Abstract
One of the many remarkable properties of diamond is its thermal conductivity, about five times that of copper and the highest of all known materials. The high thermal conductivity in combination with the relative ease of diamond film growth by chemical vapor deposition process makes the material suitable for many applications such as thermal management in high power electronic circuits. For thermal managements applications, various processing steps are needed for the diamond films, such as the metallization for reliable solder bonding, metallurgical processes for planarizing of the faceted growth surface and removal of fine-grained diamond regions with poor thermal conductivity. This paper will review the properties and processing of diamond films for thermal management applications.
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Jin, S., Mavoori, H. Processing and properties of CVD diamond for thermal management. J. Electron. Mater. 27, 1148–1153 (1998). https://doi.org/10.1007/s11664-998-0063-x
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DOI: https://doi.org/10.1007/s11664-998-0063-x