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Hydrogen Reduction of Germanium Tetrafluoride in RF-Discharge

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Abstract

A germanium tetrafluoride conversion into germanium and polyfluorogermanes in hydrogen inductively coupled RF-discharge plasma (13.56 MHz) has been experimentally studied. The product ratio is dependent on specific energy contribution into discharge. Conditions that ensure practically complete conversion of GeF4 and the yield of germanium equal to 86 % have been found. The analysis of exhaust gases, of chemically active plasma and of condensed phase by emission- and IR-spectroscopy as well as by mass spectrometry made it possible to propose mechanism accounting for the formation of observed intermediate species and final products.

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Acknowledgments

The work was supported by Russian Foundation for Basic Research (Project No. 15-43-02308).

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Authors and Affiliations

  1. G.G. Devyatykh Institute of Chemistry of High-Purity Substances of RAS, 49 Tropinin Str., Nizhny Novgorod, 603950, Russia

    R. A. Kornev & P. G. Sennikov

Authors
  1. R. A. Kornev
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  2. P. G. Sennikov
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Correspondence to R. A. Kornev.

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Kornev, R.A., Sennikov, P.G. Hydrogen Reduction of Germanium Tetrafluoride in RF-Discharge. Plasma Chem Plasma Process 35, 1111–1118 (2015). https://doi.org/10.1007/s11090-015-9643-8

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  • DOI: https://doi.org/10.1007/s11090-015-9643-8

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