Volume 1299, Issue 1 | MRS Online Proceedings Library

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Volume 1299, Issue 1

December 2011

Symposium S — Microelectromechanical Systems—Materials and Devices IV

Issue Editors:

M. P. de Boer,
F. W. DelRio,
C. Eberl,
E. P. Gusev

32 articles in this issue

Refractive Index memory effect of ferroelectric materials by domain control
Kazuhiko Inoue
Takeshi Morita
OriginalPaper 01 February 2011 Article: 1303
A Picowatt Energy Harvester
Joe Evans
Johannes Smits
Gerald Salazar
OriginalPaper 01 February 2011 Article: 1203
Biodegradable Microfluidic Scaffolds with Tunable Degradation Properties from Amino Alcohol-based Poly(ester amide) Elastomers
Jane Wang
Tatiana Kniazeva
Jeffrey T. Borenstein
OriginalPaper 01 February 2011 Article: 1102
Fabrication and Characterization of Two Compliant Electrical Contacts for MEMS: Gallium Microdroplets and Carbon Nanotube Turfs
Y. Kim
A. Qiu
D. F. Bahr
OriginalPaper 01 February 2011 Article: 1003
Solid Bridging during Pattern Collapse (Stiction) Studied on Silicon Nanoparticles
Daniel Peter
Michael Dalmer
Wolfgang Bensch
OriginalPaper 01 February 2011 Article: 929
Characterization of Textured PZT Thin Films Prepared by Sol-gel Method onto Stainless Steel Substrates
Xuelian Zhao
Xufang Yu
Jinrong Cheng
OriginalPaper 01 February 2011 Article: 920
Transport Model for Microfluidic Device for Cell Culture and Tissue Development
Niraj Inamdar
Linda Griffith
Jeffrey T. Borenstein
OriginalPaper 01 February 2011 Article: 917
Characterization of Group III-Nitride Based Surface Acoustic Wave Devices for High Temperature Applications
J. Justice
L. E. Rodak
D. Korakakis
OriginalPaper 01 February 2011 Article: 913
Residual Stress in Sputtered Silicon Oxycarbide Thin Films
Ping Du
I Kuan Lin
Xin Zhang
OriginalPaper 01 February 2011 Article: 910
Effect of Phosphorus Doping on the Young’s Modulus and Stress of Polysilicon Thin Films
Elena Bassiachvili
Patricia Nieva
OriginalPaper 01 February 2011 Article: 909
Nanoindentation Characterization of PECVD Silicon Nitride on Silicon Subjected to Mechanical Fatigue Loading
Z K Huang
K S Ou
K S Chen
OriginalPaper 01 February 2011 Article: 906
Giant Piezoresistive Variation of Metal Particles Dispersed in PDMS Matrix
Stefano Stassi
Giancarlo Canavese
Candido Fabrizio Pirri
OriginalPaper 01 February 2011 Article: 905
Gold in Flux-less Bonding: Noble or not Noble
Marco Balucani
Paolo Nenzi
Aliksandr Shapel
OriginalPaper 01 February 2011 Article: 904
Measurements of Resonance Frequency of Parylene Microspring Arrays Using Atomic Force Microscopy
C. Gaire
M. He
T. M. Lu
OriginalPaper 01 February 2011 Article: 903
Characterization of Hydrophobic Forces for in Liquid Self-Assembly of Micron-Sized Functional Building Blocks
M. R. Gullo
L. Jacot-Descombes
J. Brugger
OriginalPaper 01 February 2011 Article: 804
Thin film amorphous silicon bulk-mode disk resonators fabricated on glass substrates
A. Gualdino
V. Chu
J. P. Conde
OriginalPaper 01 February 2011 Article: 704
Development of a Robust Design of a Wet Etched Co-integrated Pressure Sensor
Wolfgang Schreiber-Prillwitz
Mikko Saukoski
Reinhart Job
OriginalPaper 01 February 2011 Article: 603
Ultrafine Silicon Nano-wall Hollow Needles and Applications in Inclination Sensor and Gas Transport
Z. Sanaee
S. Mohajerzadeh
M. Araghchini
OriginalPaper 01 February 2011 Article: 505
Film Conductivity Controlled Variation of the Amplitude Distribution of High-temperature Resonators
Silja Schmidtchen
Denny Richter
Holger Fritze
OriginalPaper 01 February 2011 Article: 504
Mechanical and Material Characterization of Bilayer Microcantilever-based IR detectors
I Kuan Lin
Ping Du
Xin Zhang
OriginalPaper 01 February 2011 Article: 413
High Yield Polymer MEMS Process for CMOS/MEMS Integration
Prasenjit Ray
V. Seena
Ramgopal Rao
OriginalPaper 01 February 2011 Article: 412
SU8 / modified MWNT composite for piezoresistive sensor application
Prasenjit Ray
V. Seena
Ramgopal Rao
OriginalPaper 01 February 2011 Article: 411
Improving PZT Thin Film Texture Through Pt Metallization and Seed Layers
L. M. Sanchez
D. M. Potrepka
R. G. Polcawich
Articles 01 February 2011 Article: 409
Reliability and stability of thin-film amorphous silicon MEMS on glass substrates
P. M. Sousa
V. Chu
J. P. Conde
OriginalPaper 01 February 2011 Article: 408
Fabrication and Characterization of MEMS-Based Structures from a Bio-Inspired, Chemo-Responsive Polymer Nanocomposite
Allison E. Hess
Christian A. Zorman
OriginalPaper 01 February 2011 Article: 407
Mechanism of hole inlet closure in shape transformation of hole arrays on Si(001) substrates by hydrogen annealing
Reiko Hiruta
Hitoshi Kuribayashi
Ryosuke Shimizu
OriginalPaper 01 February 2011 Article: 404
Synthesis and Control of ZnS Nanodots and Nanorods with Different Crystalline Structure from an Identical Raw Material Solution and the Excitonic UV Emission
Masato Uehara
Satoshi Sasaki
Hideaki Maeda
OriginalPaper 01 February 2011 Article: 403
PZT Thick Films for 100 MHz Ultrasonic Transducers Fabricated Using Chemical Solution Deposition Process
Naoto Kochi
Takashi Iijima
Soichiro Okamura
OriginalPaper 01 February 2011 Article: 402
Characterizing the effect of uniaxial strain on the surface roughness of Si nanowire MEMS-based microstructures
E. Escobedo-Cousin
S. H. Olsen
J. P. Raskin
OriginalPaper 01 February 2011 Article: 304
Contact Resistivity of Laser Annealed SiGe for MEMS Structural Layers Deposited at 210°C
Joumana El-Rifai
Ann Witvrouw
Sherif Sedky
OriginalPaper 01 February 2011 Article: 205
Pt/TiO₂ Growth Templates for Enhanced PZT films and MEMS Devices
Daniel M. Potrepka
Glen R. Fox
Ronald G. Polcawich
OriginalPaper 01 February 2011 Article: 204
Patterning Nanomaterials on Fragile Micromachined Structures using Electron Beam Lithography
Kaushik Das
Pascal Hubert
Srikar Vengallatore
OriginalPaper 01 February 2011 Article: 109