Timothy J. Coutts
OriginalPaper 21 February 2011 Pages: 51 - 56
Formation of artificially-Layered Thin-Film Compounds Using Pulsed-Laser Deposition
David P. Norton
B. C. Chakoumakos
J. D. Budai
OriginalPaper 21 February 2011 Pages: 57 - 66
Observations on the Growth of YBa₂Cu₃O₇ Thin Films at Very High Laser Fluences
Rand R. Biggers.
M. Grant Norton
Jeff L. Brown
OriginalPaper 21 February 2011 Pages: 67 - 72
Dielectric Susceptibility and Strain in Sr_1-XBa_XTio₃ Ferroelectric Thin Films Grown by Pulsed Laser Deposition
L. A. Knauss
J. S. Horwitz
C. H. Mueller
OriginalPaper 21 February 2011 Pages: 73 - 78
Epitaxial Multilayers of (Sr,Ba)Nb₂O₆ and Conducting Films on (001) Mgo Substrates
T. F. Huang
K. E. Youden
J. S. Harris Jr.
OriginalPaper 21 February 2011 Pages: 79 - 84
Growth of Highly Doped P-Type Znte Films by Pulsed Laser ablation in Molecular Nitrogen
Douglas H. Lowndes
C. M. Rouleau
Shen Zhu
OriginalPaper 21 February 2011 Pages: 85 - 90
P-Type II-VI Compound Semiconductor Thin Films Grown by Pulsed Laser Deposition
W. P. Shen
H. S. Kwok
OriginalPaper 21 February 2011 Pages: 91 - 96
Inhibited SN Surface Segregation in Epitaxial SN_xGE_1-x Alloy Films Grown by Pulsed Laser Deposition
M. E. Taylor
G. He
Thomas J. Watson
OriginalPaper 21 February 2011 Pages: 97 - 102
Pulsed-Laser Deposition of Titanium Nitride
Wenbiao Jiang
M. Grant Norton
N. D. EVANS
OriginalPaper 21 February 2011 Pages: 103 - 108
Growth of Mon_X by Reactive Laser ablation
Randolph E. Treece
James S. Horwitz
Douglas B. Chrisey
OriginalPaper 21 February 2011 Pages: 109 - 114
Advanced Properties of Silicon Oxynitride (SiO_xN_y) Thin Films Prepared by Pulsed Laser Deposition
R.-F. Xiao
L. C. Ng
H. B. Liao
OriginalPaper 21 February 2011 Pages: 115 - 120
Rapid Growth of Diamond-Like-Carbon Films by Copper Vapor Laser ablation
W. Mclean
B. E. Warner
M. Balooch
OriginalPaper 21 February 2011 Pages: 121 - 125
Modeling and Simulation of Pulsed Laser annealing and ablation of Solid Materials
C. L. Liu
R. F. Wood
OriginalPaper 21 February 2011 Pages: 127 - 132
Vapor Breakdown During ablation by Nanosecond Laser Pulses
C. L. Liu
J. N. Leboeuf
A. A. Puretzky
OriginalPaper 21 February 2011 Pages: 133 - 138
Mechanism of ArF Laser induced Photolytic Deposition of W From WF₆ on Etched Si and Unetched Si
Xiafang Zhang
Herbert J. Leary Jr.
Susan D. Allen
OriginalPaper 21 February 2011 Pages: 139 - 144
Amorphous Diamond-Like Carbon Film Growth by KrF-and ArF-Excimer Laser PLD: Correlation with Plume Properties
A. A. Puretzky
D. B. Geohegan
M. M. Mcgibbon
OriginalPaper 21 February 2011 Pages: 145 - 150
On- and Off-AXIS Large-Area Pulsed Laser Deposition
James A. Greer
M. D. Tabat
OriginalPaper 21 February 2011 Pages: 151 - 161
Ion-Assisted Pulsed Laser Deposition of BN Films
G. L. Doll
D. C. Chance
L. Salamanca-Riba
OriginalPaper 21 February 2011 Pages: 165 - 170
Substrate Heating Measurements in Pulsed Ion Beam Film Deposition
J. C. Olson
M. O. Thompson
D. R. Tallant
OriginalPaper 21 February 2011 Pages: 171 - 176
Role of Ions in Bias Enhanced Nucleation of Diamond
J. M. Lannon Jr.
J. S. Gold
Cd. Stinespring
OriginalPaper 21 February 2011 Pages: 177 - 182
Ion Beam Deposition of Boron-Aluminum Nitride Thin Films
J. H. Edgar
C. R. Eddy Jr.
B. D. Sartwell
OriginalPaper 21 February 2011 Pages: 183 - 188
Ion-Beam-Induced Epitaxy and Solid Phase Epitaxy of Sigec on Si Formed by Ge and C Ion Implantation and their Structural and Optical Properties
N. Kobayashi
H. Katsumata
S. Hishita
OriginalPaper 21 February 2011 Pages: 189 - 194
Solid Phase Epitaxy of Implanted Si-Ge-C Alloys
Xiang Lu
Nathan W. Cheung
OriginalPaper 21 February 2011 Pages: 195 - 200
A New Ion Beam Deposition Technique for Low Temperature Silicon Epitaxy
S. Mohajerzadeh
C. R. Selvakumar
J. M. Corbett
OriginalPaper 21 February 2011 Pages: 201 - 206
A New Low Temperature Thin Film Deposition Process: Energetic Cluster Impact (ECI)
H. Haberland
M. Leber
Y. Thurner
OriginalPaper 21 February 2011 Pages: 207 - 214
Film Synthesis on Powders by Cathodic ARC Plasma Deposition
André Anders
Simone Anders
Igor C. Ivanov
OriginalPaper 21 February 2011 Pages: 215 - 220
Dissociative Chemisorption at Hyperthermal Energies: Benchmark Studies in Group IV Systems
L.-Q. Xia
M. E. Jones
J. R. Engstrom
OriginalPaper 21 February 2011 Pages: 221 - 226
Hyperthermal H Atom Reactions on D/Si(100)
Steven A. Buntin
OriginalPaper 21 February 2011 Pages: 227 - 232
Low Temperature Film Growth by Supersonic Jets of CBr₄
Douglas A. A. Ohlberg
Garry Rose
R. Stanley Williams
OriginalPaper 21 February 2011 Pages: 233 - 238
Effects of Carbon-Ion Irradiation-Energies on the Molecular Beam Epitaxy of GaAs and Ingaas
Y. Makita
T. Iida
K. Tanaka
OriginalPaper 21 February 2011 Pages: 241 - 252
Luminescent Nanometer-Sized Si Crystals Formed in an amorphous Silicon Dioxide Matrk by Ion Implantation and Annealing
T. S. Iwayama
Y. Terao
K. Saitoh
OriginalPaper 21 February 2011 Pages: 253 - 258
Anion Exchange Reactions and initial GaN Epitaxial Layer Formation Under Nitrogen Plasma Exposure of a GaAs Surface
R. J. Hauenstein
D. A. Collins
T. C. Mcgill
OriginalPaper 21 February 2011 Pages: 259 - 264
Deposition of Gan Films Using Seeded Supersonic Jets
H. Henry Lamb
Ken K. Lai
Robert F. Davis
OriginalPaper 21 February 2011 Pages: 265 - 270
Growth and Properties of Carbon Nitride Thin Films
Z. John Zhang
Peidong Yang
Charles M. Lieber
OriginalPaper 21 February 2011 Pages: 271 - 280
Nitrogen Plasma Ion Implantation into Carbon Films Deposited by the Anodic Vacuum ARc
Imad F. Husein
Fan Li
Chung Chan
OriginalPaper 21 February 2011 Pages: 281 - 286
Carbon Nitride Films Using a Filtered Cathodic ARC
Scott M. Camphausen
D. A. Tucker
J. J. Cuomo
OriginalPaper 21 February 2011 Pages: 287 - 292
High-Pressure Pulsed Plasma Synthesis of Carbon-Nitride Thin Films
V. N. Gurarie
A. V. Orlov
S. Prawer
OriginalPaper 21 February 2011 Pages: 293 - 298
Fabrication of a Free-Standing, Synthetic, Single Crystal Diamond Plate Using Ion Implantation and Plasma-Enhanced Chemical Vapor Deposition
J. B. Posthill
D. P. Malta
R. J. Markunas
OriginalPaper 21 February 2011 Pages: 299 - 304
Preparation and Characterization of Chromium Containing amorphous Hydrogenated Carbon Films (A-C:H/Cr)
R. Gampp
P. Gantenbein
P. Oelhafen
OriginalPaper 21 February 2011 Pages: 305 - 310
Deposition of aluminum Oxynitride Films by Magnetron Sputtering: Effect of Bombardment and Substrate Heating on Structural and Mechanical Properties
Russell V. Smilgys
Eric Takamura
Douglas A. Kirkpatrick
OriginalPaper 21 February 2011 Pages: 311 - 316
High-Rate Deposition of Thin Films by High-Intensity Pulsed Ion Beam Evaporation
A. N. Zakoutayev
G. E. Remnev
A. V. Potyomkin
OriginalPaper 21 February 2011 Pages: 317 - 322
Electron Beam Assisted Chemical Vapor Deposition of Gold in an Environmental Tem
John Kouvetakis
Renu SharmA
Paul Seidler
OriginalPaper 21 February 2011 Pages: 323 - 328
Low Temperature Deposition of Diamond Thin Films Using Electron Cyclotron Resonance Plasmas
Donald R. Gilbert
Rajiv K. Singh
OriginalPaper 21 February 2011 Pages: 329 - 334

Volume 388, Issue 1

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