Skip to main content
Log in

Low optical loss nano-structured \(\mathrm{TiO }_{2}\) planar waveguides by sol–gel route for photonic crystal applications

  • Published:
Optical and Quantum Electronics Aims and scope Submit manuscript

Abstract

Nano-structured \(\mathrm{TiO }_{2}\) planar waveguides were prepared by sol–gel route: titanium tetraisopropoxide was dissolved in isopropanol, and then hydrolyzed by adding a water/isopropanol mixture with a controlled hydrolysis ratio. The resulting sol was deposited by “dip-coating” on a glass substrate with a controlled withdrawal speed. The obtained films were annealed for 2 h at 350 and \(500\,^{\circ }\mathrm C \), respectively. The structural and morphological properties of the synthesized films were analyzed by X-ray diffraction, scanning electron microscopy, and atomic force microscopy. Optical properties such as refractive index, thickness, number of propagating modes, and attenuation coefficient were measured at 632.8 nm by m-lines spectroscopy as a function of the elaboration parameters. The films exhibit diffraction pattern consistent with an anatase phase and the \(\mathrm{TiO }_{2}\) planar waveguides are multimodes and demonstrate propagation losses as low as 0.3 dB/cm.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9

Similar content being viewed by others

References

  • Alasaarela, T., Korn, D., Alloatti, L., Säynätjoki, A., Tervonen, A., Palmer, R., Leuthold, J., Freude, W., Honkanen, S.: Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition. Opt. Exp. 19, 11529–11538 (2011)

    Google Scholar 

  • Bahtat, M., Mugnier, J., Liren, L., Serughetti, J.: Planar \(\text{ TiO }_{2}\) waveguides by the sol–gel process: the relationship of structure to properties. Proc. SPIE 1758, 173–176 (1992)

    Article  ADS  Google Scholar 

  • Bedu, M., Sagarzazu, G., Gacoin, T., Audebert, P., Weisbuch, C., Martinelli, L.: Sol–gel planar waveguides for improved fluorescence microarrays. Thin Solid Films 518, 4450–4457 (2010)

    Article  ADS  Google Scholar 

  • Bernard, C., Chaussedent, S., Monteil, A., Ferrari, M.: Molecular dynamics simulation of an Er-activated silica-titania glass: composition influence on the structural properties. Philos. Mag. B 82, 681–693 (2002)

    ADS  Google Scholar 

  • Boudrioua, A., Loulergue, J.C.: New approach for loss measurements in optical planar waveguides. Opt. Commun. 137, 37–40 (1997)

    Article  ADS  Google Scholar 

  • Bradley, J.D.B., Evans, C.C., Parsy, F., Phillips, K.C., Senaratne, R., Marti, E., Mazur, E.: Low-loss TiO2 planar waveguides for nanophotonic applications. In: 23rd Annual Meeting of the IEEE Photonics Society, pp. 313–314, Denver, CO. [ISBN 978-1-4244-5368-9] (2010)

  • Brudnik, A., Cztemastek, H., Zakrzewska, K., Jachimowski, M.: Plasma-emission-controlled d.c. magnetron sputtering of \(\text{ TiO }_{2-x}\) thin films. Thin Solid Films 199, 45–58 (1991)

    Article  ADS  Google Scholar 

  • Conde-Gallardo, A., García-Rocha, M., Palomino-Merino, R., Velásquez-Quesada, M.P., Hernández-Calderón, I.: Photoluminescence properties of \(\text{ Tb }^{+3 }\) and \(\text{ Eu }^{+3}\) ions hosted in \(\text{ TiO }_{2}\) matrix. Appl. Surf. Sci. 212–213, 583–588 (2003)

    Article  Google Scholar 

  • Cuisin, C., Chelnokov, A., Lourtioz, J.-M., Decanini, D., Chen, Y.: Fabrication of three-dimensional photonic structures with submicrometer resolution by X-ray lithography. J. Vac. Sci. Technol. B 18, 3505–3509 (2000)

    Article  Google Scholar 

  • Ehrhart, G., Capoen, B., Robbe, O., Boy, P., Turrell, S., Bouazaoui, M.: Structural and optical properties of n-propoxide sol–gel derived \(\text{ ZrO }_{2}\) thin films. Thin Solid Films 496, 227–233 (2006)

    Article  ADS  Google Scholar 

  • Garzella, C., Comini, E., Tempesti, E., Frigeri, C., Sberveglieri, G.: \(\text{ TiO }_{2}\) thin films by a novel sol–gel processing for gas sensor applications. Sens. Actuators B: Chem. 68, 189–196 (2000)

    Article  Google Scholar 

  • Hench, L.L., West, J.K.: The sol–gel process. Chem. Rev. 90, 33–72 (1990)

    Article  Google Scholar 

  • Ho, K.M., Chan, C.T., Soukoulis, C.M.: Existence of a photonic gap in periodic dielectric structures. Phys. Rev. Lett. 65, 3152–3155 (1990)

    Article  ADS  Google Scholar 

  • Johnson, S.G., Joannopoulos, J.D.: Block-iterative frequency-domain methods for Maxwell’s equations in a planewave basis. Opt. Exp. 8, 173–190 (2001)

    Article  ADS  Google Scholar 

  • Keddie, J.L., Braun, P.V., Giannelis, E.P.: Interrelation between densification, crystallization, and chemical evolution in sol–gel titania thin films. J. Am. Ceram. Soc. 77, 1592–1596 (1994)

    Article  Google Scholar 

  • Kersten, RTh: Numerical solution of the mode-equation of planar dielectric waveguides to determine their refractive index and thickness by means of a prism-film coupler. Opt. Commun. 9, 427–431 (1973)

    Article  ADS  Google Scholar 

  • Kuznetsova, I.N.: Elaboration par procédé sol–gel de couches minces de \(\text{ TiO }_{2}\) nanostructuré: caractérisations structurale et optique. Ph.D. Thesis, Université Paris 13, France (2007)

  • Mechiakh, R., Ben Sedrine, N., Ben Naceur, J., Chtourou, R.: Elaboration and characterization of nanocrystalline \(\text{ TiO }_{2}\) thin films prepared by sol–gel dip-coating. Surf. Coat. Technol. 206, 243–249 (2011)

    Article  Google Scholar 

  • Montagna, M., Moser, E., Visintain, F., Ferrari, M., Zampedri, L., Martucci, A., Guglielmi, M., Ivanda, M.: Nucleation of titania nanocrystals in silica titania waveguides. J. Sol–Gel Sci. Technol. 26, 241–244 (2003)

    Article  Google Scholar 

  • Nishide, T., Sato, M., Hara, H.: Crystal structure and optical property of \(\text{ TiO }_{2}\) gels and films prepared from Ti-edta complexes as titania precursors. J. Mater. Sci. 35, 465–469 (2000)

    Article  ADS  Google Scholar 

  • Oh, S.H., Kim, D.J., Hahn, S.H., Kim, E.J.: Comparison of optical and photocatalytic properties of \(\text{ TiO }_{2}\) thin films prepared by electron-beam evaporation and sol–gel dip-coating. Mater. Lett. 57, 4151–4155 (2003)

    Article  Google Scholar 

  • Pandiyan, R., Micheli, V., Ristic, D., Bartali, R., Pepponi, G., Barozzi, M., Gottardi, G., Ferrari, M., Laidani, N.: Structural and near-infra red luminescence properties of Nd-doped \(\text{ TiO }_{2}\) films deposited by RF sputtering. J. Mater. Chem. 22, 22424–22432 (2012)

    Article  Google Scholar 

  • San Vicente, G., Morales, A., Gutierrez, M.T.: Preparation and characterization of sol–gel \(\text{ TiO }_{2}\) antireflective coatings for silicon. Thin Solid Films 391, 133–137 (2001)

    Article  ADS  Google Scholar 

  • Shen, J., Yang, T., Zhang, Q., Wang, J.: Nanoporous \(\text{ TiO }_{2}\) coatings for infrared detectors. J. Sol–Gel Sci. Technol. 26, 1029–1032 (2003)

    Article  Google Scholar 

  • Shimada, S., Miyazawa, K., Kuwabara, M.: An easy method for fabricating \(\text{ TiO }_{2 }\)gel photonic crystals using molds and highly concentrated alkoxide solutions. Jpn. J. Appl. Phys. 41, L291–L293 (2002)

    Article  ADS  Google Scholar 

  • Strohkendl, F.P., Fluck, D., Günter, P., Irmsher, R., Buchal, Ch.: Nonleaky optical waveguides in \(\text{ KNbO }_{3}\) by ultralow dose MeV He ion implantation. Appl. Phys. Lett. 59, 3354–3356 (1991)

    Article  ADS  Google Scholar 

  • Thoma, F., Langbein, U., Mittler-Neher, S.: Waveguide scattering microscopy. Opt. Commun. 134, 16–20 (1997)

    Article  ADS  Google Scholar 

  • Tien, P.K., Ulrich, R.: Theory of prism-film coupler and thin-film light guides. J. Opt. Soc. Am. 60, 1325–1337 (1970)

    Article  ADS  Google Scholar 

  • Uhlman, D.R., Teowee, G.: Sol–gel science technology: current state and future prospects. J. Sol–Gel Sci. Technol. 13, 153–162 (1998)

    Article  Google Scholar 

  • Ulrich, R.: Theory of the prism-film coupler by plane-wave analysis. J. Opt. Soc. Am. 60, 1337–1350 (1970)

    Article  ADS  Google Scholar 

  • Ulrich, R., Torge, R.: Measurement of thin-film papameters with prism coupler. Appl. Opt. 12, 2901–2908 (1973)

    Article  ADS  Google Scholar 

  • Urlacher, C., Dumas, J., Serughetti, J., Mugnier, J., Munoz, M.: Planar \(\text{ ZrO }_{2}\) waveguides prepared by the sol–gel process: structural and optical properties. J. Sol–Gel Sci. Technol. 8, 999–1005 (1999)

    Google Scholar 

  • Wang, B., Hu, L.: Optical and surface properties of hybrid \(\text{ TiO }_{2}\)/ormosil planar waveguide prepared by the sol–gel process. Ceram. Int. 32, 7–12 (2006)

    Article  Google Scholar 

  • Wang, Z., Helmerson, U., Kall, P.O.: Optical properties of anatase \(\text{ TiO }_{2}\) thin films prepared by aqueous sol–gel process at low temperature. Thin Solid Films 405, 50–54 (2002)

    Article  ADS  Google Scholar 

  • Weber, H.P., Dunn, F.A., Leibolt, W.N.: Loss measurements in thin-film optical waveguides. Appl. Opt. 12, 755–757 (1973)

    Article  ADS  Google Scholar 

  • Wijnhoven, J.E.G.J., Vos, W.L.: Preparation of photonic crystals made of air spheres in titania. Science 281, 802–804 (1998)

    Article  ADS  Google Scholar 

  • Wongcahree, K., Brungs, M., Chapline, R., Hong, Y., Pilar, R., Sizgek, E.: Sol–gel processing by aging and pore creator addition for porous silica antireflective coatings. J. Sol–Gel Sci. Technol. 25, 215–221 (2002)

    Article  Google Scholar 

  • Yablonovitch, E., Gmitter, T.J., Leung, K.M.: Photonic band structure: the face-centered-cubic case employing nonspherical atoms. Phys. Rev. Lett. 67, 2295–2298 (1991)

    Article  ADS  Google Scholar 

  • Yamasaki, S., Hata, N., Yoshida, T., Oheda, H., Matsuda, A., Okushi, H., Tanaka, K.: Annealing studies on low optical absorption of GD a-Si:H using photo-acoustic spectroscopy. J. Phys. Colloq. 42, C4–297–C4-300 (1981)

    Article  Google Scholar 

  • Yanagida, S., Senadeera, G.K.R., Nakamura, K., Kitamura, T., Wada, Y.: Deposition of polyaniline via molecular self-assembly on \(\text{ TiO }_{2}\) and its uses as a sensitizer in solid-state solar cells. J. Photochem. Photobiol. A 164, 61–66 (2004)

    Article  Google Scholar 

  • Yang, L., Scott Saavedra, S., Armstrong, N.R., Hayes, J.: Fabrication and characterization of low loss, sol–gel planar waveguides. Anal. Chem. 66, 1254–1263 (1994)

    Article  Google Scholar 

  • Yee, K.S.: Numerical solution of initial boundary value problems involving Maxwell’s equations in isotropic media. IEEE Trans. Antennas Propag. 14, 302–307 (1966)

    Article  ADS  MATH  Google Scholar 

  • Znaidi, L., Bocquet, J.F., Pommier, C.: Elaboration of \(\text{ TiO }_{2}\) nanometric powders and thin films aerogels. In: AIDIC, Selected Papers, Conference Series of ICheaP-4, vol. 4, pp. 109–112 (1999)

  • Znaidi, L., Seraphimova, R., Bocquet, J.F., Colbeau-Justin, C., Pommier, C.: A semi-continuous process for the synthesis of nanosize \(\text{ TiO }_{2}\) powders and their use as photocatalysts. Mat. Res. Bull. 36, 811–825 (2001)

    Article  Google Scholar 

  • Znaidi, L., Touam, T., Vrel, D., Kunetsova, I.N., Fischer, A., Boudrioua, A.: Waveguiding properties of nano-structured \(\text{ TiO }_{2}\) thin films synthesized by sol–gel process. AIP Conf. Proc. 1400, 268–273 (2011)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to T. Touam.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Touam, T., Znaidi, L., Vrel, D. et al. Low optical loss nano-structured \(\mathrm{TiO }_{2}\) planar waveguides by sol–gel route for photonic crystal applications. Opt Quant Electron 46, 23–37 (2014). https://doi.org/10.1007/s11082-013-9692-2

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11082-013-9692-2

Keywords

Navigation