1. Influence of Deposition Conditions and Ion-Plasma Treatment of Thin Cobalt Films on Their Electrical Resistivity

   • I. I. Amirov
   • R. V. Selyukov
   • E. S. Gorlachev

   OriginalPaper 19 February 2021 Pages: 1 - 7

   

2. Metallization of Vias in Silicon Wafers to Produce Three-Dimensional Microstructures

   • A. I. Vorobjova
   • V. A. Labunov
   • D. V. Grapov

   OriginalPaper 19 February 2021 Pages: 8 - 18

   

3. Influence of Resist Spreading during Its Dry Electron-Beam Etching on a Lateral Resolution

   • A. G. Isaev
   • F. A. Sidorov
   • A. E. Rogozhin

   OriginalPaper 19 February 2021 Pages: 19 - 23

   

4. Kinetics of the Volumetric and Heterogeneous Processes in the Plasma of a C₄F₈ + O₂ + Ar Mixture

   • A. M. Efremov
   • D. B. Murin
   • K.-H. Kwon

   OriginalPaper 19 February 2021 Pages: 24 - 32

   

5. Modification of Diazoquinone-Novolac Photoresist Films by the Implantation of Antimony Ions

   • S. D. Brinkevich
   • D. I. Brinkevich
   • V. S. Prosolovich

   OriginalPaper 19 February 2021 Pages: 33 - 38

   

6. Effect of a Mixture’s Composition on the Electrophysical Parameters and Emission Spectra of Hydrogen Chloride Plasma with Chlorine and Helium

   • S. A. Pivovarenok
   • D. B. Murin
   • D. V. Sitanov

   OriginalPaper 19 February 2021 Pages: 39 - 44

   

7. Experimental Study of the Influence of the Porosity of Thin-Film Silicon-Based Anodes on Their Charge-Discharge Characteristics

   • T. L. Kulova
   • L. A. Mazaletskii
   • I. S. Fedorov

   OriginalPaper 19 February 2021 Pages: 45 - 53

   

8. Numerical Simulation of Cryogenic Etching: Model with Delayed Desorption

   • M. K. Rudenko
   • A. V. Myakon’kikh
   • V. F. Lukichev

   OriginalPaper 19 February 2021 Pages: 54 - 62

   

9. Effect of Process-Related Impurities on the Electrophysical Parameters of a MOS Transistor

   • V. B. Odzhaev
   • A. N. Petlitskii
   • Yu. N. Yankovskii

   OriginalPaper 19 February 2021 Pages: 63 - 68

   

10. Domain Wall Precession in a Narrow Magnetic Nanowire

    • O. S. Trushin
    • N. I. Barabanova

    OriginalPaper 19 February 2021 Pages: 69 - 73