Abstract
The effect of a mixture’s composition on the electrophysical parameters and emission spectra of HCl/Cl2 and HCl/He plasmas under the conditions of a DC glow discharge is analyzed. The data on the gas temperature and reduced electric field strength are obtained. It is established that the reduced electric field strength in HCl/Cl2 plasma rises linearly with the rising fraction of the second gas in the mixture, while the same value in the HCl/He plasma decreases. It is shown that, in the HCl/Cl2 plasma with a variable composition, the atomic chlorine concentration remains practically unchanged, whereas, in the HCl/He plasma, it decreases monotonically.
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The work was carried out as part of a state assignment on scientific research (project no. FZZW-2020-0007).
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Translated by Z. Smirnova
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Pivovarenok, S.A., Murin, D.B. & Sitanov, D.V. Effect of a Mixture’s Composition on the Electrophysical Parameters and Emission Spectra of Hydrogen Chloride Plasma with Chlorine and Helium. Russ Microelectron 50, 39–44 (2021). https://doi.org/10.1134/S1063739720060098
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DOI: https://doi.org/10.1134/S1063739720060098