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Growth of Cu2ZnSnSe4 thin films by selenization of sputtered single-layered Cu-Zn-Sn metallic precursors from a Cu-Zn-Sn alloy target

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Abstract

Cu2ZnSnSe4 (CZTSe) thin films were prepared by the simple process of selenization of single-layered metallic Cu-Zn-Sn precursors. These metallic precursors were deposited by radio frequency magnetron sputtering of a ternary Cu-Zn-Sn alloy target. Successive selenization was performed at various temperatures between 250°C and 500°C for 30 min. X-ray diffraction and Raman analysis showed that a single phase of the CZTSe compound can be obtained by selenization at 400°C, while increasing the selenization temperature to 500°C improves the grain size and crystal quality. The direct optical band gap of CZTSe films was calculated to be 1.06 eV to 1.09 eV with a high absorption coefficient on the order of 104 cm−1 for samples selenized at 400°C to 500°C. The obtained films are p-type semiconductors with bulk carrier concentrations of 2.41 to 7.96 × 1018 cm3, mobilities of 1.30 cm2 V−1 s−1 to 9.27 cm2 V−1 s−1, and resistivities of 0.20 Ωcm to 1.95 Ωcm.

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Correspondence to Ikhlasul Amal.

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Kim, KH., Amal, I. Growth of Cu2ZnSnSe4 thin films by selenization of sputtered single-layered Cu-Zn-Sn metallic precursors from a Cu-Zn-Sn alloy target. Electron. Mater. Lett. 7, 225–230 (2011). https://doi.org/10.1007/s13391-011-0909-x

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  • DOI: https://doi.org/10.1007/s13391-011-0909-x

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