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Micro structuring of borosilicate glass by high-temperature micro-forming

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Abstract

A new process technology is presented which allows the direct micro structuring of various glasses, especially bondable borosilicate glass (e.g. Pyrex®7740), by means of forming at high temperatures with a micro-structured tool. The technology and fabrication equipment are described on the basis of a molded demonstration structure, and possibilities for application and transfer to industrial manufacturing are shown.

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Authors and Affiliations

  1. Fraunhofer Institute for Machine Tools and Forming Technology IWU, Chemnitz, Germany

    Andreas Schubert, Jan Edelmann & Thomas Burkhardt

Authors
  1. Andreas Schubert
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  2. Jan Edelmann
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  3. Thomas Burkhardt
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Corresponding author

Correspondence to Jan Edelmann.

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Schubert, A., Edelmann, J. & Burkhardt, T. Micro structuring of borosilicate glass by high-temperature micro-forming. Microsyst Technol 12, 790–795 (2006). https://doi.org/10.1007/s00542-005-0074-y

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  • DOI: https://doi.org/10.1007/s00542-005-0074-y

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