Skip to main content
SpringerLink
Log in

Precision measurement of Z-slide vertical error motion of an ultra-precision lathe by using three-probe method

  • Regular Paper
  • Published:
International Journal of Precision Engineering and Manufacturing Aims and scope Submit manuscript

Abstract

This paper presents a precision measurement of the Z-slide vertical error motion of an ultra-precision lathe based on a three-probe measurement method. The vertical error motion of the Z-slide, which is composed of the vertical parallelism error motion and the vertical straightness error motion, is measured by utilizing three displacement measuring probes to scan a self-cut roll workpiece and an accurate straightedge, respectively. A series of factors which could influence the measurement of the vertical error motion, including the error motion of the spindle, the surface form error of the reference object and the horizontal error motion of the Z-slide, are all successfully removed by using the proposed three-probe measurement system with an error separation method. The influence of the gravity induced deflection of the roll workpiece on the measurement of the Z-slide vertical parallelism error motion is also discussed. Experiments were carried out to verify the feasibility of the proposed methods on a three-axis ultra-precision lathe. The vertical straightness error motion was evaluated to be 133 nm with a measurement repeatability of 21 nm and the vertical parallelism error motion was evaluated to be 12.1 μm with a measurement repeatability of 38 nm.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

Abbreviations

z i :

linear position along Z-axis

θ j :

angular position along circumference

z 1 :

start position of Z-slide

z N :

end position of Z-slide

e roll (z i ,θ j ):

surface form error of roll workpiece

α and ε :

misalignment angle of Z-slide in horizontal and vertical planes

e s_H (z i ):

horizontal straightness error motion of Z-slide

α·z i :

horizontal parallelism error motion of Z-slide

eV(z i ):

vertical error motion of Z-slide

e s_V (z i ):

vertical straightness error motion of Z-slide

ε·z i :

vertical parallelism error motion of Z-slide

ε·z N :

vertical parallelism error motion at z N position

w(z i ):

deflection of roll workpiece

w(z N ):

deflection of roll workpiece at z N position

e Spindle_H (z i ,θ j ) and e Spindle_V (z i ,θ j ):

spindle error motion in horizontal and vertical planes

e Str (z i ):

form error of straightedge

γ·z i and ψ·z i :

mounting errors ofstraightedge in horizontal and vertical planes

References

  1. Jain, K., Klosner, M., Zemel, M., and Raghunandan, S., “Flexible Electronics and Displays: High-Resolution, Roll-to-Roll, Projection Lithography and Photoablation Processing Technologies for High-Throughput Production,” Proceedings of the IEEE, Vol. 93, No. 8, pp. 1500–1510, 2005.

    Article  Google Scholar 

  2. Bruzzone, A. A. G., Costa, H. L., Lonardo, P. M., and Lucca, D. A., “Advances in Engineered Surfaces for Functional Performance,” CIRP Annals-Manufacturing Technology, Vol. 57, No. 2, pp. 750–769, 2008.

    Article  Google Scholar 

  3. Li, G., Xu, Z., Fang, F., Wu, W., Xing, X., et al., “Micro Cutting of V-Shaped Cylindrical Grating Template for Roller Nano-Imprint,” Journal of Materials Processing Technology, Vol. 213, No. 6, pp. 895–904, 2013.

    Article  Google Scholar 

  4. Søndergaard, R., Hösel, M., Angmo, D., Larsen-Olsen, T. T., and Krebs, F. C., “Roll-to-Roll Fabrication of Polymer Solar Cells,” Materials Today, Vol. 15, No. 1, pp. 36–49, 2012.

    Article  Google Scholar 

  5. Lee, S. and Na, Y., “Effect of Roll Patterns on the Ink Transfer in R2R Printing Process,” Int. J. Precis. Eng. Manuf., Vol. 10, No. 5, pp. 123–130, 2009.

    Article  Google Scholar 

  6. Chandra, A., Anderson, G., Melkote, S., Gao, W., Haitjema, H., and Wegener, K., “Role of Surfaces and Interfaces in Solar Cell Manufacturing,” CIRP Annals-Manufacturing Technology, Vol. 63, No. 2, pp. 797–819, 2014.

    Article  Google Scholar 

  7. Kim, C. H., Jo, J., and Lee, S.-H., “Design of Roll-to-Roll Printing Equipment with Multiple Printing Methods for Multi-Layer Printing,” Review of Scientific Instruments, Vol. 83, No. 6, Paper No. 065001, 2012.

    Article  Google Scholar 

  8. Gan, S. W., Lim H. S., Rahaman M., and Frank W., “A Fine Tool Servo System for Global Position Error Compensation for a Miniature Ultra-Precision Lathe,” International Journal of Machine Tools and Manufacture, Vol. 47, No. 7, pp. 1302–1310, 2007.

    Google Scholar 

  9. Oh, J. S., Song, C. K., Hwang, J., Shim, J. Y., and Park, C. H., “An Ultra-Precision Lathe for Large-Area Micro-Structured Roll Molds,” J. Korean Soc. Precis. Eng., Vol. 30, No. 12, pp. 1303–1312, 2013.

    Article  Google Scholar 

  10. Gao, W., Kim, S., Bosse, H., Haitjema, H., Chen, Y., et al., “Measurement Technologies for Precision Positioning,” CIRP Annals-Manufacturing Technology, Vol. 64, No. 2, pp. 773–796, 2015.

    Article  Google Scholar 

  11. Uekita, M. and Takaya, Y., “On-Machine Dimensional Measurement of Large Parts by Compensating for Volumetric Errors of Machine Tools,” Precision Engineering, Vol. 43, pp. 200–210, 2016.

    Article  Google Scholar 

  12. Gao, W., Araki, T., Kiyono, S., Okazaki, Y., and Yamanaka, M., “Precision Nano-Fabrication and Evaluation of a Large Area Sinusoidal Grid Surface for a Surface Encoder,” Precision Engineering, Vol. 27, No. 3, pp. 289–298, 2003.

    Article  Google Scholar 

  13. Chen, Y.-L., Wang, S., Shimizu, Y., Ito, S., Gao, W., and Ju, B.-F., “An In-Process Measurement Method for Repair of Defective Microstructures by Using a Fast Tool Servo with a Force Sensor,” Precision Engineering, Vol. 39, pp. 134–142, 2015.

    Article  Google Scholar 

  14. Kono, D., Matsubara, A., Yamaji, I., and Fujita, T., “High-Precision Machining by Measurement and Compensation of Motion Error,” International Journal of Machine Tools and Manufacture, Vol. 48, No. 10, pp. 1103–1110, 2008.

    Article  Google Scholar 

  15. Gao, W., Lee, J. C., Arai, Y., Noh, Y. J., Hwang, J. H., and Park, C. H., “Measurement of Slide Error of an Ultra-Precision Diamond Turning Machine by Using a Rotating Cylinder Workpiece,” International Journal of Machine Tools and Manufacture, Vol. 50, No. 4, pp. 404–410, 2010.

    Article  Google Scholar 

  16. Fan, K.-C., Chen, M.-J., and Huang, W., “A Six-Degree-of-Freedom Measurement System for the Motion Accuracy of Linear Stages,” International Journal of Machine Tools and Manufacture, Vol. 38, No. 3, pp. 155–164, 1998.

    Article  Google Scholar 

  17. Gao, W., Arai, Y., Shibuya, A., Kiyono, S., and Park, C. H., “Measurement of Multi-Degree-of-Freedom Error Motions of a Precision Linear Air-Bearing Stage,” Precision Engineering, Vol. 30, No. 1, pp. 96–103, 2006.

    Article  Google Scholar 

  18. Evans, C. J., Hocken, R. J., and Estler, W. T., “Self-Calibration: Reversal, Redundancy, Error Separation, and ‘Absolute Testing’,” CIRP Annals-Manufacturing Technology, Vol. 45, No. 2, pp. 617–634, 1996.

    Article  Google Scholar 

  19. Campbell, A., “Measurement of Lathe Z-Slide Straightness and Parallelism Using a Flat Land,” Precision Engineering, Vol. 17, No. 3, pp. 207–210, 1995.

    Article  Google Scholar 

  20. Lee, J. C., Gao, W., Shimizu, Y., Hwang, J., Oh, J. S., and Park, C. H., “Precision Measurement of Carriage Slide Motion Error of a Drum Roll Lathe,” Precision Engineering, Vol. 36, No. 2, pp. 244–251, 2012.

    Article  Google Scholar 

  21. Hwang, J., Park, C.-H., Gao, W., and Kim, S.-W., “A Three-Probe System for Measuring the Parallelism and Straightness of a Pair of Rails for Ultra-Precision Guideways,” International Journal of Machine Tools and Manufacture, Vol. 47, No. 7, pp. 1053–1058, 2007.

    Article  Google Scholar 

  22. Lee, J. C., Gao, W., Shimizu, Y., Hwang, J., Oh, J. S., and Park, C. H., “Spindle Error Motion Measurement of a Large Precision Roll Lathe,” Int. J. Precis. Eng. Manuf., Vol. 13, No. 6, pp. 861–867, 2012.

    Article  Google Scholar 

  23. Lee, J. C., Shimizu, Y., Gao, W., Oh, J. S., and Park, C. H., “Precision Evaluation of Surface Form Error of a Large-Scale Roll Workpiece on a Drum Roll Lathe,” Precision Engineering, Vol. 38, No. 4, pp. 839–848, 2014.

    Article  Google Scholar 

  24. Carr, K. and Ferreira, P., “Verification of Form Tolerances Part I: Basic Issues, Flatness, and Straightness,” Precision Engineering, Vol. 17, No. 2, pp. 131–143, 1995.

    Article  Google Scholar 

  25. Gao, W., Yokoyama, J., Kojima, H., and Kiyono, S., “Precision Measurement of Cylinder Straightness Using a Scanning Multi-Probe System,” Precision Engineering, Vol. 26, No. 3, pp. 279–288, 2002.

    Article  Google Scholar 

  26. Lee, J. C., Gao, W., Shimizu, Y., Ito, S., Hwang, J., et al., “Analysis and Measurement of the Dynamic Motions of a Large-Scale Rotating Roll Workpiece,” Key Engineering Materials, Vols. 523-524, pp. 847–852, 2012.

    Article  Google Scholar 

  27. Liu, S., Watanabe, K., Chen, X., Takahashi, S., and Takamasu, K., “Profile Measurement of a Wide-Area Resist Surface Using a Multi-Ball Cantilever System,” Precision Engineering, Vol. 33, No. 1, pp. 50–55, 2009.

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Finemechanics, Tohoku University, Sendai, 980-8579, Japan

    Zengyuan Niu, Yuan-Liu Chen, Daiki Matsuura, Jung Chul Lee, Ryo Kobayashi, Yuki Shimizu, So Ito & Wei Gao

  2. Korea Institute of Machinery and Materials, 156, Gajeongbuk-ro, Yuseong-gu, Daegu, 34103, South Korea

    Jeong Seok Oh & Chun Hong Park

Authors
  1. Zengyuan Niu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Yuan-Liu Chen
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Daiki Matsuura
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Jung Chul Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Ryo Kobayashi
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Yuki Shimizu
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. So Ito
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. Wei Gao
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. Jeong Seok Oh
    View author publications

    You can also search for this author in PubMed Google Scholar

  10. Chun Hong Park
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Yuan-Liu Chen.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Niu, Z., Chen, YL., Matsuura, D. et al. Precision measurement of Z-slide vertical error motion of an ultra-precision lathe by using three-probe method. Int. J. Precis. Eng. Manuf. 18, 651–660 (2017). https://doi.org/10.1007/s12541-017-0078-4

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s12541-017-0078-4

Keywords

Search

Navigation