Volume 239, Issue 1 | MRS Online Proceedings Library

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Volume 239, Issue 1

December 1991

Symposium D — Thin Films: Stresses and Mechanical Properties III

Issue Editors:

E. Arzt,
J. C. Bravman,
L. B. Freund,
W. D. Nix

108 articles in this issue

Mechanical Properties of Microsensor Materials: How to Deal with the Process Dependences?
Stephen D. Senturia
OriginalPaper 01 July 1991 Pages: 3 - 11
Stress and Microstructure in LPCVD Polycrystalline Silicon Films: Experimental Results and Closed Form Modeling of Stresses
P. Krulevitch
G. C. Johnson
R. T. Howe
OriginalPaper 01 July 1991 Pages: 13 - 18
Growth of Interfacial Phases: Effects of External and Internal Stresses
D. E. Albert
A. R. Yavari
OriginalPaper 01 July 1991 Pages: 19 - 24
In Situ Measurement of Stresses in Thin Films
Reinhard Abermann
OriginalPaper 01 July 1991 Pages: 25 - 36
Observation of Glass Transition Temperatures in Polymeric Thin Films by Wafer Curvature Measurements
P. H. Townsend
B. S. Huber
D. S. Wang
OriginalPaper 01 July 1991 Pages: 37 - 43
Stress and Microstructure in RF-Diode and DC-Magnetron Sputtered Beryllium Thin Films
Risto H. Mutikainen
OriginalPaper 01 July 1991 Pages: 45 - 50
Effect of Deposition Conditions on Intrinsic Stress, Phase Transformation and Stress Relaxation in Tantalum Thin Films
A. Mutscheller
L. A. Clevenger
K. Barmak
OriginalPaper 01 July 1991 Pages: 51 - 56
The Origin of Anomalous Strain in Thin Sputtered Mo Films on Si(100)
J. Tao
D. Adams
J. C. Bilello
OriginalPaper 01 July 1991 Pages: 57 - 62
The Origin of Stress in Co-Cr Alloy Thin Films Deposited by Magnetron Sputtering
Zhi-Feng Zhou
Yu-Dian Fan
OriginalPaper 01 July 1991 Pages: 63 - 68
Defect-Characterization in Implanted Locos + Trench-Isolated Structures
N. David Theodore
Barbara Vasquez
Peter Fejes
OriginalPaper 01 July 1991 Pages: 69 - 74
Characteristics of Palladium Thin Films Deposited by the Ionized Cluster Beam Technique
Maria Huffman
T. S. Kalkur
M. Reeder
OriginalPaper 01 July 1991 Pages: 75 - 79
Strain Dependent Diffusion in the Dry Thermal Oxidation Process of Crystalline Si
C. H. Bjorkman
G. Lucovsky
OriginalPaper 01 July 1991 Pages: 81 - 86
Crystallite Dimensions and Strain in Poly-Si and Ti-Silicide Thin Films Measured with Grazing Incidence X-Ray Diffraction
A. Leiberich
P. K. Roy
OriginalPaper 01 July 1991 Pages: 87 - 92
The Effect of Deposition Temperature on the Microstructure of Lpcvd Polysilicon Films
J. Hangas
D. R. Liu
C. Peters
OriginalPaper 01 July 1991 Pages: 93 - 98
Effect of Hydrogen on Thin Cu/Ti and Cu Films
Christopher A. Apblett
Peter J. Ficalora
OriginalPaper 01 July 1991 Pages: 99 - 106
Stress Effect on Oxidation Kinetics of Silicon with Different Surface Orientations
Keitaro Imai
Kikuo Yamabe
OriginalPaper 01 July 1991 Pages: 107 - 112
Stress in Thermally Annealed Parylene Films
S. Dabral
J. Van Etten
J. F. McDonald
OriginalPaper 01 July 1991 Pages: 113 - 117
Elastic Constants and Viscosity of Amorphous PdSi/PdSiFe Multilayers
Ann Witvrouw
Pamela Campos
Frans Spaepen
OriginalPaper 01 July 1991 Pages: 121 - 126
An Anodic Process for the Determination of Grain Boundary and Film Thickness Strengthening Effects in Aluminum Films on Oxidized Silicon
Ramnath Venkatraman
John C. Bravman
OriginalPaper 01 July 1991 Pages: 127 - 132
Superplastic Flow in Ceramic Microfiber Specimens
R. Lappalainen
R. Raj
OriginalPaper 01 July 1991 Pages: 133 - 138
Evolution of Intrinsic Stress During Nucleation and Growth of Polycrystalline Tungsten Films by Chemical Vapor Deposition
G. J. Leusink
T. G. M. Oosterlaken
S. Radelaar
OriginalPaper 01 July 1991 Pages: 139 - 144
Stresses in UHV Planar Magnetron Sputtered Films
W. D. Nix
C Hudson
R. E. Somekh
OriginalPaper 01 July 1991 Pages: 145 - 150
Experimental Determination of the Strain Transfer Across a Flexible Intermediate Layer in Thin Film Structures as a Function of Flexible Layer Thickness
L. S. Schadler
I. C. Noyan
OriginalPaper 01 July 1991 Pages: 151 - 156
Three-Dimensional Finite Element Calculations of Thermal Stresses in Patterned GaAs / Si
E. H. Lingunis
N. M. Haegel
N. H. Karam
OriginalPaper 01 July 1991 Pages: 157 - 162
Finite Element Analysis of the Mechanical Performance of Benzocyclobutene Structures in Multichip Modules
E. O. Shaffer
P. H. Townsend
C. J. Carriere
OriginalPaper 01 July 1991 Pages: 163 - 168
Measurement of Residual Stress-Induced Bending Moment of P⁺ Silicon Films
W. H. Chu
M. Mehregany
P. Pirouz
OriginalPaper 01 July 1991 Pages: 169 - 175
Characterization of Stress and Texture in Rtcvd Poly-Si Layers by X-Ray Diffraction
István Bársony
Jos G.E. Klappe
Tom W. Ryan
OriginalPaper 01 July 1991 Pages: 177 - 182
Stress Driven Instability in Non-Hydrostatically Stressed Crystals and its Role in the Problems of Crystalline Thin Films
Michael A. Grinfeld
OriginalPaper 01 July 1991 Pages: 183 - 188
Structure and Dose Effects on Ion Beam Modification of Polymers
G. R. Rao
E. H. Lee
L. K. Mansur
OriginalPaper 01 July 1991 Pages: 189 - 194
Computer Simulation of Plastic Deformation of Small Crystals
Masao Doyama
OriginalPaper 01 July 1991 Pages: 195 - 199
Measurement of Viscoelastic Stress Relief in Patterned Silicon-on-Insulator Composite Structures With Raman Spectroscopy
T. J. Letavic
E. W. Maby
J. Petruzzello
OriginalPaper 01 July 1991 Pages: 201 - 206
Application of Stress Measurement to the Study of Thermally Activated Processes in Thin-Film Materials
F. J. Von Preissig
W. D. Nix
OriginalPaper 01 July 1991 Pages: 207 - 212
Characterization of Thin Films by Internal Friction Measurements
H. G. Bohn
C. M. Su
OriginalPaper 01 July 1991 Pages: 215 - 225
Determination of Strain Distributions in Aluminum Thin Films as a Function of Temperature by the use of Synchrotron Grazing Incidence X-Ray Scattering
Ramnath Venkatraman
Paul R. Besser
John C. Bravman
OriginalPaper 01 July 1991 Pages: 227 - 232
Calculation of Stress Gradients in Thin Al-0.5%Cu/Ti Lines from Strain Gradients Measured as a Function of Temperature Using Grazing Incidence X-Ray Scattering
Paul Besser
Ramnath Venkatraman
John Bravman
OriginalPaper 01 July 1991 Pages: 233 - 238
The Elastic Moduli of Silver Thin Films Measured with a New Microtensile Tester
J. Ruud
D. Josell
F. Spaepen
OriginalPaper 01 July 1991 Pages: 239 - 243
Eigenstresses in Anisotropic Films
Ferdinando Auricchio
Mauro Ferrari
OriginalPaper 01 July 1991 Pages: 245 - 249
Effect of Initial Substrate Curvature on Nonlinear Bending Measurements of Thin-Film Stress
D. E. Fahnline
OriginalPaper 01 July 1991 Pages: 251 - 256
Re-Examining the Bulge Test: Methods for Improving Accuracy and Reliability
Martha K. Small
Joost J. Vlassak
William D. Nix
OriginalPaper 01 July 1991 Pages: 257 - 262
Tribological Properties of Superhard PVD Coatings
O. Knotek
F. Löffler
OriginalPaper 01 July 1991 Pages: 263 - 266
Brllouin Light Scattering on Diamond and Diamondlike Carbon Films
X. Jiang
OriginalPaper 01 July 1991 Pages: 269 - 274
Metal Reinforced Diamond Composite Films
C. Tsai
J. Nelson
E. Pfender
OriginalPaper 01 July 1991 Pages: 275 - 280
Determination of the Mechanical Properties OP Integrated Circuit Packaging Materials using a Focused Acoustic Beam Technique
De Zhang
Gabriel M. Crean
OriginalPaper 01 July 1991 Pages: 281 - 286
Mechanical Testing of Bonded Silicon on Insulator Wafers
S. N. Farrens
B. Roberds
C. E. Hunt
OriginalPaper 01 July 1991 Pages: 287 - 292
Practical Application of a Geometrically Nonlinear Stress-Curvature Relation
Christine B. Masters
N. J. Salamon
OriginalPaper 01 July 1991 Pages: 293 - 298
The Anomalous Behavior of Silicon During Nanoindentation
G. M. Pharr
OriginalPaper 01 July 1991 Pages: 301 - 312
Influence of Adsorbate Monolayer on the Nano-Mechanics of TIP-Substrate Interactions
H. Rafii-Tabar
J. B. Pethica
A. P. Sutton
OriginalPaper 01 July 1991 Pages: 313 - 318
Time-Dependent Deformation in Room-Temperature Indentation Experiments using a Nanoindenter
Shefford P. Baker
Troy W. Barbee Jr.
William D. Nix
OriginalPaper 01 July 1991 Pages: 319 - 324
Monitoring Time-Dependent Deformation in Small Volumes
T P Weihs
J B Pethica
OriginalPaper 01 July 1991 Pages: 325 - 330
Stress-Strain Behaviour of thin films using a Spherical Tipped Indenter
T. J. Bell
J. S. Field
M. V. Swain
OriginalPaper 01 July 1991 Pages: 331 - 336