Skip to main content
SpringerLink
Log in

Laser-Assisted Formation of High-Quality Polycrystalline Diamond Membranes

  • Published:
Journal of Russian Laser Research Aims and scope

Abstract

A polycrystalline diamond film is grown on a 2 inch Si substrate using a microwave-plasma chemicalvapor-deposition technique. The high quality of the diamond films is confirmed by Raman spectra. A multiple-step procedure is used for local etching of the substrate to form the pattern of an array of 50 diamond membranes with the diameter in a range from 150 to 300 μm. The morphology of the membranes is examined using scanning electron microscopy. The membranes obtained can be used as the base material for the fabrication of pressure sensors, X-ray detectors and scintillators, and in quantum optics as optical resonators for single-color centers in diamond.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. L. S. Pan and D. R. Kania, Diamond: Electronic Properties and Applications, Springer Science & Business Media (2013).

  2. H. Windischmann and G. F. Epps, J. Appl. Phys., 68, 5665 (1990).

    Article  ADS  Google Scholar 

  3. V. S. Sedov, S. V. Kuznetsov, V. G. Ralchenko, et al., Diam. Relat. Mater., 72, 47 (2017).

    Article  ADS  Google Scholar 

  4. V. Sedov, S. Kouznetsov, A. Martyanov, et al., ACS Appl. Nano Mater., 3, 1324 (2020).

    Article  Google Scholar 

  5. C. F. Wang, R. Hanson, D. D. Awschalom, et al., Appl. Phys. Lett., 91, 201112 (2007).

    Article  ADS  Google Scholar 

  6. A. Schmidt, J. Bernardoff, K. Singer, et al., Physica Status Solidi A, 216, 1900233 (2019).

    Article  ADS  Google Scholar 

  7. V. G. Ralchenko, E. Pleuler, F. X. Lu, et al., Diam. Relat. Mater., 23, 172 (2012).

    Article  ADS  Google Scholar 

  8. S. Drijkoningen, S. D. Janssens, P. Pobedinskas, et al., Sci. Rep., 6, 1 (2016).

    Article  Google Scholar 

  9. S. D. Janssens, D. Vazquez-Cortes, A. Giussani, et al., Diam. Relat. Mater., 98, 107511 (2019).

    Article  ADS  Google Scholar 

  10. M. E. Belousov, E. A. Il’ichev, A. E. Kuleshov, et al., Tech. Phys. Lett., 38, 225 (2012).

    Article  ADS  Google Scholar 

  11. M. A. Green and M. J. Keevers, Prog. Photovolt. Res. Appl., 3, 189 (1995).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Prokhorov General Physics Institute, Russian Academy of Sciences, Vavilova Str. 38, Moscow, 119991, Russia

    V. S. Sedov, M. S. Komlenok, A. K. Martyanov, A. F. Popovich, A. S. Altakhov & V. G. Ralchenko

  2. JSC RPC “Istok” named after Shokin Fryazino, Moscow Region, 141190, Russia

    A. A. Voronin, A. S. Kurochka & D. V. Markus

  3. MIREA Russian Technological University, Prospect Vernadskogo 78, Moscow, 119454, Russia

    S. S. Savin

Authors
  1. V. S. Sedov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. A. Voronin
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. S. Komlenok
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. S. S. Savin
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. A. K. Martyanov
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. A. F. Popovich
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. A. S. Altakhov
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. A. S. Kurochka
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. D. V. Markus
    View author publications

    You can also search for this author in PubMed Google Scholar

  10. V. G. Ralchenko
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to V. S. Sedov.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Sedov, V.S., Voronin, A.A., Komlenok, M.S. et al. Laser-Assisted Formation of High-Quality Polycrystalline Diamond Membranes. J Russ Laser Res 41, 321–326 (2020). https://doi.org/10.1007/s10946-020-09881-x

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10946-020-09881-x

Keywords

Search

Navigation