Abstract
Design of experiments and multiphysics analyses were used to develop a parametric model for a d 33-based cantilever. The analysis revealed that the most significant parameters influencing the resonant frequency are the supporting layer thickness, piezoelectric layer thickness, and cantilever length. On the other hand, the most important factors affecting the charge output are the piezoelectric thickness and the interdigitated electrode dimensions. The accuracy of the developed model was confirmed and showed less than 1% estimation error compared with a commercial simulation package. To estimate the power delivered to a load, the electric current output from the piezoelectric generator was calculated. A circuit model was built and used to estimate the power delivered to a load, which compared favorably to experimentally published power data on actual cantilevers of similar dimensions.
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References
V. Leonov and R.J.M. Vullers, J. Renew. Sustain. Energy 1, 2701 (2009).
S.Y. Yurish and M.T. Gomes, Smart Sensors and MEMS (Portugal: Povoa de Varzim, 2003), p. 91.
N. Shenck and J.A. Paradiso, J. IEEE Micro. 21, 30 (2001).
S. Roundy, P.K. Wright, and J.M. Rabaey, Energy Scavenging for Wireless Sensor Nerworks (Boston, MA: Kluwer Academic, 2003).
S. Priya, C.T. Chen, D. Fye, and J. Zhand, Jpn. J. Appl. Phys. 44, 104 (2005).
K. Hwang, M. Koo, and S. Kim, Proceedings of SPIE (Santa Clara, CA, USA, 1998), p. 171.
B. Xu, Y. Ye, L.E. Cross, J. Bernstein, and R. Miller, Appl. Phys. Lett. 74, 3549 (1999).
J.J. Bernstein, J. Bottari, K. Houston, G. Kirkos, R. Miller, B. Xu, Y. Ye, and L.E. Cross, IEEE 1999 Ultrasonics Symposium (Lake Tahoe, NV, 1999).
W.J. Choi, Y. Jeon, J.-H. Jeong, R. Sood, and S.G. Kim, J. Electroceram. 17, 543 (2006).
Y.B. Jeon, R. Sood, J.-H. Jeong, and S.G. Kim, Sens. Actuators A 122, 16 (2005).
M. Goldfarb and L.D. Jones, ASME J. Dyn. Syst. Meas. Control 121, 566 (1999).
H.A. Sodano, D.J. Inman, and G. Park, J. Intell. Mater. Syst. Struct. 16, 799 (2005).
H.A. Sodano, J. Lloyd, and D.J. Inman, Proceedings of the 11th SPIE International Symposium on Smart Structures and Integrated Systems, Vol. 5390 (Bellingham, WA, 2004), p. 370.
Y.C. Shu and I.C. Lien, Smart Mater. Struct. 15, 1499 (2006).
D.C. Montgomery, Design and Analysis of Experiments, 3rd ed. (New York: John, 1991).
C.B. Williams and R.B. Yates, Sens. Actuators 52, 8 (1996).
S. Trolier-McKinstry and P. Muralt, J. Electroceram. 12, 7 (2004).
M.A. Ahmad and R. Plana, Int. J. Microw. Wirel. Technol. 1, 5 (2009).
U.K. Singh and R.H. Middleton, Australian Mining Technology Conference (2007), p. 111.
Y. Jeon, R. Sood, L. Steyn, and S.-G. Kim, CIRP Seminar on Micro and Nano Technology (Copenhagen, Denmark, 2003).
M. Marzencki and S. Basrour, Eurosensors (Sweden: Göteborg, 2006).
I.W. Burr, Applied Statistical Methods (New York: Academic, 1974).
N. Draper and H. smith, Applied Regression Analysis, 3rd ed. (New York: Wiley, 1998).
S. Roundy and P. KWright, Smart Mater. Struct. 13, 1131 (2004).
N.G. Elvin, J. Intell. Mater. Syst. Struct. 20, 2223 (2009).
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Ahmad, M.A., Alshareef, H.N. Modeling the Power Output of Piezoelectric Energy Harvesters. J. Electron. Mater. 40, 1477–1484 (2011). https://doi.org/10.1007/s11664-011-1631-z
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DOI: https://doi.org/10.1007/s11664-011-1631-z