1. Controlling Silicon Etching Parameters in RF CHF₃ Plasma by Optical Emission Spectroscopy

   • D. B. Murin
   • I. A. Chesnokov
   • A. M. Efremov

   OriginalPaper 04 April 2023 Pages: 1 - 8

   

2. Calculation of the Electric Field Strength and Current Density Inside a Thin Metal Layer, Taking into Account the Skin Effect

   • E. V. Zavitaev
   • O. V. Rusakov
   • E. P. Chukhleb

   OriginalPaper 04 April 2023 Pages: 9 - 20

   

3. Simulation of Supercell Defect Structure and Transfer Phenomena in TlInTe₂

   • M. M. Asadov
   • S. N. Mustafaeva
   • V. F. Lukichev

   OriginalPaper 04 April 2023 Pages: 21 - 31

   

4. Study of Photodetectors with Schottky Barriers Based on the IrSi–Si Contact

   • E. A. Kerimov

   OriginalPaper 04 April 2023 Pages: 32 - 34