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Physical and technological principles of designing layer-gradient multicomponent surfaces by combining the methods of ion-diffusion saturation and magnetron- and vacuum-arc deposition

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Russian Physics Journal Aims and scope

Using a technological system proposed by the authors, a combined process is developed for formation of stratified-gradient surface layers and multicomponent coatings. It is implemented under the conditions of a combined serial-parallel operation of a hot-cathode gas plasma generator and a duomagnetron with two targets and two electric-arc evaporators. The extended functional potential is ensured by using advanced multi-element and multi-phase cathode targets made of borides, carbides, silicides, and sulfides of metals produced by the SHS-process followed by their immediate compaction. The variations in composition, structure, and physicomechanical properties in the cross-section of the stratified-gradient surface layers and coating is provided by a predetermined alternating replacement of the sputtered cathode targets of the plasma sources, the plasma flow intensity ratios, and variation in the particle energy incident on the substrate, which is determined by the accelerating voltage on the substrate.

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Authors and Affiliations

  1. V. D. Kuznetsov Siberian Physical-Technical Institute of Tomsk State University, Tomsk, Russia

    V. M. Savostikov, A. I. Potekaev & A. N. Tabachenko

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  1. V. M. Savostikov
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  2. A. I. Potekaev
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  3. A. N. Tabachenko
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Correspondence to A. I. Potekaev.

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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 7, pp. 26–34, July, 2011.

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Savostikov, V.M., Potekaev, A.I. & Tabachenko, A.N. Physical and technological principles of designing layer-gradient multicomponent surfaces by combining the methods of ion-diffusion saturation and magnetron- and vacuum-arc deposition. Russ Phys J 54, 756–764 (2011). https://doi.org/10.1007/s11182-011-9680-6

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  • DOI: https://doi.org/10.1007/s11182-011-9680-6

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