Skip to main content
Log in

Structure, optical, and magnetic properties of Mn-doped ZnO films prepared by sputtering

  • Published:
International Journal of Minerals, Metallurgy, and Materials Aims and scope Submit manuscript

Abstract

The microstructural, optical, and magnetic properties and room-temperature photoluminescence (PL) of Mn-doped ZnO thin films were studied. The chemical compositions were examined by energy dispersive X-ray spectroscopy (EDS) and the charge state of Mn ions in the ZnO:Mn films was characterized by X-ray photoelectronic spectrometry (XPS). From the X-ray diffraction (XRD) data of the samples, it can be found that Mn doping does not change the orientation of ZnO thin films. All the films prepared have a wurtzite structure and grow mainly along the c-axis orientation. The grain size and the residual stress were calculated from the XRD results. The optical transmittance of the film decreases with the increase of manganese content in ZnO. The room-temperature photoluminescence of the films shows that the intensity of near band energy (NBE) emission depends strongly on the Mn content. The hysteresis behavior indicates that the films with the Mn content below 9at% are ferromagnetic at room temperature.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. J.K. Furdyna, Diluted magnetic semiconductors, J. Appl. Phys., 64(1988), No.4, p.R29.

    Article  CAS  ADS  Google Scholar 

  2. H. Munekata, H. Ohno, S. Von Molnár, et al., Diluted magnetic III-V semiconductors, Phys. Rev. Lett., 63(1989), No.17, p.1849.

    Article  CAS  PubMed  ADS  Google Scholar 

  3. T. Dietl, H. Ohno, F. Matsukura, J. Cibert, and D. Ferrand, Zener model description of ferromagnetism in zinc-blende magnetic semiconductors, Science, 287(2000), No.12, p.1019.

    Article  CAS  PubMed  ADS  Google Scholar 

  4. L.L. Ren and Y.J. Won, Effects of temperature and nickel content on magnetic properties of Ni-doped ZnO, Rare Met., 25(2006), Suppl.2, p.24.

    Article  Google Scholar 

  5. H.P. Xia, J.H. Wang, H.Y. Wang, et al., Optical spectroscopy and crystal-field strength of Cr3+ in various solid matrixes, Rare Met., 25(2006), No.1, p.51.

    Article  CAS  Google Scholar 

  6. M. Yu, J.H. Liu, and S.M. Li, Fabrication and characterization of highly ordered Ni0.5Zn0.5Fe2O4 nanowire/tube arrays by sol-gel template method, J. Univ. Sci. Technol. Beijing, 14(2007), No.5, p.469.

    CAS  Google Scholar 

  7. Y.Q. Chang, D.B. Wang, X.H. Luo, et al., Synthesis, optical, and magnetic properties of diluted magnetic semiconductor Zn1−x MnxO nanowires via vapor phase growth, Appl. Phys. Lett., 83(2002), No.19, p.4020.

    Article  ADS  Google Scholar 

  8. D.P. Norton, S.J. Pearton, A.F. Hebard, et al., Ferromagnetism in Mn-implanted ZnO:Sn single crystals, Appl. Phys. Lett., 82(2003), No.2, p.239.

    Article  CAS  ADS  Google Scholar 

  9. A.K. Pradha, K. Zhang, S. Mohanty, et al., High-temperature ferromagnetism in pulsed-laser deposited epitaxial (Zn,Mn)O thin films: Effects of substrate temperature, Appl. Phys. Lett., 86(2005), No.15, art. No.152511.

  10. D.C. Kundaliya, S.B. Ogale, S.E. Lofland, et al., On the origin of high-temperature ferromagnetism in the low-temperature-processed Mn-Zn-O system, Nat. Mater., 3(2004), p.709.

    Article  CAS  PubMed  ADS  Google Scholar 

  11. S.J. Han, T.H. Jang, Y.B. Kim, et al., Magnetism in Mn-doped ZnO bulk samples prepared by solid state reaction, Appl. Phys. Lett., 83(2003), No.5, p.920.

    Article  CAS  ADS  Google Scholar 

  12. R.K. Zheng, H. Liu, X.X. Zhang, V.A.L. Roy, and A.B. Djurišiæ, Exchange bias and the origin of magnetism in Mn-doped ZnO tetrapods, Appl. Phys. Lett., 85(2001), No.13, p.2589.

    Article  ADS  Google Scholar 

  13. S.S. Kim, J.H. Moon, B.T. Lee, O.S. Song, and J.H. Je, Heteroepitaxial growth behavior of Mn-doped ZnO thin films on Al2O3 (0001) by pulsed laser deposition, J. Appl. Phys., 95(2004), No.2, p.454

    Article  CAS  ADS  Google Scholar 

  14. T. Fukumura, Z.W. Jin, M. Kawasaki, et al., Magnetic properties of Mn-doped ZnO, Appl. Phys. Lett. 78(2001), No.7, p.958.

    Article  CAS  ADS  Google Scholar 

  15. J.F. Moulder, W.F. Stickle, P.E. Sobol, and K.D. Bomben, Handbook of X-ray Photoelectron Spectroscopy, Physical Electronics Inc., Eden Prairie, 1995, p.235.

    Google Scholar 

  16. N. Fujimura, T. Nishihara, S. Goto, J. Xu, and T. Ito, Control of preferred orientation for ZnOx films: control of self-texture, J. Cryst. Growth, 130(1993), No.1–2, p.269.

    Article  CAS  ADS  Google Scholar 

  17. M.T. Weller, Inorganic Materials Chemistry, Oxford University Press, Oxford, 1997, p.153.

    Google Scholar 

  18. Y.G. Wang, S.P. Lau, H.W. Lee, et al., Comprehensive study of ZnO films prepared by filtered cathodic vacuum arc at room temperature, J. Appl. Phys., 94(2003), No.3, p.1597.

    Article  CAS  ADS  Google Scholar 

  19. J.J. Hopfield and D.G. Thomas, Fine structure and magneto-optic effects in the exciton spectrum of cadmium sulfide, Phys. Rev., 122(1961), No.1, p.35.

    Article  CAS  ADS  Google Scholar 

  20. D.C. Reynolds, D.C. Look, B. Jobai, et al., Neutral-donor-bound-exciton complexes in ZnO crystals, Phys. Rev. B, 57(1998), No.19, p.12151.

    Article  CAS  ADS  Google Scholar 

  21. Y.S. Kim, S.H. Lee, J.I. Im, and Y.C. Chung, Magnetic properties and electronic structure of transition metal adsorbed polar-ZnO surfaces: Ab initio calculations, Jpn. J. Appl. Phys. Part 1, 46(2007), No.9B, p.6312.

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Zheng Xu.

Additional information

This work was financially supported by the National Natural Science Foundation of China (Nos.10774013, 10974013, 60978060, and 10804006), the National Natural Science Foundation of China for Distinguished Young Scholars (No.60825407), and the Doctor Science Creative Grants of Beijing Jiaotong University (No.141028522).

Rights and permissions

Reprints and permissions

About this article

Cite this article

Wang, Lw., Xu, Z., Zhang, Fj. et al. Structure, optical, and magnetic properties of Mn-doped ZnO films prepared by sputtering. Int J Miner Metall Mater 17, 475–480 (2010). https://doi.org/10.1007/s12613-010-0344-2

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s12613-010-0344-2

Keywords

Navigation