Abstract
We present a strip transition-edge sensor microcalorimeter linear array detector developed for energy dispersive X-ray diffraction imaging and Compton scattering applications. The prototype detector is an array of 20 transition-edge sensors with absorbers in strip geometry arranged in a linear array. We discuss the fabrication steps needed to develop this array including Mo/Cu bilayer, Au electroplating, and proof-of-principle fabrication of long strips of \(\hbox {SiN}_{x}\) membranes. We demonstrate minimal unwanted effect of strip geometry on X-ray pulse response and show linear relationship of 1/pulse height and pulse decay times with absorber length. For the absorber lengths studied, our preliminary measurements show energy resolutions of 40–180 eV near 17 keV. Furthermore, we show that the heat flow to the cold bath is nearly independent of the absorber area and depends on the \(\hbox {SiN}_{x}\) membrane geometry.
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Acknowledgements
This work was supported by the Accelerator and Detector R&D program in Basic Energy Sciences’ Scientific User Facilities Division at the Department of Energy and the Laboratory Directed Research and Development program at Argonne. This research used resources of the Advanced Photon Source and Center for Nanoscale Materials (CNM), US Department of Energy Office of Science User Facilities operated for the DOE Office of Science by the Argonne National Laboratory under Contract No. DE AC02 06CH11357. The authors gratefully acknowledge assistance from CNM staff, especially Dr. D. Czaplewski, and C.S. Miller. This work made use of the Pritzker Nanofabrication Facility (PNF) of the Institute for Molecular Engineering at the University of Chicago, which receives support from Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF ECCS-1542205), a node of the National Science Foundation’s National Nanotechnology Coordinated Infrastructure. The authors gratefully acknowledge assistance from PNF staff, especially P. Duda and A. Mukhortova. We thank Dr. O. Makarova from Creatv MicroTech, Inc. for discussions on Au electroplating. We also thank Dr. D. Schmidt from the Quantum Sensors Group at NIST for discussions on TES fabrication.
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Patel, U., Divan, R., Gades, L. et al. Development of Transition-Edge Sensor X-ray Microcalorimeter Linear Array for Compton Scattering and Energy Dispersive Diffraction Imaging. J Low Temp Phys 199, 384–392 (2020). https://doi.org/10.1007/s10909-019-02267-7
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DOI: https://doi.org/10.1007/s10909-019-02267-7