Abstract
Nano-structured \(\mathrm{TiO }_{2}\) planar waveguides were prepared by sol–gel route: titanium tetraisopropoxide was dissolved in isopropanol, and then hydrolyzed by adding a water/isopropanol mixture with a controlled hydrolysis ratio. The resulting sol was deposited by “dip-coating” on a glass substrate with a controlled withdrawal speed. The obtained films were annealed for 2 h at 350 and \(500\,^{\circ }\mathrm C \), respectively. The structural and morphological properties of the synthesized films were analyzed by X-ray diffraction, scanning electron microscopy, and atomic force microscopy. Optical properties such as refractive index, thickness, number of propagating modes, and attenuation coefficient were measured at 632.8 nm by m-lines spectroscopy as a function of the elaboration parameters. The films exhibit diffraction pattern consistent with an anatase phase and the \(\mathrm{TiO }_{2}\) planar waveguides are multimodes and demonstrate propagation losses as low as 0.3 dB/cm.
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Alasaarela, T., Korn, D., Alloatti, L., Säynätjoki, A., Tervonen, A., Palmer, R., Leuthold, J., Freude, W., Honkanen, S.: Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition. Opt. Exp. 19, 11529–11538 (2011)
Bahtat, M., Mugnier, J., Liren, L., Serughetti, J.: Planar \(\text{ TiO }_{2}\) waveguides by the sol–gel process: the relationship of structure to properties. Proc. SPIE 1758, 173–176 (1992)
Bedu, M., Sagarzazu, G., Gacoin, T., Audebert, P., Weisbuch, C., Martinelli, L.: Sol–gel planar waveguides for improved fluorescence microarrays. Thin Solid Films 518, 4450–4457 (2010)
Bernard, C., Chaussedent, S., Monteil, A., Ferrari, M.: Molecular dynamics simulation of an Er-activated silica-titania glass: composition influence on the structural properties. Philos. Mag. B 82, 681–693 (2002)
Boudrioua, A., Loulergue, J.C.: New approach for loss measurements in optical planar waveguides. Opt. Commun. 137, 37–40 (1997)
Bradley, J.D.B., Evans, C.C., Parsy, F., Phillips, K.C., Senaratne, R., Marti, E., Mazur, E.: Low-loss TiO2 planar waveguides for nanophotonic applications. In: 23rd Annual Meeting of the IEEE Photonics Society, pp. 313–314, Denver, CO. [ISBN 978-1-4244-5368-9] (2010)
Brudnik, A., Cztemastek, H., Zakrzewska, K., Jachimowski, M.: Plasma-emission-controlled d.c. magnetron sputtering of \(\text{ TiO }_{2-x}\) thin films. Thin Solid Films 199, 45–58 (1991)
Conde-Gallardo, A., García-Rocha, M., Palomino-Merino, R., Velásquez-Quesada, M.P., Hernández-Calderón, I.: Photoluminescence properties of \(\text{ Tb }^{+3 }\) and \(\text{ Eu }^{+3}\) ions hosted in \(\text{ TiO }_{2}\) matrix. Appl. Surf. Sci. 212–213, 583–588 (2003)
Cuisin, C., Chelnokov, A., Lourtioz, J.-M., Decanini, D., Chen, Y.: Fabrication of three-dimensional photonic structures with submicrometer resolution by X-ray lithography. J. Vac. Sci. Technol. B 18, 3505–3509 (2000)
Ehrhart, G., Capoen, B., Robbe, O., Boy, P., Turrell, S., Bouazaoui, M.: Structural and optical properties of n-propoxide sol–gel derived \(\text{ ZrO }_{2}\) thin films. Thin Solid Films 496, 227–233 (2006)
Garzella, C., Comini, E., Tempesti, E., Frigeri, C., Sberveglieri, G.: \(\text{ TiO }_{2}\) thin films by a novel sol–gel processing for gas sensor applications. Sens. Actuators B: Chem. 68, 189–196 (2000)
Hench, L.L., West, J.K.: The sol–gel process. Chem. Rev. 90, 33–72 (1990)
Ho, K.M., Chan, C.T., Soukoulis, C.M.: Existence of a photonic gap in periodic dielectric structures. Phys. Rev. Lett. 65, 3152–3155 (1990)
Johnson, S.G., Joannopoulos, J.D.: Block-iterative frequency-domain methods for Maxwell’s equations in a planewave basis. Opt. Exp. 8, 173–190 (2001)
Keddie, J.L., Braun, P.V., Giannelis, E.P.: Interrelation between densification, crystallization, and chemical evolution in sol–gel titania thin films. J. Am. Ceram. Soc. 77, 1592–1596 (1994)
Kersten, RTh: Numerical solution of the mode-equation of planar dielectric waveguides to determine their refractive index and thickness by means of a prism-film coupler. Opt. Commun. 9, 427–431 (1973)
Kuznetsova, I.N.: Elaboration par procédé sol–gel de couches minces de \(\text{ TiO }_{2}\) nanostructuré: caractérisations structurale et optique. Ph.D. Thesis, Université Paris 13, France (2007)
Mechiakh, R., Ben Sedrine, N., Ben Naceur, J., Chtourou, R.: Elaboration and characterization of nanocrystalline \(\text{ TiO }_{2}\) thin films prepared by sol–gel dip-coating. Surf. Coat. Technol. 206, 243–249 (2011)
Montagna, M., Moser, E., Visintain, F., Ferrari, M., Zampedri, L., Martucci, A., Guglielmi, M., Ivanda, M.: Nucleation of titania nanocrystals in silica titania waveguides. J. Sol–Gel Sci. Technol. 26, 241–244 (2003)
Nishide, T., Sato, M., Hara, H.: Crystal structure and optical property of \(\text{ TiO }_{2}\) gels and films prepared from Ti-edta complexes as titania precursors. J. Mater. Sci. 35, 465–469 (2000)
Oh, S.H., Kim, D.J., Hahn, S.H., Kim, E.J.: Comparison of optical and photocatalytic properties of \(\text{ TiO }_{2}\) thin films prepared by electron-beam evaporation and sol–gel dip-coating. Mater. Lett. 57, 4151–4155 (2003)
Pandiyan, R., Micheli, V., Ristic, D., Bartali, R., Pepponi, G., Barozzi, M., Gottardi, G., Ferrari, M., Laidani, N.: Structural and near-infra red luminescence properties of Nd-doped \(\text{ TiO }_{2}\) films deposited by RF sputtering. J. Mater. Chem. 22, 22424–22432 (2012)
San Vicente, G., Morales, A., Gutierrez, M.T.: Preparation and characterization of sol–gel \(\text{ TiO }_{2}\) antireflective coatings for silicon. Thin Solid Films 391, 133–137 (2001)
Shen, J., Yang, T., Zhang, Q., Wang, J.: Nanoporous \(\text{ TiO }_{2}\) coatings for infrared detectors. J. Sol–Gel Sci. Technol. 26, 1029–1032 (2003)
Shimada, S., Miyazawa, K., Kuwabara, M.: An easy method for fabricating \(\text{ TiO }_{2 }\)gel photonic crystals using molds and highly concentrated alkoxide solutions. Jpn. J. Appl. Phys. 41, L291–L293 (2002)
Strohkendl, F.P., Fluck, D., Günter, P., Irmsher, R., Buchal, Ch.: Nonleaky optical waveguides in \(\text{ KNbO }_{3}\) by ultralow dose MeV He ion implantation. Appl. Phys. Lett. 59, 3354–3356 (1991)
Thoma, F., Langbein, U., Mittler-Neher, S.: Waveguide scattering microscopy. Opt. Commun. 134, 16–20 (1997)
Tien, P.K., Ulrich, R.: Theory of prism-film coupler and thin-film light guides. J. Opt. Soc. Am. 60, 1325–1337 (1970)
Uhlman, D.R., Teowee, G.: Sol–gel science technology: current state and future prospects. J. Sol–Gel Sci. Technol. 13, 153–162 (1998)
Ulrich, R.: Theory of the prism-film coupler by plane-wave analysis. J. Opt. Soc. Am. 60, 1337–1350 (1970)
Ulrich, R., Torge, R.: Measurement of thin-film papameters with prism coupler. Appl. Opt. 12, 2901–2908 (1973)
Urlacher, C., Dumas, J., Serughetti, J., Mugnier, J., Munoz, M.: Planar \(\text{ ZrO }_{2}\) waveguides prepared by the sol–gel process: structural and optical properties. J. Sol–Gel Sci. Technol. 8, 999–1005 (1999)
Wang, B., Hu, L.: Optical and surface properties of hybrid \(\text{ TiO }_{2}\)/ormosil planar waveguide prepared by the sol–gel process. Ceram. Int. 32, 7–12 (2006)
Wang, Z., Helmerson, U., Kall, P.O.: Optical properties of anatase \(\text{ TiO }_{2}\) thin films prepared by aqueous sol–gel process at low temperature. Thin Solid Films 405, 50–54 (2002)
Weber, H.P., Dunn, F.A., Leibolt, W.N.: Loss measurements in thin-film optical waveguides. Appl. Opt. 12, 755–757 (1973)
Wijnhoven, J.E.G.J., Vos, W.L.: Preparation of photonic crystals made of air spheres in titania. Science 281, 802–804 (1998)
Wongcahree, K., Brungs, M., Chapline, R., Hong, Y., Pilar, R., Sizgek, E.: Sol–gel processing by aging and pore creator addition for porous silica antireflective coatings. J. Sol–Gel Sci. Technol. 25, 215–221 (2002)
Yablonovitch, E., Gmitter, T.J., Leung, K.M.: Photonic band structure: the face-centered-cubic case employing nonspherical atoms. Phys. Rev. Lett. 67, 2295–2298 (1991)
Yamasaki, S., Hata, N., Yoshida, T., Oheda, H., Matsuda, A., Okushi, H., Tanaka, K.: Annealing studies on low optical absorption of GD a-Si:H using photo-acoustic spectroscopy. J. Phys. Colloq. 42, C4–297–C4-300 (1981)
Yanagida, S., Senadeera, G.K.R., Nakamura, K., Kitamura, T., Wada, Y.: Deposition of polyaniline via molecular self-assembly on \(\text{ TiO }_{2}\) and its uses as a sensitizer in solid-state solar cells. J. Photochem. Photobiol. A 164, 61–66 (2004)
Yang, L., Scott Saavedra, S., Armstrong, N.R., Hayes, J.: Fabrication and characterization of low loss, sol–gel planar waveguides. Anal. Chem. 66, 1254–1263 (1994)
Yee, K.S.: Numerical solution of initial boundary value problems involving Maxwell’s equations in isotropic media. IEEE Trans. Antennas Propag. 14, 302–307 (1966)
Znaidi, L., Bocquet, J.F., Pommier, C.: Elaboration of \(\text{ TiO }_{2}\) nanometric powders and thin films aerogels. In: AIDIC, Selected Papers, Conference Series of ICheaP-4, vol. 4, pp. 109–112 (1999)
Znaidi, L., Seraphimova, R., Bocquet, J.F., Colbeau-Justin, C., Pommier, C.: A semi-continuous process for the synthesis of nanosize \(\text{ TiO }_{2}\) powders and their use as photocatalysts. Mat. Res. Bull. 36, 811–825 (2001)
Znaidi, L., Touam, T., Vrel, D., Kunetsova, I.N., Fischer, A., Boudrioua, A.: Waveguiding properties of nano-structured \(\text{ TiO }_{2}\) thin films synthesized by sol–gel process. AIP Conf. Proc. 1400, 268–273 (2011)
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Touam, T., Znaidi, L., Vrel, D. et al. Low optical loss nano-structured \(\mathrm{TiO }_{2}\) planar waveguides by sol–gel route for photonic crystal applications. Opt Quant Electron 46, 23–37 (2014). https://doi.org/10.1007/s11082-013-9692-2
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DOI: https://doi.org/10.1007/s11082-013-9692-2