Abstract
High-precision optical components are widely used in major fields such as strong lasers and astronomy, but the production cycle of components is greatly constrained by the difficulty of machining optical components and the high price of special polishing machines, so it is important to develop a high-efficiency and low-cost fast polishing system for optical components. By combining bonnet polishing technology with industrial robotics, we have developed an industrial robotics bonnet polishing system for optical components, and the effect of robot positioning errors on pad trimming and on the polishing of the entire surface is also analyzed. To verify the processing capability of the robotic bonnet polishing device, polishing pad dressing experiments and optical component surface correction polishing experiments were carried out. After the pad was dressed, the runout value was reduced from 182 to 23 μm with a convergence ratio of 7.9. After polishing the optical component twice, the PV and RMS values on the surface of the component decreased significantly, from 38.05 λ and 9.98 λ to 8.65 λ and 1.38 λ (λ = 632.8) respectively in the middle area of the component, with a convergence ratio of 4.4 and 7.2, proving that the robotic bonnet polishing system can be applied to the polishing process of optical components.
Similar content being viewed by others
Data availability
Data will be made available on request.
References
Walker, D., Yu, G., Li, H., Messelink, W., Evans, R., & Beaucamp, A. (2012). Edges in CNC polishing: from mirror-segments towards semiconductors, paper 1: Edges on processing the global surface. Optics Express, 20(18), 19787–19798.
Barman, A., & Das, M. (2018). Nano-finishing of bio-titanium alloy to generate different surface morphologies by changing magnetorheological polishing fluid compositions. Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology, 51, 145–152.
Xiao, H., Dai, Y., Duan, J., Tian, Y., & Li, J. (2021). Material removal and surface evolution of single crystal silicon during ion beam polishing. Applied Surface Science, 544, 148954.
Cheng, H., Dong, Z., Ye, X., & Tam, H. Y. (2014). Subsurface damages of fused silica developed during deterministic small tool polishing. Optics Express, 22(15), 18588–18603.
Chen, M. Y., Feng, Y. T., Wan, Y. J., Li, Y., & Fan, B. (2010). Neural network based surface shape modeling of stressed lap optical polishing. Applied Optics, 49(8), 1350–1354.
Beaucamp, A., Katsuura, T., & Takata, K. (2018). Process mechanism in ultrasonic cavitation assisted fluid jet polishing. Cirp Annals-Manufacturing Technology, 67(1), 361–364.
Walker, D. D., Beaucamp, A. T., Brooks, D., Freeman, R., King, A., McCavana, G., Morton, R., Riley, D., & Simms, J. (2022) Novel CNC polishing process for control of form and texture on aspheric surfaces. In Proceedings of the SPIE, 4767, 99–105
Pan, R., Zhang, Y., Ding, J., Huang, C., & Wang, Z. (2016). Optimization strategy on conformal polishing of precision optics using bonnet tool. International Journal of Precision Engineering and Manufacturing, 17(3), 271–280.
Wu, Z., Shen, J., Peng, Y., & Wu, X. (2022). Review on ultra-precision bonnet polishing technology. International Journal of Advanced Manufacturing Technology, 121(5–6), 2901–2921.
Xie, D. G., Gao, B., Yao, Y. X., & Yuan, Z. J. (2006). Movement modeling and simulation of pression mechanisms for bonnet tool polishing. Journal of Mechanical Engineering, 42(2), 101–104.
Ri, P., Zhen-Zhong, W., Chun-Jin, W., Yin-Hui, X., Dong-Xu, Z., & Yin-Biao, G. (2014). Research on control optimization for bonnet polishing system. International Journal of Precision Engineering and Manufacturing, 15(3), 483–488.
Xu, D., & Hu, T. T. (2023). Modelling and vibration control of magnetorheological-based polishing tool for robotic polishing process. Mechanical Systems and Signal Processing, 195, 110290.
Zhang, L., Zhang, C., & Fan, W. (2022). Robotic magnetorheological finishing technology based on constant polishing force control. Applied Sciences-Basel, 12(8), 3737.
Wang, C., Han, Y., Zhang, H., Liu, C., Jiang, L., & Qian, L. (2022). Suppression of mid-spatial-frequency waviness by a universal random tree-shaped path in robotic bonnet polishing. Optics Express, 30(16), 29216–29233.
Zhong, B., Deng, W. -H., Chen, X. -H., Zheng, N. (2019) Precision manufacture of aspheric optics by robot-based bonnet polishing. In: 2nd Target recognition and artificial intelligence summit forum, pp. 11427.
Zhong, B., Xu, Q., Wang, J., Deng, W., & Chen, X. (2020). Evaluation and compensation of a kinematic error to enhance prepolishing accuracy for large aspheric surfaces by robotic bonnet technology. Optics Express, 28(17), 25085–25100.
Wan, S., Zhang, X., Wang, W., Xu, M., & Jiang, X. (2019). Edge control in precision robotic polishing based on space-variant deconvolution. Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology, 55, 110–118.
Shi, C., Peng, Y., Hou, L., Wang, Z., & Guo, Y. (2018). Improved analysis model for material removal mechanisms of bonnet polishing incorporating the pad wear effect. Applied Optics, 57(25), 7172–7186.
Wang, Z., Wang, Q., Yang, X., Chen, S., Zhuang, X., & Peng, Y. (2017). Dressing scheme and process parameters analysis for bonnet tool in bonnet polishing. Proceedings of the Institution of Mechanical Engineers Part C-Journal of Mechanical Engineering Science, 231(19), 3569–3578.
Pan, R., Tang, Y., Zhong, B., Chen, D., Wang, Z., Fan, J., & Zhang, C. (2019). Qualitative motion control optimization of the pad dressing process for bonnet tool. IEEE-ASME Transactions on Mechatronics, 24(3), 1141–1152.
Pan, R., Hu, C., Xie, Y., Fan, J., Wang, Z., & Liu, Z. (2023). Study on optimization of process parameters in dressing of bonnet polishing tool. Proceedings of the Institution of Mechanical Engineers Part B-Journal of Engineering Manufacture. https://doi.org/10.1177/09544054221150663
Acknowledgements
This research was supported by the National Natural Science Foundation of China (No. 52075462)
Author information
Authors and Affiliations
Contributions
XH: Conceptualization, Methodology, Writing original draft, ZW: Supervision, Methodology, Funding acquisition. LL: Hardware development.
Corresponding author
Ethics declarations
Competing Interest
The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
About this article
Cite this article
Huang, X., Wang, Z. & Li, L. Study on the Impact of Positioning Errors on the Process Performance of Robotic Bonnet Polishing. Int. J. Precis. Eng. Manuf. 24, 1587–1598 (2023). https://doi.org/10.1007/s12541-023-00882-9
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s12541-023-00882-9