Abstract
In view of the large scientific and technical interest in the MEMS accelerometer sensor and the limitations of capacitive, resistive piezo, and piezoelectric methods, we focus on the measurement of the seismic mass displacement using a novel design of the all-optical sensor (AOS). The proposed AOS consists of two waveguides and a ring resonator in a two-dimensional rod-based photonic crystal (PhC) microstructure, and a holder which connects the central rod of a nanocavity to a proof mass. The photonic band structure of the AOS is calculated with the plane-wave expansion approach for TE and TM polarization modes, and the light wave propagation inside the sensor is analyzed by solving Maxwell’s equations using the finite-difference time-domain method. The results of our simulations demonstrate that the fundamental PhC has a free spectral range of about 730 nm covering the optical communication wavelength-bands. Simulations also show that the AOS has the resonant peak of 0.8 at 1.644µm, quality factor of 3288, full width at half maximum of 0.5nm, and figure of merit of 0.97. Furthermore, for the maximum 200nm nanocavity displacements in the x- or y-direction, the resonant wavelengths shift to 1.618µm and 1.547µm, respectively. We also calculate all characteristics of the nanocavity displacement in positive and negative directions of the x-axis and y-axis. The small area of 104.35 µm2 and short propagation time of the AOS make it an interesting sensor for various applications, especially in the vehicle navigation systems and aviation safety tools.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
C. M. Soukoulis, Photonic crystals and light localization in the 21st century. Germany: Springer Science & Business Media, 2001: 563.
K. Sakoda, Optical properties of photonic crystals. Germany: Springer Science & Business Media, 2001: 80.
M. R. Rakhshani and M. A. Mansouri-Birjandi, “Realization of tunable optical filter by photonic crystal ring resonators,” Optik, 2013, 124(22): 5377–5380.
S. Naghizade and S. M. Sattari-Esfahlan, “Excellent quality factor ultra-compact optical communication filter on ring-shaped cavity,” Journal of Optical Communications, 2019, 40(1): 21–25.
S. Naghizade and S. M. Sattari-Esfahlan, “Loss-less elliptical channel drop filter for WDM applications,” Journal of Optical Communications, 2019, 40(4): 379–384.
M. A. Mansouri-Birjandi, A. Tavousi, and M. Ghadrdan, “Full-optical tunable add/drop filter based on nonlinear photonic crystal ring resonators,” Photonics and Nanostructures - Fundamentals and Applications, 2016, 21: 44–51.
M. Hosseinzadeh Sani, A. Ghanbari, and H. Saghaei, “An ultra-narrowband all-optical filter based on the resonant cavities in rod-based photonic crystal microstructure,” Optical and Quantum Electronics, 2020, 52(6): 295.
S. Naghizade and H. Saghaei, “Tunable graphene-on-insulator band-stop filter at the mid-infrared region,” Optical and Quantum Electronics, 2020, 52(4): 224.
M. Ebnali-Heidari, H. Saghaei, F. Koohi-Kamali, M. Naser Moghadasi, and M. K. Moravvej-Farshi, “Proposal for supercontinuum generation by optofluidic infiltrated photonic crystal fibers,” IEEE Journal on Selected Topics in Quantum Electronics, 2014, 20(5): 582–589.
H. Saghaei, “Dispersion-engineered microstructured optical fiber for mid-infrared supercontinuum generation,” Applied Optics, 2018, 57(20): 5591–5598.
H. Saghaei, M. Ebnali-Heidari, and M. K. Moravvej-Farshi, “Midinfrared supercontinuum generation via As2Se3 chalcogenide photonic crystal fibers,” Applied Optics, 2015, 54(8): 2072–2079.
H. Saghaei and A. Ghanbari, “White light generation using photonic crystal fiber with sub-micron circular lattice,” Journal of Electrical Engineering, 2017, 68(4): 282–289.
A. Kowsari and H. Saghaei, “Resonantly enhanced all-optical switching in microfibre Mach-Zehnder interferometers,” Electronics Letters, 2018, 54(4): 229–231.
M. Aliee, M. H. Mozaffari, and H. Saghaei, “Dispersion-flattened photonic quasicrystal optofluidic fiber for telecom C band operation,” Photonics and Nanostructures — Fundamentals and Applications, 2020, 40: 100797.
S. Naghizade and H. Saghaei, “A novel design of all-optical 4 to 2 encoder with multiple defects in silica-based photonic crystal fiber,” Optik, 2020, 222: 165419.
A. Ghanbari, A. Kashaninia, A. Sadr, and H. Saghaei, “Supercontinuum generation for optical coherence tomography using magnesium fluoride photonic crystal fiber,” Optik, 2017, 140: 545–554.
R. Raei, M. Ebnali-Heidari, and H. Saghaei, “Supercontinuum generation in organic liquid-liquid core-cladding photonic crystal fiber in visible and near-infrared regions,” Journal of the Optical Society of America B, 2018, 35(2): 323–330.
M. Kalantari, A. Karimkhani, and H. Saghaei, “Ultra-wide mid-IR supercontinuum generation in As2S3 photonic crystal fiber by rods filling technique,” Optik, 2018, 158(24): 142–151.
F. Mehdizadeh, M. Soroosh, and H. Alipour-Banaei, “An optical demultiplexer based on photonic crystal ring resonators,” Optik, 2016, 127(20): 8706–8709.
S. Naghizade and S. M. Sattari-Esfahlan, “High-performance ultra-compact communication triplexer on silicon-on-insulator photonic crystal structure,” Photonic Network Communications, 2017, 34(3): 445–450.
F. Mehdizadeh and M. Soroosh, “A new proposal for eight-channel optical demultiplexer based on photonic crystal resonant cavities,” Photonic Network Communications, 2016, 31(1): 65–70.
S. Naghizade and S. M. Sattari-Esfahlan, “An optical five channel demultiplexer-based simple photonic crystal ring resonator for WDM applications,” Journal of Optical Communications, 2018, 41(1): 37–43.
M. R. Rakhshani and M. A. Mansouri-Birjandi, “Design and simulation of four-channel wavelength demultiplexer based on photonic crystal circular ring resonators for optical communications,” Journal of Optical Communications, 2014, 35(1): 9–15.
S. Asgari and N. Granpayeh, “Tunable plasmonic dual wavelength multi/demultiplexer based on graphene sheets and cylindrical resonator,” Optics Communications, 2017, 393: 5–10.
G. Manzacca, D. Paciotti, A. Marchese, M. S. Moreolo, and G. Cincotti, “2D photonic crystal cavity-based WDM multiplexer,” Photonics and Nanostructures-Fundamentals and Applications, 2007, 5(4): 164–170.
H. Saghaei, “Supercontinuum source for dense wavelength division multiplexing in square photonic crystal fiber via fluidic infiltration approach,” Radioengineering, 2017, 26(1): 16–22.
T. A. Moniem, “All-optical digital 4 × 2 encoder based on 2D photonic crystal ring resonators,” Journal of Modern Optics, 2016, 63(8): 735–741.
F. Mehdizadeh, M. Soroosh, and H. Alipour-Banaei, “Proposal for 4-to-2 optical encoder based on photonic crystals,” IET Optoelectronics, 2017, 11(1): 29–35.
S. Salimzadeh and H. Alipour-Banaei, “A novel proposal for all optical 3 to 8 decoder based on nonlinear ring resonators,” Journal of Modern Optics, 2018, 65(17): 2017–2024.
H. Alipour-Banaei, F. Mehdizadeh, S. Serajmohammadi, and M. Hassangholizadeh-Kashtiban, “A 2*4 all optical decoder switch based on photonic crystal ring resonators,” Journal of Modern Optics, 2015, 62(6): 430–434.
F. Mehdizadeh, M. Soroosh, and H. Alipour-Banaei, “A novel proposal for optical decoder switch based on photonic crystal ring resonators,” Optical and Quantum Electronics, 2016, 48(1): 1–9.
D. M. Beggs, T. P. White, L. Cairns, L. O’Faolain, and T. F. Krauss, “Demonstration of an integrated optical switch in a silicon photonic crystal directional coupler,” Physica E: Low-Dimensional Systems and Nanostructures, 2009, 41(6): 1111–1114.
H. Saghaei, A. Zahedi, R. Karimzadeh, and F. Parandin, “Line defects on As2Se3-chalcogenide photonic crystals for the design of all-optical power splitters and digital logic gates,” Superlattices and Microstructures, 2017, 110: 133–138.
H. Saghaei and V. Van, “Broadband mid-infrared supercontinuum generation in dispersion-engineered silicon-on-insulator waveguide,” Journal of the Optical Society of America B, 2019, 36(2): A193–A202.
H. Saghaei, P. Elyasi, and R. Karimzadeh, “Design, fabrication, and characterization of Mach-Zehnder interferometers,” Photonics and Nanostructures — Fundamentals and Applications, 2019, 37: 100733.
M. Diouf, A. Ben Salem, R. Cherif, H. Saghaei, and A. Wague, “Super-flat coherent supercontinuum source in As38.8Se61.2 chalcogenide photonic crystal fiber with all-normal dispersion engineering at a very low input energy,” Applied Optics, 2017, 56(2): 163–169.
A. Salmanpour, S. Mohammadnejad, and P. T. Omran, “All-optical photonic crystal NOT and OR logic gates using nonlinear Kerr effect and ring resonators,” Optical and Quantum Electronics, 2015, 47(12): 3689–3703.
M. M. Karkhanehchi, F. Parandin, and A. Zahedi, “Design of an all optical half-adder based on 2D photonic crystals,” Photonic Network Communications, 2017, 33(2): 159–165.
A. M. Vali-Nasab, A. Mir, and R. Talebzadeh, “Design and simulation of an all optical full-adder based on photonic crystals,” Optical and Quantum Electronics, 2019, 51(5): 161.
M. H. Sani, A. A. Tabrizi, H. Saghaei, and R. Karimzadeh, “An ultrafast all-optical half adder using nonlinear ring resonators in photonic crystal microstructure,” Optical and Quantum Electronics, 2020, 52(2): 107.
S. Naghizade and H. Saghaei, “A novel design of all-optical half adder using a linear defect in a square lattice rod-based photonic crystal microstructure,” arXiv preprint arXiv:2002.04535, 2020.
F. Parandin, M. M. Karkhanehchi, M. Naseri, and A. Zahedi, “Design of a high bitrate optical decoder based on photonic crystals,” Journal of Computational Electronics, 2018, 17(2): 830–836.
A. Tavousi, M. A. Mansouri-Birjandi, and M. Safari, “Successive approximation-like 4-bit full-optical analog-to-digital converter based on Kerr-like nonlinear photonic crystal ring resonators,” Physica E: Low-Dimensional Systems and Nanostructures, 2016, 83: 101–106.
K. Fasihi, “All-optical analog-to-digital converters based on cascaded 3-dB power splitters in 2D photonic crystals,” Optik, 2014, 125(21): 6520–6523.
F. Mehdizadeh, M. Soroosh, H. Alipour-Banaei, and E. Farshidi, “All optical 2-bit analog to digital converter using photonic crystal based cavities,” Optical and Quantum Electronics, 2017, 49(1): 38.
B. Youssefi, M. K. Moravvej-Farshi, and N. Granpayeh, “Two bit all-optical analog-to-digital converter based on nonlinear Kerr effect in 2D photonic crystals,” Optics Communications, 2012, 285(13–14): 3228–3233.
M. H. Sani, S. Khosroabadi, and M. Nasserian, “High performance of an all-optical two-bit analog-to-digital converter based on Kerr effect nonlinear nanocavities,” Applied Optics, 2020, 59(4): 1049–1057.
M. H. Sani, S. Khosroabadi, and A. Shokouhmand, “A novel design for 2-bit optical analog to digital (A/D) converter based on nonlinear ring resonators in the photonic crystal structure,” Optics Communications, 2020, 458: 124760.
A. Tavousi and M. A. Mansouri-Birjandi, “Optical-analog-to-digital conversion based on successive-like approximations in octagonal-shape photonic crystal ring resonators,” Superlattices and Microstructures, 2018, 114: 23–31.
R. V. Nair and R. Vijaya, “Photonic crystal sensors: An overview,” Progress in Quantum Electronics, 2010, 34(3): 89–134.
J. Jágerská, H. Zhang, Z. Diao, N. Le Thomas, and R. Houdré, “Refractive index sensing with an air-slot photonic crystal nanocavity,” Optics Letters, 2010, 35(15): 2523–2525.
F. Tavakoli, F. B. Zarrabi, and H. Saghaei, “Modeling and analysis of high-sensitivity refractive index sensors based on plasmonic absorbers with Fano response in the near-infrared spectral region,” Applied Optics, 2019, 58(20): 5404–5414.
Y. Liu and H. W. M. Salemink, “Photonic crystal-based all-optical on-chip sensor,” Optics Express, 2012, 20(18): 19912–19920.
M. H. Sani and S. Khosroabadi, “A novel design and analysis of high-sensitivity biosensor based on nano-cavity for detection of blood component, diabetes, cancer and glucose concentration,” IEEE Sensors Journal, 2020, 20(13): 7161–7168.
A. A. Tabrizi and A. Pahlavan, “Efficiency improvement of a silicon-based thin-film solar cell using plasmonic silver nanoparticles and an antireflective layer,” Optics Communications, 2020, 454: 124437.
H. Saghaei, V Heidari, M. Ebnali-Heidari, and M. R. Yazdani, “A systematic study of linear and nonlinear properties of photonic crystal fibers,” Optik, 2016, 127(24): 11938–11947.
H. Saghaei, M. K. Moravvej-Farshi, M. Ebnali-Heidari, and M. N. Moghadasi, “Ultra-wide mid-infrared supercontinuum generation in As40Se60 chalcogenide fibers: solid core PCF versus SIF,” IEEE Journal of Selected Topics in Quantum Electronics, 2016, 22(2): 279–286.
A. Sheikhaleh, K. Abedi, and K. Jafari, “A proposal for an optical MEMS accelerometer relied on wavelength modulation with one dimensional photonic crystal,” Journal of Lightwave Technology, 2016, 34(22): 5244–5249.
A. G. Krause, M. Winger, T. D. Blasius, Q. Lin, and O. Painter, “A high-resolution microchip optomechanical accelerometer,” Nature Photonics, 2012, 6(11): 768–772.
T. Ke, T. Zhu, Y. Rao, and M. Deng, “Accelerometer based on all-fiber Fabry-Pérot interferometer formed by hollow-core photonic crystal fiber,” Microwave and Optical Technology Letters, 2010, 52(11): 2531–2535.
D. K. Shaeffer, “MEMS inertial sensors: a tutorial overview,” IEEE Communications Magazine, 2013, 51(4): 100–109.
Y. Li, M. Efatmaneshnik, and A. G. Dempster, “Attitude determination by integration of MEMS inertial sensors and GPS for autonomous agriculture applications,” GPS Solutions, 2012, 16(1): 41–52.
J. Cheng, J. Dong, R. Landry Jr, and D. Chen, “A novel optimal configuration form redundant MEMS inertial sensors based on the orthogonal rotation method,” Sensors, 2014, 14(8): 13661–13678.
K. Huang, L. Cao, P. Zhai, P. Liu, L. Cheng, and J. Liu, “High sensitivity sensing system theoretical research base on waveguide-nano DBRs one dimensional photonic crystal microstructure,” Optics Communications, 2020, 470: 125392.
K. Huang, M. Yu, L. Cheng, J. Liu, and L. Cao, “A proposal for an optical MEMS accelerometer with high sensitivity based on wavelength modulation system,” Journal of Lightwave Technology, 2019, 37(21): 5474–5478.
H. Sun, D. Fang, K. Jia, F. Maarouf, H. Qu, and H. Xie, “A low-power low-noise dual-chopper amplifier for capacitive CMOS-MEMS accelerometers,” IEEE Sensors Journal, 2010, 11(4): 925–933.
R. Xu, S. Zhou, and W. J. Li, “MEMS accelerometer based nonspecific-user hand gesture recognition,” IEEE Sensors Journal, 2012, 12(5): 1166–1173.
A. Albarbar, A. Badri, J. K. Sinha, and A. Starr, “Performance evaluation of MEMS accelerometers,” Measurement: Journal of the International Measurement Confederation, 2009, 42(5): 790–795.
W. Noell, P. A. Clerc, L. Dellmann, B. Guldimann, H. P. Herzig, O. Manzardo, et al., “Applications of SOI-based optical MEMS,” IEEE Journal on Selected Topics in Quantum Electronics, 2002, 8(1): 148–154.
E. Ollier, “Optical MEMS devices based on moving waveguides,” IEEE Journal on Selected Topics in Quantum Electronics, 2002, 8(1): 155–162.
M. C. Wu, O. Solgaard, and J. E. Ford, “Optical MEMS for lightwave communication,” Journal of Lightwave Technology, 2006, 24(12): 4433–4454.
S. Kavitha, R. Joseph Daniel, and K. Sumangala, “Design and analysis of MEMS comb drive capacitive accelerometer for SHM and seismic applications,” Measurement: Journal of the International Measurement Confederation, 2016, 93: 327–339.
C. Acar and A. M. Shkel, “Experimental evaluation and comparative analysis of commercial variable-capacitance MEMS accelerometers,” Journal of Micromechanics and Microengineering, 2003, 13(5): 634–645.
A. Walther, M. Savoye, G. Jourdan, P. Renaux, F. Souchon, P. Robert, et al., “3-axis gyroscope with Si nanogage piezo-resistive detection,” in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), Paris, Jan. 29–Feb. 2, 2012, pp. 480–483.
J. C. Yu and C. B. Lan, “System modeling of microaccelerometer using piezoelectric thin films,” Sensors and Actuators, A: Physical, 2001, 88(2): 178–186.
A. Sheikhaleh, K. Abedi, and K. Jafari, “An optical MEMS accelerometer based on a two-dimensional photonic crystal add-drop filter,” Journal of Lightwave Technology, 2017, 35(14): 3029–3034.
K. Zandi, B. Wong, J. Zou, R. V Kruzelecky, W. Jamroz, and Y. A. Peter, “In-plane silicon-on-insulator optical MEMS accelerometer using waveguide fabry-perot microcavity with silicon/air bragg mirrors,” in 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Hong Kong, Jan. 24–28, 2010, pp. 839–842.
H. Luo, G. Zhang, L. R. Carley, and G. K. Fedder, “A post-CMOS micromachined lateral accelerometer,” Journal of Microelectromechanical Systems, 2002, 11(3): 188–195.
J. Wu, G. K. Fedder, and L. R. Carley, “A low-noise low-offset capacitive sensing amplifier for a 50-/spl mu/g//spl radic/Hz monolithic CMOS MEMS accelerometer,” IEEE Journal of Solid-State Circuits, 2004, 39(5): 722–730.
E. Soltanian, K. Jafari, and K. Abedi, “A novel differential optical MEMS accelerometer based on intensity modulation, using an optical power splitter,” IEEE Sensors Journal, 2019, 19(24): 12024–12030.
M. Ahmadian and K. Jafari, “A graphene-based wide-band MEMS accelerometer sensor dependent on wavelength modulation,” IEEE Sensors Journal, 2019, 19(15): 6226–6232.
Y. Nie, K. Huang, J. Yang, L. Cao, L. Cheng, Q. Wang, et al., “A proposal to enhance high-frequency optical MEMS accelerometer sensitivity based on a one-dimensional photonic crystal wavelength modulation system,” IEEE Sensors Journal, 2020: 1.
S. Olyaee, H. Mohsenirad, and A. Mohebzadeh-Bahabady, Photonic crystal chemical/biochemical sensors, in Progresses in Chemical Sensor, Croatia: IntechOpen, 2016: Ch. 3.
C. Trigona, B. Ando, and S. Baglio, “Design, fabrication, and characterization of BESOI-accelerometer exploiting photonic bandgap materials,” IEEE Transactions on Instrumentation and Measurement, 2014, 63(3): 702–710.
K. Zandi, J. A. Bélanger, and Y. A. Peter, “Design and demonstration of an in-plane silicon-on-insulator optical MEMS Fabry-Pérot-based accelerometer integrated with channel waveguides,” Journal of Microelectromechanical Systems, 2012, 21(6): 1464–1470.
Acknowledgment
The authors thank Professor Lukas Chrostowski at the University of British Columbia for his great guidance and helpful suggestions.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
Open Access This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.
About this article
Cite this article
Hosseinzadeh Sani, M., Saghaei, H., Mehranpour, M.A. et al. A Novel All-Optical Sensor Design Based on a Tunable Resonant Nanocavity in Photonic Crystal Microstructure Applicable in MEMS Accelerometers. Photonic Sens 11, 457–471 (2021). https://doi.org/10.1007/s13320-020-0607-0
Received:
Revised:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s13320-020-0607-0