Abstract
Metamaterials have been developed as a new class of artificial effective media realizing many exotic phenomena and unique properties not normally found in nature. Metamaterials enable functionality through structure design, facilitating applications by addressing the severe material issues in the terahertz frequency range. Consequently, prototype functional terahertz devices have been demonstrated, including filters, antireflection coatings, perfect absorbers, polarization converters, and arbitrary wavefront shaping devices. Further integration of functional materials into metamaterial structures have enabled actively and dynamically switchable and frequency tunable terahertz metamaterials through the application of external stimuli. The enhanced light-matter interactions in active terahertz metamaterials may result in unprecedented control and manipulation of terahertz radiation, forming the foundation of many terahertz applications. In this paper, we review the progress during the past few years in this rapidly growing research field. We particularly focus on the design principles and realization of functionalities using single-layer and fewlayer terahertz planar metamaterials, and active terahertz metamaterials through the integration of semiconductors to achieve switchable and frequency-tunable response.
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References
Veselago V G. The electrodynamics of substances with simultaneously negative values of ɛ and µ. Soviet Physics Uspekhi-USSR, 1968, 10(4): 509–514
Pendry J B, Holden A J, Robbins D J, Stewart W J. Magnetism from conductors and enhanced nonlinear phenomena. IEEE Transactions on Microwave Theory and Techniques, 1999, 47(11): 2075–2084
Pendry J B, Holden A J, Stewart W J, Youngs I. Extremely low frequency plasmons in metallic mesostructures. Physical Review Letters, 1996, 76(25): 4773–4776
Wu D M, Fang N, Sun C, Zhang X, Padilla WJ, Basov D N, Smith D R, Schultz S. Terahertz plasmonic high pass filter. Applied Physics Letters, 2003, 83(1): 201–203
Smith D R, Padilla W J, Vier D C, Nemat-Nasser S C, Schultz S. Composite medium with simultaneously negative permeability and permittivity. Physical Review Letters, 2000, 84(18): 4184–4187
Shelby R A, Smith D R, Schultz S. Experimental verification of a negative index of refraction. Science, 2001, 292(5514): 77–79
Pendry J B. Negative refraction makes a perfect lens. Physical Review Letters, 2000, 85(18): 3966–3969
Fang N, Lee H, Sun C, Zhang X. Sub-diffraction-limited optical imaging with a silver superlens. Science, 2005, 308(5721): 534–537
Pendry J B, Schurig D, Smith D R. Controlling electromagnetic fields. Science, 2006, 312(5781): 1780–1782
Leonhardt U. Optical conformal mapping. Science, 2006, 312(5781): 1777–1780
Schurig D, Mock J J, Justice B J, Cummer S A, Pendry J B, Starr A F, Smith D R. Metamaterial electromagnetic cloak at microwave frequencies. Science, 2006, 314(5801): 977–980
Yen T J, Padilla W J, Fang N, Vier D C, Smith D R, Pendry J B, Basov D N, Zhang X. Terahertz magnetic response from artificial materials. Science, 2004, 303(5663): 1494–1496
Moser H O, Casse B D F, Wilhelmi O, Saw B T. Terahertz response of a microfabricated rod-split-ring-resonator electromagnetic metamaterial. Physical Review Letters, 2005, 94(6): 063901
Linden S, Enkrich C, Wegener M, Zhou J, Koschny T, Soukoulis C M. Magnetic response of metamaterials at 100 terahertz. Science, 2004, 306(5700): 1351–1353
Shalaev V M, Cai W, Chettiar U K, Yuan H K, Sarychev A K, Drachev V P, Kildishev A V. Negative index of refraction in optical metamaterials. Optics Letters, 2005, 30(24): 3356–3358
Zhang S, Fan W, Panoiu N C, Malloy K J, Osgood R M, Brueck S R J. Experimental demonstration of near-infrared negative-index metamaterials. Physical Review Letters, 2005, 95(13): 137404
Enkrich C, Wegener M, Linden S, Burger S, Zschiedrich L, Schmidt F, Zhou J F, Koschny T, Soukoulis C M. Magnetic metamaterials at telecommunication and visible frequencies. Physical Review Letters, 2005, 95(20): 203901
Chen H T, O’Hara J F, Azad A K, Taylor A J. Manipulation of terahertz radiation using metamaterials. Laser & Photonics Reviews, 2011, 5(4): 513–533
Luo L, Chatzakis I, Wang J, Niesler F B P, Wegener M, Koschny T, Soukoulis C M. Broadband terahertz generation from metamaterials. Nature Communications, 2014, 5: 3055
Ferguson B, Zhang X C. Materials for terahertz science and technology. Nature Materials, 2002, 1(1): 26–33
Tonouchi M. Cutting-edge terahertz technology. Nature Photonics, 2007, 1(2): 97–105
Azad A K, Dai J, Zhang W. Transmission properties of terahertz pulses through subwavelength double split-ring resonators. Optics Letters, 2006, 31(5): 634–636
Chen H T, O’Hara J F, Taylor A J, Averitt R D, Highstrete C, Lee M, Padilla W J. Complementary planar terahertz metamaterials. Optics Express, 2007, 15(3): 1084–1095
Singh R, Smirnova E, Taylor A J, O’Hara J F, Zhang W. Optically thin terahertz metamaterials. Optics Express, 2008, 16(9): 6537–6543
Chiam S Y, Singh R, Gu J Q, Han J G, Zhang W L, Bettiol A A. Increased frequency shifts in high aspect ratio terahertz split ring resonators. Applied Physics Letters, 2009, 94(6): 064102
Chiam S Y, Singh R, Zhang W L, Bettiol A A. Controlling metamaterial resonances via dielectric and aspect ratio effects. Applied Physics Letters, 2010, 97(19): 191906
O’Hara J F, Singh R, Brener I, Smirnova, Han J, TaylorA J, Zhang W. Thin-film sensing with planar terahertz metamaterials: sensitivity and limitations. Optics Express, 2008, 16(3): 1786–1795
Driscoll T, Andreev G O, Basov D N, Palit S, Cho S Y, Jokerst N M, Smith D R. Tuned permeability in terahertz split-ring resonators for devices and sensors. Applied Physics Letters, 2007, 91(6): 062511
Chen H T, Yang H, Singh R, O’Hara J F, Azad A K, Trugman S A, Jia Q X, Taylor A J. Tuning the resonance in high-temperature superconducting terahertz metamaterials. Physical Review Letters, 2010, 105(24): 247402
Katsarakis N, Konstantinidis G, Kostopoulos A, Penciu R S, Gundogdu T F, Kafesaki M, Economou E N, Koschny T, Soukoulis C M. Magnetic response of split-ring resonators in the far-infrared frequency regime. Optics Letters, 2005, 30(11): 1348–1350
Quan B G, Xu X L, Yang H F, Xia X X, Wang Q, Wang L, Gu C Z, Li C, Li F. Time-resolved broadband analysis of split ring resonators in terahertz region. Applied Physics Letters, 2006, 89(4): 041101
Rockstuhl C, Lederer F, Etrich C, Zentgraf T, Kuhl J, Giessen H. On the reinterpretation of resonances in split-ring-resonators at normal incidence. Optics Express, 2006, 14(19): 8827–8836
Padilla W J, Taylor A J, Highstrete C, Lee M, Averitt R D. Dynamical electric and magnetic metamaterial response at terahertz frequencies. Physical Review Letters, 2006, 96(10): 107401
Driscoll T, Andreev G O, Basov D N, Palit S, Ren T, Mock J, Cho S Y, Jokerst N M, Smith D R. Quantitative investigation of a terahertz artificial magnetic resonance using oblique angle spectroscopy. Applied Physics Letters, 2007, 90(9): 092508
Padilla W J, Aronsson M T, Highstrete C, Lee M, Taylor A J, Averitt R D. Electrically resonant terahertz metamaterials: Theoretical and experimental investigations. Physical Review B, 2007, 75(4): 041102
Padilla W J. Group theoretical description of artificial electromagnetic metamaterials. Optics Express, 2007, 15(4): 1639–1646
O’Hara J F, Smirnova E, Azad A K, Chen H-T, Taylor A J. Effects of microstructure variations on macroscopic terahertz metafilm properties. Active and Passive Electronic Components, 2007, 2007: 49691
O’Hara J F, Smirnova E, Chen H T, Taylor A J, Averitt R D, Highstrete C, Lee M, Padilla W J. Properties of planar electric metamaterials for novel terahertz applications. Journal of Nanoelectronics and Optoelectronics, 2007, 2(1): 90–95
Azad A K, Taylor A J, Smirnova E, O’Hara J F. Characterization and analysis of terahertz metamaterials based on rectangular splitring resonators. Applied Physics Letters, 2008, 92(1): 011119
Fedotov V A, Rose M, Prosvirnin S L, Papasimakis N, Zheludev N I. Sharp trapped-mode resonances in planar metamaterials with a broken structural symmetry. Physical Review Letters, 2007, 99(14): 147401
Singh R, Al-Naib I A I, Koch M, Zhang W. Sharp Fano resonances in THz metamaterials. Optics Express, 2011, 19(7): 6312–6319
Munk B A. Frequency Selective Surfaces: Theory and Design. New York: John Wiley & Sons, 2000
Smith D R, Vier D C, Koschny T, Soukoulis CM. Electromagnetic parameter retrieval from inhomogeneous metamaterials. Physical Review E, 2005, 71(3): 036617
Holloway C L, Kuester E F, Gordon J A, O’Hara J, Booth J, Smith D R. An overview of the theory and applications of metasurfaces: the two-dimensional equivalents of metamaterials. IEEE Antennas and Propagation Magazine, 2012, 54(2): 10–35
Chen H T. Interference theory of metamaterial perfect absorbers. Optics Express, 2012, 20(7): 7165–7172
Landy N I, Sajuyigbe S, Mock J J, Smith D R, Padilla W J. Perfect metamaterial absorber. Physical Review Letters, 2008, 100(20): 207402
Tao H, Landy N I, Bingham C M, Zhang X, Averitt R D, Padilla W J. A metamaterial absorber for the terahertz regime: design, fabrication and characterization. Optics Express, 2008, 16(10): 7181–7188
Landy N I, Bingham C M, Tyler T, Jokerst N, Smith D R, Padilla WJ. Design, theory, and measurement of a polarization-insensitive absorber for terahertz imaging. Physical Review B, 2009, 79(12): 125104
Tao H, Bingham C M, Strikwerda A C, Pilon D, Shrekenhamer D, Landy N I, Fan K, Zhang X, Padilla W J, Averitt R D. Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization. Physical Review B, 2008, 78(24): 241103
Diem M, Koschny T, Soukoulis CM.Wide-angle perfect absorber/thermal emitter in the terahertz regime. Physical Review B, 2009, 79(3): 033101
Shchegolkov D Y, Azad A K, O’Hara J F, Simakov E I. Perfect subwavelength fishnetlike metamaterial-based film terahertz absorbers. Physical Review B, 2010, 82(20): 205117
Wen Q Y, Zhang H W, Xie Y S, Yang Q H, Liu Y L. Dual band terahertz metamaterial absorber: design, fabrication, and characterization. Applied Physics Letters, 2009, 95(24): 241111
Ye Y Q, Jin Y, He S L. Omnidirectional, polarization-insensitive and broadband thin absorber in the terahertz regime. Journal of the Optical Society of America. B, 2010, 27(3): 498–504
Tao H, Bingham C M, Pilon D, Fan K B, Strikwerda A C, Shrekenhamer D, Padilla W J, Zhang X, Averitt R D. A dual band terahertz metamaterial absorber. Journal of Physics. D, 2010, 43(22): 225102
Shen X, Yang Y, Zang Y, Gu J, Han J, Zhang W, Cui T J. Tripleband terahertz metamaterial absorber: design, experiment, and physical interpretation. Applied Physics Letters, 2012, 101(15): 154102
Huang L, Chowdhury D R, Ramani S, Reiten MT, Luo S N, Taylor A J, Chen H T. Experimental demonstration of terahertz metamaterial absorbers with a broad and flat high absorption band. Optics Letters, 2012, 37(2): 154–156
Huang L, Chowdhury D R, Ramani S, Reiten M T, Luo S N, Azad A K, Taylor A J, Chen H T. Impact of resonator geometry and its coupling with ground plane on ultrathin metamaterial perfect absorbers. Applied Physics Letters, 2012, 101(10): 101102
Wen Q Y, Xie Y S, Zhang H W, Yang Q H, Li Y X, Liu Y L. Transmission line model and fields analysis of metamaterial absorber in the terahertz band. Optics Express, 2009, 17(22): 20256–20265
Chen H T, Zhou J, O’Hara J F, Chen F, Azad A K, Taylor A J. Antireflection coating using metamaterials and identification of its mechanism. Physical Review Letters, 2010, 105(7): 073901
Chen H T, Zhou J F, O’Hara J F, Taylor A J. A numerical investigation of metamaterial antireflection coatings. Terahertz Science and Technology, 2010, 3(2): 66–73
Strikwerda A C, Fan K, Tao H, Pilon D V, Zhang X, Averitt R D. Comparison of birefringent electric split-ring resonator and meanderline structures as quarter-wave plates at terahertz frequencies. Optics Express, 2009, 17(1): 136–149
Peralta X G, Smirnova E I, Azad A K, Chen H T, Taylor A J, Brener I, O’Hara J F. Metamaterials for THz polarimetric devices. Optics Express, 2009, 17(2): 773–783
Cong L Q, Cao W, Tian Z, Gu J Q, Han J G, Zhang W L. Manipulating polarization states of terahertz radiation using metamaterials. New Journal of Physics, 2012, 14(11): 115013
Zalkovskij M, Malureanu R, Kremers C, Chigrin D N, Novitsky A, Zhukovsky S, Tang P T, Jepsen P U, Lavrinenko A V. Optically active Babinet planar metamaterial film for terahertz polarization manipulation. Laser & Photonics Reviews, 2013, 7(5): 810–817
Markovich D L, Andryieuski A, Zalkovskij M, Malureanu R, Lavrinenko A V. Metamaterial polarization converter analysis: limits of performance. Applied Physics B, 2013, 112(2): 143–152
Chiang Y J, Yen T J. A composite-metamaterial-based terahertzwave polarization rotator with an ultrathin thickness, an excellent conversion ratio, and enhanced transmission. Applied Physics Letters, 2013, 102(1): 011129
Weis P, Paul O, Imhof C, Beigang R, Rahm M. Strongly birefringent metamaterials as negative index terahertz wave plates. Applied Physics Letters, 2009, 95(17): 171104
Yu N, Genevet P, Kats M A, Aieta F, Tetienne J P, Capasso F, Gaburro Z. Light propagation with phase discontinuities: generalized laws of reflection and refraction. Science, 2011, 334(6054): 333–337
Zhang X, Tian Z, Yue W, Gu J, Zhang S, Han J, Zhang W. Broadband terahertz wave deflection based on C-shape complex metamaterials with phase discontinuities. Advanced Materials, 2013, 25(33): 4567–4572
Neu J, Beigang R, Rahm M. Metamaterial-based gradient index beam steerers for terahertz radiation. Applied Physics Letters, 2013, 103(4): 041109
Grady N K, Heyes J E, Chowdhury D R, Zeng Y, Reiten M T, Azad A K, Taylor A J, Dalvit D A R, Chen H T. Terahertz metamaterials for linear polarization conversion and anomalous refraction. Science, 2013, 340(6138): 1304–1307
Cong L Q, Cao W, Zhang X Q, Tian Z, Gu J Q, Singh R, Han J G, Zhang W L. A perfect metamaterial polarization rotator. Applied Physics Letters, 2013, 103(17): 171107
Cong L Q, Xu N N, Gu J Q, Singh R, Han J G, Zhang WL. Highly flexible broadband terahertz metamaterial quarter-wave plate. Laser & Photonics Reviews, 2014: Early View
Hu D, Wang X K, Feng S F, Ye J S, Sun W F, Kan Q, Klar P J, Zhang Y. Ultrathin terahertz planar elements. Advanced Optical Materials, 2013, 1(2): 186–191
Jiang X Y, Ye J S, He J W, Wang X K, Hu D, Feng S F, Kan Q, Zhang Y. An ultrathin terahertz lens with axial long focal depth based on metasurfaces. Optics Express, 2013, 21(24): 30030–30038
Burckel D B, Wendt J R, Ten Eyck G A, Ginn J C, Ellis A R, Brener I, Sinclair M B. Micrometer-scale cubic unit cell 3D metamaterial layers. Advanced Materials, 2010, 22(44): 5053–5057
Randhawa J S, Gurbani S S, Keung M D, Demers D P, Leahy-Hoppa MR, Gracias D H. Three-dimensional surface current loops in terahertz responsive microarrays. Applied Physics Letters, 2010, 96(19): 191108
Soukoulis C M, Wegener M. Past achievements and future challenges in the development of three-dimensional photonic metamaterials. Nature Photonics, 2011, 5(9): 523–530
Moser H O, Rockstuhl C. 3D THz metamaterials from micro/nanomanufacturing. Laser & Photonics Reviews, 2012, 6(2): 219–244
Choi M, Lee S H, Kim Y, Kang S B, Shin J, Kwak MH, Kang K Y, Lee Y H, Park N, Min B. A terahertz metamaterial with unnaturally high refractive index. Nature, 2011, 470(7334): 369–373
Kadow C, Fleischer S B, Ibbetson J P, Bowers J E, Gossard A C, Dong J W, Palmstrom C J. Self-assembled ErAs islands in GaAs: Growth and subpicosecond carrier dynamics. Applied Physics Letters, 1999, 75(22): 3548–3550
Chen H T, Padilla WJ, Zide JMO, Bank S R, Gossard A C, Taylor A J, Averitt R D. Ultrafast optical switching of terahertz metamaterials fabricated on ErAs/GaAs nanoisland superlattices. Optics Letters, 2007, 32(12): 1620–1622
Roy Chowdhury D, Singh R, O’Hara J F, Chen H T, Taylor A J, Azad A K. Dynamically reconfigurable terahertz metamaterial through photo-doped semiconductor. Applied Physics Letters, 2011, 99(23): 231101
Takano K, Shibuya K, Akiyama K, Nagashima T, Miyamaru F, Hangyo M. A metal-to-insulator transition in cut-wire-grid metamaterials in the terahertz region. Journal of Applied Physics, 2010, 107(2): 024907
Gu J, Singh R, Liu X, Zhang X, Ma Y, Zhang S, Maier S A, Tian Z, Azad A K, Chen H T, Taylor A J, Han J, Zhang W. Active control of electromagnetically induced transparency analogue in terahertz metamaterials. Nature Communications, 2012, 3: 1151
Roy Chowdhury D, Singh R, Taylor A J, Chen H T, Azad A K. Ultrafast manipulation of near field coupling between bright and dark modes in terahertz metamaterial. Applied Physics Letters, 2013, 102(1): 011122
Chen H T, O’Hara J F, Azad A K, Taylor A J, Averitt R D, Shrekenhamer D B, Padilla W J. Experimental demonstration of frequency-agile terahertz metamaterials. Nature Photonics, 2008, 2(5): 295–298
Shen N H, Kafesaki M, Koschny T, Zhang L, Economou E N, Soukoulis C M. Broadband blueshift tunable metamaterials and dual-band switches. Physical Review B, 2009, 79(16): 161102
Shen N H, Massaouti M, Gokkavas M, Manceau J M, Ozbay E, Kafesaki M, Koschny T, Tzortzakis S, Soukoulis C M. Optically implemented broadband blueshift switch in the terahertz regime. Physical Review Letters, 2011, 106(3): 037403
Zhang S, Zhou J, Park Y S, Rho J, Singh R, Nam S, Azad A K, Chen H T, Yin X, Taylor A J, Zhang X. Photoinduced handedness switching in terahertz chiral metamolecules. Nature Communications, 2012, 3: 942
Zhang S, Park Y S, Li J, Lu X, Zhang W, Zhang X. Negative refractive index in chiral metamaterials. Physical Review Letters, 2009, 102(2): 023901
Zhou J F, Chowdhury D R, Zhao R K, Azad A K, Chen H T, Soukoulis C M, Taylor A J, O’Hara J F. Terahertz chiral metamaterials with giant and dynamically tunable optical activity. Physical Review B, 2012, 86(3): 035448
Fan K B, Zhao X G, Zhang J D, Geng K, Keiser G R, Seren H R, Metcalfe G D, Wraback M, Zhang X, Averitt R D. Optically tunable terahertz metamaterials on highly flexible substrates. IEEE Transactions on Terahertz Science and Technology, 2013, 3(6): 702–708
Chen H T, Padilla W J, Zide J M O, Gossard A C, Taylor A J, Averitt R D. Active terahertz metamaterial devices. Nature, 2006, 444(7119): 597–600
Chen H T, Padilla WJ, Cich M J, Azad A K, Averitt R D, Taylor A J. A metamaterial solid-state terahertz phase modulator. Nature Photonics, 2009, 3(3): 148–151
Chen H T, Palit S, Tyler T, Bingham CM, Zide J MO, O’Hara J F, Smith D R, Gossard A C, Averitt R D, Padilla W J, Jokerst N M, Taylor A J. Hybrid metamaterials enable fast electrical modulation of freely propagating terahertz waves. Applied Physics Letters, 2008, 93(9): 091117
Shrekenhamer D, Rout S, Strikwerda A C, Bingham C, Averitt R D, Sonkusale S, Padilla WJ. High speed terahertz modulation from metamaterials with embedded high electron mobility transistors. Optics Express, 2011, 19(10): 9968–9975
Chen H T, Lu H, Azad A K, Averitt R D, Gossard A C, Trugman S A, O’Hara J F, Taylor A J. Electronic control of extraordinary terahertz transmission through subwavelength metal hole arrays. Optics Express, 2008, 16(11): 7641–7648
Paul O, Imhof C, Lägel B, Wolff S, Heinrich J, Höfling S, Forchel A, Zengerle R, Beigang R, Rahm M. Polarization-independent active metamaterial for high-frequency terahertz modulation. Optics Express, 2009, 17(2): 819–827
Peralta X G, Brener I, Padilla WJ, Young EW, Hoffman A J, Cich M J, Averitt R D, Wanke M C, Wright J B, Chen H T, O’Hara J F, Taylor A J, Waldman J, Goodhue W D, Li J, Reno J. External modulators for terahertz quantum cascade lasers based on electrically-driven active metamaterials. Metamaterials, 2010, 4(2–3): 83–88
Chan WL, Chen H T, Taylor A J, Brener I, Cich M J, Mittleman D M. A spatial light modulator for terahertz beams. Applied Physics Letters, 2009, 94(21): 213511
Shrekenhamer D, Montoya J, Krishna S, Padilla W J. Four-color metamaterial absorber THz spatial light modulator. Advanced Optical Materials, 2013, 1(12): 905–909
Karl N, Reichel K, Chen H T, Taylor A J, Brener I, Benz A, Reno J L, Mendis R, Mittleman D M. An electrically driven terahertz metamaterial diffractive modulator with more than 20 dB of dynamic range. Applied Physics Letters, 2014, 104(9): 091115
Fan K, Hwang H Y, Liu M, Strikwerda A C, Sternbach A, Zhang J, Zhao X, Zhang X, Nelson K A, Averitt R D. Nonlinear terahertz metamaterials via field-enhanced carrier dynamics in GaAs. Physical Review Letters, 2013, 110(21): 217404
Scalari G, Maissen C, Turcinková D, Hagenmüller D, De Liberato S, Ciuti C, Reichl C, Schuh D, Wegscheider W, Beck M, Faist J. Ultrastrong coupling of the cyclotron transition of a 2D electron gas to a THz metamaterial. Science, 2012, 335(6074): 1323–1326
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This paper is dedicated to the fond memory of my friend and classmate Dr. Hua Zhong, who passed away on Dec. 8, 2013
Hou-Tong Chen received his B.S. and M.S. degrees from the University of Science and Technology of China in 1997 and 2000, respectively, and Ph.D degree from Rensselaer Polytechnic Institute in 2004, all in physics. Between 05/2005 and 05/2008, he was a postdoctoral research associate in Los Alamos National Laboratory (LANL). Since 06/2008, he has been a technical staff member in the Center for Integrated Nanotechnologies (CINT) at LANL, a Department of Energy/Office of Science Nanoscale Science Research Center (NSRC) jointly operated by Los Alamos and Sandia National Laboratories as a national user facility. His research interests are in metamaterials and terahertz science and technology. He has co-authored over 50 publications in peer-reviewed journals including Science, Nature, Nature Photonics, and Physical Review Letters, which have been totally cited over 2400 times according to ISI Web of Science. He has delivered over 50 invited presentations in international conferences as well as colloquia and seminars in research institutions. He received LANL Achievement Awards in 2013 and 2007. He has been serving as a member of the Editorial Committee in Scientific Reports, International Journal of Terahertz Science and Technology and Frontiers of Optoelectronics. He also served many conferences and workshops in the organizing committee, advisory committee, or technical program committee.
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Chen, HT. Semiconductor activated terahertz metamaterials. Front. Optoelectron. 8, 27–43 (2015). https://doi.org/10.1007/s12200-014-0436-0
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DOI: https://doi.org/10.1007/s12200-014-0436-0