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Effects of TiO2 on microstructures and properties of Li2O–Al2O3–SiO2 glass–ceramics for LTCC substrates

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Abstract

In order to increase the flexural strength and to adjust the coefficient of thermal expansion (CTE), TiO2 was introduced into Li2O–Al2O3–SiO2 (LAS) glass–ceramics to satisfy LTCC applications. The effects of TiO2 addition on the microstructure, thermal, mechanical and electrical properties were studied. The results showed that the crystal phases were composed of Li2OAl2O37.5SiO2 (major), as well as TiO2 and CaMgSi2O6 (minor). The crystal phase TiO2 having higher CTE value could appropriately increase the CTE value of LAS to fit the silicon and remarkably improve the flexural strength of LAS glass–ceramic with low CTE. The dielectric and insulating properties also strongly depended on the amount of TiO2. LAS glass–ceramic sintered at 800 °C with high performances was achieved in the case of 1 wt% TiO2: α = 2.56 × 10−6/°C, σ = 151 MPa, ε = 6.8, tanδ = 1.731 × 10−3, ρ = 8.29 × 1010 Ω cm.

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Authors and Affiliations

  1. School of Microelectronics and Solid-State Electronics, University of Electronic Science and Technology of China, Chengdu, 610054, China

    Bo Li, Dinan Duan & Quanyin Long

  2. State Key Laboratory of Electronic Thin Films and Integrated Devices, Chengdu, 610054, China

    Bo Li

  3. National Engineering Research Center of Electromagnetic Radiation Control Materials, Chengdu, 610054, China

    Bo Li

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  1. Bo Li
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  2. Dinan Duan
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  3. Quanyin Long
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Correspondence to Bo Li.

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Li, B., Duan, D. & Long, Q. Effects of TiO2 on microstructures and properties of Li2O–Al2O3–SiO2 glass–ceramics for LTCC substrates. J Mater Sci: Mater Electron 27, 7240–7245 (2016). https://doi.org/10.1007/s10854-016-4690-3

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  • DOI: https://doi.org/10.1007/s10854-016-4690-3

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