An algorithm for estimating the temperature of local heating with an electron-probe low-voltage nanoanalysis is proposed. The approximation of the electron energy loss function in a solid is used. Expressions were obtained for calculating the temperature distribution in a sample irradiated by a focused electron beam.
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Translated from Izmeritel’naya Tekhnika, No. 6, pp. 13–15, June, 2017.
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Amrastanov, A.N., Kuzin, A.Y., Mityukhlyaev, V.B. et al. Thermal Action of an Electronic Probe with X-ray Spectral Nanoanalysis. Meas Tech 60, 534–537 (2017). https://doi.org/10.1007/s11018-017-1230-3
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DOI: https://doi.org/10.1007/s11018-017-1230-3