Abstract
A method to fabricate a vitreous carbon (VC) mold for glass molded microstructures was investigated by replicating a microstructured furan precursor and carbonization process. The composition of a furan-based thermal curable polymer was optimized along with the processing parameters of thermal curing and carbonization processes to improve the surface quality of microcavities on the VC mold. The engineering feasibility of the proposed method was ensured by successfully molding glass micro-grating structures with a pitch of ~46.3 ÎĽm and a height of ~3.8 ÎĽm using the fabricated VC molds.
Similar content being viewed by others
References
Kang, S., “Replication Technology for Micro/Nano Optical Components,” Japanese Journal of Applied Physics, Vol. 43, No. 8S, pp. 5706–5716, 2004.
Kim, S. M., Kim, H., and Kang, S., “Development of an Ultraviolet Imprinting Process for Integrating a Microlens Array onto an Image Sensor,” Optics Letters, Vol. 31, No. 18, pp. 2710–2712, 2006.
Kim, S. M., Zhang, W., and Cunningham, B. T., “Coupling Discrete Metal Nanoparticles to Photonic Crystal Surface Resonant Modes and Application to Raman Spectroscopy,” Optics Express, Vol. 18, No. 5, pp. 4300–4309, 2010.
Jeong, H. E. and Suh, K. Y., “On the Role of Oxygen in Fabricating Microfluidic Channels with Ultraviolet Curable Materials,” Lab on a Chip, Vol. 8, No. 11, pp. 1787–1792, 2008.
Jung, W., Ra, J., and Park, K., “Design Optimization of Ultrasonic Horn for Micro-Pattern Replication,” Int. J. Precis. Eng. Manuf., Vol. 13, No. 12, pp. 2195–2201, 2012.
Yoo, Y. E., Kim, T. H., Je, T. J., Choi, D. S., Kim, C. W., and Kim, S. K., “Injection Molding of Micro Patterned PMMA Plate,” Transactions of Nonferrous Metals Society of China, Vol. 21, No. pp. s148–s152, 2011.
Nikumb, S., Chen, Q., Li, C., Reshef, H., Zheng, H., et al., “Precision Glass Machining, Drilling and Profile Cutting by Short Pulse Lasers,” Thin Solid Films, Vol. 477, No. 1, pp. 216–221, 2005.
Parashar, V. K., Sayah, A., Pfeffer, M., Schoch, F., Gobrecht, J., and Gijs, M. A. M., “Nano-Replication of Diffractive Optical Elements in Sol–Gel Derived Glasses,” Microelectronic Engineering, Vol. 67, pp. 710–719, 2003.
Yi, A. Y. and Jain, A., “Compression Molding of Aspherical Glass Lenses-A Combined Experimental and Numerical Analysis,” Journal of the American Ceramic Society, Vol. 88, No. 3, pp. 579–586, 2005.
Suzuki, H., Higuchi, T., Nishioka, M., Kitajima, T., Yui, A., et al., “Precision Grinding of Micro Fresnel Shape and Precision Glass Molding of Micro Fresnel Lens,” Proc. of 16th Annual Meeting of the ASPE, pp. 437–440, 2001.
Huang, C. Y., Kuo, C. H., Hsiao, W. T., Huang, K. C., Tseng, S. F., and Chou, C. P., “Glass Biochip Fabrication by Laser Micromachining and Glass-Molding Process,” Journal of Materials Processing Technology, Vol. 212, No. 3, pp. 633–639, 2012.
Schubert, A., Edelmann, J., and Burkhardt, T., “Micro Structuring of Borosilicate Glass by High-Temperature Micro-Forming,” Microsystem Technologies, Vol. 12, No. 8, pp. 790–795, 2006.
Yan, J., Oowada, T., Zhou, T., and Kuriyagawa, T., “Precision Machining of Microstructures on Electroless-Plated Nip Surface for Molding Glass Components,” Journal of Materials Processing Technology, Vol. 209, No. 10, pp. 4802–4808, 2009.
Yasui, M., Takahashi, M., Kaneko, S., Tsuchida, T., Hirabayashi, Y., et al., “Micro Press Molding of Borosilicate Glass using Plated Ni-W Molds,” Japanese Journal of Applied Physics, Vol. 46, No. 9S, pp. 6378–6381, 2007.
Choi, W., Lee, J., Kim, W. B., Min, B. K., Kang, S., and Lee, S. J., “Design and Fabrication of Tungsten Carbide Mould with Micro Patterns Imprinted by Micro Lithography,” Journal of Micromechanics and Microengineering, Vol. 14, No. 11, pp. 1519–1525, 2004.
Han, J., Min, B. K., and Kang, S., “Micro Forming of Glass Microlens Array using an Imprinted and Sintered Tungsten Carbide Micro Mold,” International Journal of Modern Physics B, Vol. 22, No. 31–32, pp. 6051–6056, 2008.
Takahashi, M., Sugimoto, K., and Maeda, R., “Nanoimprint of Glass Materials with Glassy Carbon Molds Fabricated by Focused-Ion-Beam Etching,” Japanese Journal of Applied Physics, Vol. 44, No. 7S, pp. 5600–5605, 2005.
Youn, S. W., Takahashi, M., Goto, H., and Maeda, R., “Fabrication of Micro-Mold for Glass Embossing using Focused Ion Beam, Femto-Second Laser, Eximer Laser and Dicing Techniques,” Journal of Materials Processing Technology, Vol. 187, pp. 326–330, 2007.
Tseng, T. B., Chilukuri, A., Park, S. C., and Kwon, Y. J., “Automated Quality Characterization of 3D Printed Bone Scaffolds,” Journal of Computational Design and Engineering, Vol. 1, No. 3, pp. 194–201, 2014.
Kim, H. U., Cha, D. H., Kim, H. J., and Kim, J. H., “Rhenium-Iridium Coating Effect of Tungsten Carbide Mold for Aspheric Glass Lens,” Int. J. Precis. Eng. Manuf., Vol. 10, No. 3, pp. 19–23, 2009.
Cowlard, F. and Lewis, J., “Vitreous Carbon-a New Form of Carbon,” Journal of Materials Science, Vol. 2, No. 6, pp. 507–512, 1967.
Fitzer, E., Schaefer, W., and Yamada, S., “The Formation of Glasslike Carbon by Pyrolysis of Polyfurfuryl Alcohol and Phenolic Resin,” Carbon, Vol. 7, No. 6, pp. 643–648, 1969.
Maleki, H., Holland, L. R., Jenkins, G. M., and Zimmerman, R. L., “Determining the Shortest Production Time for Glassy Carbon Ware,” Carbon, Vol. 35, No. 2, pp. 227–234, 1997.
Wang, F., Chen, Y., Klocke, F., Pongs, G., and Allen, Y. Y., “Numerical Simulation Assisted Curve Compensation in Compression Molding of High Precision Aspherical Glass Lenses,” Journal of Manufacturing Science and Engineering, Vol. 131, No. 1, Paper No. 011014, 2009.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Ju, J., Lim, S., Seok, J. et al. A method to fabricate Low-Cost and large area vitreous carbon mold for glass molded microstructures. Int. J. Precis. Eng. Manuf. 16, 287–291 (2015). https://doi.org/10.1007/s12541-015-0038-9
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s12541-015-0038-9