Spectral Control of the Process of Copper Etching in Radio Frequency Dichlorodifluoromethane Plasma D. B. MurinS. A. PivovarenokI. A. Gogulev OriginalPaper 23 December 2022 Pages: 359 - 367
Electrophysical Characteristics and Emission Spectra of Carbon Tetrafluoride Plasma D. B. MurinS. A. PivovarenokI. A. Gogulev OriginalPaper 23 December 2022 Pages: 368 - 375
Artificial Intelligence Will Never Completely Replace Humans I. I. Abramov OriginalPaper 23 December 2022 Pages: 376 - 386
Electron Detection Circuit Based on a Tunnel Structure of Four Quantum Dots with Asymmetric Parameters A. V. Tsukanov OriginalPaper 23 December 2022 Pages: 387 - 397
Method for the Iterative Refinement of Parameter Values in Analytical Models of Microelectronic Devices Based on Integrated MOS Transistors A. S. SinyukinA. V. Kovalev OriginalPaper 23 December 2022 Pages: 398 - 403
Development of a Method for Constructing a Nonlinear Model of a Metamorphic 0.15-μm МHEMT InAlAs/InGaAs Transistor V. V. LokotkoI. S. Vasil’evskiiN. I. Kargin OriginalPaper 23 December 2022 Pages: 404 - 412
Modeling of Gold Adsorption by the Surface of Defect Graphene M. M. AsadovS. O. MammadovaV. F. Lukichev OriginalPaper Open access 23 December 2022 Pages: 413 - 425
Effect of Lattice Defects on the Electromigration-Induced Instability of the Interface between Joined Conductive Materials T. M. MakhviladzeM. E. Sarychev OriginalPaper 23 December 2022 Pages: 426 - 434
Laser Plasma-Chemical Etching of Polycrystalline Diamond and Single-Crystal Sapphire S. V. Red’kinP. P. Mal’tsevN. A. Yuzeeva OriginalPaper 23 December 2022 Pages: 435 - 438
Contact Transport and Field Emission Properties of Low-Dimensional 2D Carbon Heterostructures R. K. YafarovN. O. Shabunin OriginalPaper 23 December 2022 Pages: 439 - 444
Computer Analysis of Resistive Switching in a Bismuth Selenide Microcrystal-Based Structure V. V. SirotkinA. V. ZotovV. A. Tulin OriginalPaper 23 December 2022 Pages: 445 - 453
Magneto-Optical Properties of Multilayer Structures Based on Cobalt and Chromium-Group Metals for Magnetic Memory Elements A. V. ProkaznikovV. A. PaporkovO. V. Savenko OriginalPaper 23 December 2022 Pages: 454 - 464
Electroluminescence in p-GaP/por-GaP/SnO2 Structures in the Red Region of the Spectrum K. K. DikhanbaevU. A. JamayevaS. B. Ikramova OriginalPaper 23 December 2022 Pages: 465 - 469
Dielectric Barrier in the Subtractive Process of Formation of a Copper Metallization System A. A. OrlovA. A. RezvanovK. A. Vorotilov OriginalPaper 23 December 2022 Pages: 470 - 479
Parameters of Gaseous Phase and Kinetics of Reactive Ion Etching of SiO2 in CF4/C4F8/Ar/He Plasma A. M. EfremovK.-H. Kwon OriginalPaper 23 December 2022 Pages: 480 - 487
Effect of Ion-Plasma Treatment on the Phase Composition and Electrical Resistivity of Nanometer-Thick Tungsten Films R. V. SelyukovI. I. AmirovV. V. Naumov OriginalPaper 23 December 2022 Pages: 488 - 496
On the Effect of the Cl2 + O2 + Ar Mixture Composition on the Concentrations of Chlorine and Oxygen Atoms in a Plasma I. I. AmirovM. O. IzyumovA. M. Efremov OriginalPaper 23 December 2022 Pages: 497 - 504
Peculiarities of the Kinetics of Heterogeneous Processes during the Etching of Silicon in CF4 and C2Br2F4 Plasma A. V. MiakonkikhV. O. KuzmenkoK. V. Rudenko OriginalPaper 23 December 2022 Pages: 505 - 511
Design of Cu-MWCNT Based Heterogeneous Coaxial through Silicon Vias for High-Speed VLSI Applications Katepogu RajkumarG. Umamaheswara Reddy OriginalPaper 23 December 2022 Pages: 512 - 520