Metallization for Integrated Circuit Manufacturing R. V. JoshiR. S. BlewerS. Murarka Metallization for Integrated Circuit Manufacturing 26 September 2020 Pages: 33 - 37
Chemical Vapor Deposition of TIN for Sub-0.5 jum ULSI Circuits M. Eizenberg Metallization for Integrated Circuit Manufacturing 26 September 2020 Pages: 38 - 41
Collimated Sputtering of Titanium and Titanium Nitride Films James G. RyanStephen B. BrodskyHideaki Aochi Metallization for Integrated Circuit Manufacturing 26 September 2020 Pages: 42 - 45
Chemical-Vapor-Deposited Tungsten for Vertical Wiring Takayuki Ohba Metallization for Integrated Circuit Manufacturing 26 September 2020 Pages: 46 - 52
Aluminum Reflow Sputtering Kuniko Kikuta Metallization for Integrated Circuit Manufacturing 26 September 2020 Pages: 53 - 56
Aluminum-Based Metallurgy for Global Interconnects Dipankar Pramanik Metallization for Integrated Circuit Manufacturing 26 September 2020 Pages: 57 - 60
Chemical-Mechanical Planarization of Aluminum-Based Alloys for Multilevel Metallization M. A. FuryD. L. ScherberM. A. Stell Metallization for Integrated Circuit Manufacturing 26 September 2020 Pages: 61 - 64
Simulation of Microstructure and Surface Profiles of Thin Films for VLSI Metallization T. SmyS. K. DewM. J. Brett Metallization for Integrated Circuit Manufacturing 26 September 2020 Pages: 65 - 69
Mechanical Stress in VLSI Interconnections: Origins, Effects, Measurement, and Modeling Paul A. Flinn Metallization for Integrated Circuit Manufacturing 26 September 2020 Pages: 70 - 73
New Rapid Failure Analysis Techniques for Multilevel Metallization Edward I. Cole Jr.Richard E. Anderson Metallization for Integrated Circuit Manufacturing 26 September 2020 Pages: 74 - 77
The Reliability of Aluminum/Tungsten Technology for VLSI Applications Yosi Shacham-Diamand Metallization for Integrated Circuit Manufacturing 26 September 2020 Pages: 78 - 82
Walker, Chair of the House Committee on Science, to Give Plenary Talk MRS News 26 September 2020 Pages: 89 - 89
New Symposium Tutorial Program Debuts at the 1995 MRS Fall Meeting Nemanich J. Robert MRS News 29 November 2013 Pages: 98 - 99
Abstracts for January 1996 Journal of Materials Research JMR ABSTRACTS 26 September 2020 Pages: 106 - 111