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Synthesis and structure features of composite silicate and hybrid TEOS-derived thin films doped by inorganic and organic additives

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Abstract

The results of long-term researches of thin films prepared from tetraethoxysilane-derived sols containing inorganic and organic additives are systematized and analyzed. These additives give to films certain physicochemical properties for their application in electronic techniques, optics, power engineering, in biological technologies etc. The influence both inorganic (salts, acids) and organic (polyols, polyionenes, epoxy resin) additives on rheological properties and aggregate stability of sols as well as films surface morphology is minutely considered. The explanations of phenomena during film formation, including spin-coating process, are given. Essential influence of temperature and humidity on films surface morphology is shown. Influence of heat treatment modes on structure and composition of films is analyzed. Recommendations about optimization of thin films sol–gel processing are offered.

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Notes

  1. Lutetium diphthalocyanine has been synthesized and characterized at the National Research Centre “Kurchatov Institute” B.P. Konstantinov Petersburg Nuclear Physics Institute.

  2. The DND has been synthesized and characterized in the Special Engineering Department “Tekhnolog” in the Saint-Petersburg State Technological Institute (Technical University).

  3. \( \tau_{s} \)—the effective shear stress or statistic critical shear stress at the minimum strain rate \( \varepsilon^{'} \)=0.3 s−1.

  4. \( \eta_{0} \)—maximum viscosity (at the strain rate \( \varepsilon^{'} \)=0.3 s−1 minimum possible for the viscometer).

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  1. Grebenschikov Institute of Silicate Chemistry of Russian Academy of Sciences, St. Petersburg, Russia

    O. A. Shilova

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Shilova, O.A. Synthesis and structure features of composite silicate and hybrid TEOS-derived thin films doped by inorganic and organic additives. J Sol-Gel Sci Technol 68, 387–410 (2013). https://doi.org/10.1007/s10971-013-3026-5

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