Skip to main content
SpringerLink
Log in

Electrospray droplet sources for thin film deposition

  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

Electrospraying utilises electrical forces for liquid atomisation. Droplets obtained by this method are highly charged to a fraction of the Rayleigh limit. The advantage of electrospraying is that the droplets can be extremely small, down to the order of 10’s nanometres, and the charge and size of the droplets can be controlled to some extent be electrical means. Motion of the charged droplets can be controlled by electric field. The deposition efficiency of the charged spray on an object is usually higher than that for uncharged droplets. Electrospray is, or potentially can be applied to many processes in industry and in scientific instruments manufacturing. The paper reviews electrospray methods and devices, including liquid metal ion sources, used for thin film deposition. This technique is applied in modern material technologies, microelectronics, micromachining, and nanotechnology.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8

Similar content being viewed by others

References

  1. Rayleigh FRS (1882) Phil Mag 14(5):184

    Google Scholar 

  2. Lapple CE (1970) In: Drew TB, Cokelet GR, Hoopes JW Jr, Vermeulen T (eds), Advances in chemical engineering, vol 8. Academic Press, New York, London

  3. Jaworek A, Adamiak K, Krupa A, Castle P (2001) J Electrostatics 51–52:603

    Article  Google Scholar 

  4. Bailey AG, Bracher JG, von Rohden HJ (1972) J Spacecraft 9(7):518

    Article  Google Scholar 

  5. Snarski SR, Dunn PF (1991) Exp Fluids 11(4):268

    Article  CAS  Google Scholar 

  6. Rulison AJ, Flagan RC (1993) Rev Sci Instrum 64(3):683

    Article  CAS  Google Scholar 

  7. Franks A, Luty M, Robbie CJ, Stedman M (1998) Nanotechnoly 9(2):61

    Article  Google Scholar 

  8. Almekinders JC, Jones C (1999) J Aerosol Sci 30(7):969

    Article  CAS  Google Scholar 

  9. Regele JD, Papac MJ, Rickard MJA, Dunn-Rankin D (2002) J Aerosol Sci 32(11):1471

    Article  Google Scholar 

  10. Krupa A, Jaworek A, Czech T, Lackowski M, Luckner J (2003) Inst Phys Conf Ser 178:283

    Google Scholar 

  11. Jaworek A, Balachandran W, Lackowski M, Kulon J, Krupa A (2006) J Electrostatics 64(3–4): 194

    Article  Google Scholar 

  12. Sato M (1991) IEEE Trans Ind Appl 27(2):316

    Article  CAS  Google Scholar 

  13. Balachandran W, Krupa A, Machowski W, Jaworek A (2001a) J Electrostatics 51–52:193

    Article  Google Scholar 

  14. Balachandran W, Jaworek A, Krupa A, Kulon J, Lackowski M (2003) J Electrostatics 58(3–4):209

    Article  CAS  Google Scholar 

  15. Law SE, Cooper SC (1988) Trans ASAE 31(4):984

    Google Scholar 

  16. Law SE, Cooper SC, Law WB (1999) Inst Phys Conf Ser No 163:243

    Google Scholar 

  17. Law SE (2001) J Electrostatics 51–52:25

    Google Scholar 

  18. Hayati I, Bailey AI, Tadros ThF (1987) J Coll Interface Sci 117(1):205

    Article  CAS  Google Scholar 

  19. Cloupeau M, Prunet-Foch B (1990) J Electrostatics 25:165

    Article  CAS  Google Scholar 

  20. Cloupeau M, Prunet-Foch B (1994) J Aerosol Sci 25(6):1121

    Article  Google Scholar 

  21. Grace JM, Marijnissen JCM (1994) J Aerosol Sci 25(6):1005

    Article  CAS  Google Scholar 

  22. Jaworek A, Krupa A (1996a) J Aerosol Sci 27(1):75

    Article  CAS  Google Scholar 

  23. Jaworek A, Krupa A (1996b) J Aerosol Sci 27(7):979

    Article  CAS  Google Scholar 

  24. Jaworek A, Krupa A (1999a) Exp Fluids 27(1):43

    Article  Google Scholar 

  25. Jaworek A, Krupa A (1999b) J Aerosol Sci 30(7):873

    Article  CAS  Google Scholar 

  26. Altenburg H, Plewa J, Plesch G, Shpotyuk O (2002) Pure Appl Chem 74(11):2083

    CAS  Google Scholar 

  27. Choy KL (2003) Progress Mater Sci 48:57

    Article  CAS  Google Scholar 

  28. Zomeren van AA, Kelder EM, Marijnissen JCM, Schoonman J (1994) J Aerosol Sci 25(6):1229

    Article  Google Scholar 

  29. Chen CH, Buysman AAJ, Kelder EM, Schoonman J (1995) Solid State Ionics 80:1

    Article  CAS  Google Scholar 

  30. Chen CH, Kelder EM, Jak MJG, Schoonman J (1996b) Solid State Ionics 86:1301

    Article  Google Scholar 

  31. Chen CH, Emond MHJ, Kelder EM, Meester B, Schoonman J (1999a) J Aerosol Sci 30(7):959

    Article  CAS  Google Scholar 

  32. Lapham DP, Colbeck I, Schoonman J, Kamlag Y (2001) Thin Solid Films 391:17

    Article  CAS  Google Scholar 

  33. Taniguchi I, van Landschoot RC, Schoonman J (2003a) Solid State Ionics 156:1

    Article  CAS  Google Scholar 

  34. Taniguchi I, van Landschoot RC, Schoonman J (2003b) Solid State Ionics 160:271

    Article  CAS  Google Scholar 

  35. Perednis D, Wilhelm O, Pratsinis SE, Gauckler LJ (2005) Thin Solid Films 474:84

    Article  CAS  Google Scholar 

  36. Park H, Kim K, Kim S (2004) J Aerosol Sci 35(11):1295

    Article  CAS  Google Scholar 

  37. Kim SG, Choi KH, Eun JH, Kim HJ, Hwang ChS (2000a) This Solid Films 377:694

    Article  Google Scholar 

  38. Kim SG, Kim JY, Kim HJ (2000b) This Solid Films 378:110

    Article  Google Scholar 

  39. Sorensen G (1999) Surf Coat Techn 112(1–3):221

    Article  CAS  Google Scholar 

  40. Li JL (2005) J Aerosol Sci 36:373

    Article  CAS  Google Scholar 

  41. Kessick R, Fenn J, Tepper G (2004) Polymer 45:2981

    Article  CAS  Google Scholar 

  42. Choy KL, Su B (1999) J Mater Sci Lett 18:943

    Article  CAS  Google Scholar 

  43. Carswell DJ, Milsted J (1957) J Nucl Energy 4:51

    CAS  Google Scholar 

  44. Gorodinsky WA, Romanov JuF, Sorokina AW, Yakunin MI (1959) Prib Techn Exper 5:128

    Google Scholar 

  45. Bruninx E, Rudstam G (1961) Nucl Instrum Methods 13:131

    Article  CAS  Google Scholar 

  46. Lauer KF, Verdingh V (1963) Nucl Instrum Methods 21:161

    Article  CAS  Google Scholar 

  47. Michelson D (1968) J Fluid Mech 33(3):573

    Article  Google Scholar 

  48. Shorey JD, Michelson D (1970) Nucl Instrum Meth 82:295

    Article  CAS  Google Scholar 

  49. Teer D, Dole M (1975) J Polymer Sci 13(5):985

    CAS  Google Scholar 

  50. Mahoney JF, Perel J (1981) IEEE Ind. Appl. Soc. Conf. Rec., 1142–1145

  51. Pang TM, Prewett PD, Gowland L (1982) This Solid Films 88:219

    Article  CAS  Google Scholar 

  52. Hall A, Hemming M (1992) Circuit World 18(2):32

    Google Scholar 

  53. Thundat T, Warmack RJ, Allison DP, Ferrell TL (1992) Ultramicroscopy 42–44(Pt. B):1083

    Article  Google Scholar 

  54. Ryu ChK, Kim K (1995) Appl Phys Lett 67(22):3337

    Article  CAS  Google Scholar 

  55. Chen CH, Kelder EM, Schoonman J (1996c) J Mater Sci 31(20):5437

    Article  CAS  Google Scholar 

  56. Chen CH, Kelder EM, Schoonman J (1997a) J Mater Sci Lett 16:1967

    Article  CAS  Google Scholar 

  57. Chen CH, Nord-Varhaug K, Schoonman J (1996e) J Mater Synth Process 4(3):189

    CAS  Google Scholar 

  58. Denisyuk IYu (1996) J Opt Technol 63(4):296

    Google Scholar 

  59. Hoyer B, Sorensen G, Jensen N, Nielsen DB, Larsen B (1996) Anal Chem 68(21):3840

    Article  CAS  Google Scholar 

  60. Stelzer NHJ, Schoonman J (1996) J Mater Synth Proc 4(6):429

    CAS  Google Scholar 

  61. Chen CH, Kelder EM, Schoonman J (1997b) J Power Sources 68:377

    Article  CAS  Google Scholar 

  62. Sobota J, Sorensen G (1997) Tribology Lett 3:161

    Article  CAS  Google Scholar 

  63. Teng WD, Huneiti ZA, Machowski W, Evans JRG, Edirisinghe MJ, Balachandran W (1997) J Mater Sci Lett 16:1017

    Article  CAS  Google Scholar 

  64. Chen CH, Yuan FL, Schoonman J (1998b) Eur J Solid State Inorg Chem 35:198

    Article  Google Scholar 

  65. Choy K, Bai W, Charojrochkul S, Steele BCH (1998) J Power Sources 71:361

    Article  CAS  Google Scholar 

  66. Cich M, Kim K, Choi H, Hwang ST (1998) Appl Phys Lett 73(15):2116

    Article  CAS  Google Scholar 

  67. Gourari H, Lumbreras M, Van Landschoot R, Schoonman J (1998) Sensors Actuators B 47:189

    Article  Google Scholar 

  68. Gourari H, Lumbreras M, Van Landschoot R, Schoonman J (1999) Sensors Actuators B 58:365

    Article  Google Scholar 

  69. Heine JR, Rodriguez-Viejo J, Bawendi MG, Jensen KF (1998) J Crystal Growth 195(1–4):564

    Article  CAS  Google Scholar 

  70. Nishizawa M, Uchiyama T, Dokko K, Yamada K, Matsue T, Uchida I (1998) Bull Chem Soc Japan 71(8):2011

    Article  CAS  Google Scholar 

  71. Chen CH, Kelder EM, Schoonman J (1999b) Thin Solid Films 342:35

    Article  CAS  Google Scholar 

  72. Miao P, Huneiti ZA, Machowski W, Balachandran W, Xiao P, Evans JRG (1999) Inst Phys Conf Ser No 163:119

    CAS  Google Scholar 

  73. Miao P, Balachandran W, Xiao P (2002) IEEE Trans Ind Appl 38(1):50

    Article  CAS  Google Scholar 

  74. Miao P, Balachandran W, Wang JL (2001a) J Electrostatics 51–52:43

    Article  Google Scholar 

  75. Miao P, Balachandran W, Xiao P (2001b) J Mater Sci 36:2925

    Article  CAS  Google Scholar 

  76. Balachandran W, Miao P, Xiao P (2001b) J Electrostatics 50(4):249

    Article  CAS  Google Scholar 

  77. Moerman R, Frank J, Marijnissen JCM, van Dedem GH (1999) J Aerosol Sci 30(Suppl. 1):551

    Article  Google Scholar 

  78. Su B, Choy KL (1999a) J Mater Sci Lett 18:1705

    Article  CAS  Google Scholar 

  79. Turetsky AYe (1999) J Aerosol Sci 30(Suppl. 1):689

    Article  Google Scholar 

  80. Yamada K, Sato N, Fujino T, Lee ChG, Uchida I, Selman JR (1999) J Solid State Electrochem 3:148

    Article  CAS  Google Scholar 

  81. Reifarth R, Schwarz K, Käppeler F (2000) Astrophys J 528(1):573

    Article  CAS  Google Scholar 

  82. Su B, Choy KL (2000a) Thin Solid Films 359:160

    Article  CAS  Google Scholar 

  83. Su B, Choy KL (2000b) J Mater Sci Lett 19:1859

    Article  CAS  Google Scholar 

  84. Choy KL, Su B (2001) Thin Solid Films 388:9

    Article  CAS  Google Scholar 

  85. Su B, Wei M, Choy KL (2001) Mater Lett 43:83

    Article  Google Scholar 

  86. Zaouk D, Zaatar Y, Khoury A, Llinares C, Charles JP, Bechara J (2000a) Microelectr Eng 51–52:627

    Article  Google Scholar 

  87. Zaouk D, Zaatar Y, Khoury A, Llinares C, Charles JP, Bechara J (2000b) J Appl Phys 87:7539

    Article  CAS  Google Scholar 

  88. Chandrasekhar R, Choy KL (2001a) Thin Solid Films 398–399:59

    Article  Google Scholar 

  89. Raj ES, Choy KL (2003) Mater Chem Phys 82:489

    Article  CAS  Google Scholar 

  90. Chandrasekhar R, Choy KL (2001b) J Crystal Growth 231:215

    Article  CAS  Google Scholar 

  91. Choy KL (2001) Mater Sci Eng C 16:139

    Article  Google Scholar 

  92. Wei M, Choy KL (2002) Chem Vapor Depos 8(1):15

    Article  CAS  Google Scholar 

  93. Diagne EHA, Lumbreras M (2001) Sensors Actuators B 78:98

    Article  Google Scholar 

  94. Moerman R, Frank J, Marijnissen JCM, Schalkhammer TGM, van Dedem GWK (2001) Anal Chem 73(10):2183

    Article  CAS  Google Scholar 

  95. Moerman R, Knoll J, Apetrei C, van den Doel LR, van Dedem GWK (2005) Anal Chem 77:225

    Article  CAS  Google Scholar 

  96. Mohamedi M, Lee SJ, Takahashi D, Nishizawa M, Itoh T, Uchida I (2001a) Electrochimica Acta 46:1161

    Article  CAS  Google Scholar 

  97. Mohamedi M, Takahashi D, Uchiyama T, Itoh T, Nishizawa M, Uchida I (2001b) J Power Sources 93:93

    Article  CAS  Google Scholar 

  98. Mohamedi M, Takahashi D, Itoh T, Uchida I (2002a) Electrochimica Acta 47:3483

    Article  CAS  Google Scholar 

  99. Mohamedi M, Takahashi D, Itoh T, Umeda M, Uchida I (2002b) J Electrochem Soc 149(1):A19

    Article  CAS  Google Scholar 

  100. Nguyen T, Djurado E (2001) Solid State Ionics 138:191

    Article  CAS  Google Scholar 

  101. Rhee SH, Yang Y, Choi HS, Myoung JM, Kim K (2001) Thin Solid Films 396(1–2):23

    Article  CAS  Google Scholar 

  102. Yoon WS, Ban SH, Lee KK, Kim KB, Kim MG, Lee JM (2001) J Power Sources 97–98:282

    Article  Google Scholar 

  103. Cao F, Prakash J (2002) Electrochimica Acta 47:1607

    Article  CAS  Google Scholar 

  104. Jayasinghe SN, Edirisinghe MJ, DeWilde T (2002) Mat Res Innovat 6(3):92

    Article  CAS  Google Scholar 

  105. Jayasinghe SN, Edirisinghe MJ, Kippax PG (2004a) Appl Phys A 78:343

    Article  CAS  Google Scholar 

  106. Jayasinghe SN, Edirisinghe MJ (2002) J Porous Mater 9:265

    Article  CAS  Google Scholar 

  107. Jayasinghe SN, Edirisinghe MJ (2003) Mat Res Innovat 7:62

    CAS  Google Scholar 

  108. Jayasinghe SN, Edirisinghe MJ (2004) J Europ Ceramic Soc 24:2203

    Article  CAS  Google Scholar 

  109. Kobayashi Y, Miyashiro H, Takeuchi T, Shigemura H, Balakrishnan N, Tabuchi M, Kageyama H, Iwahori T (2002) Solid State Ionics 152–153:137

    Article  Google Scholar 

  110. Dokko K, Anzue N, Makino Y, Mohamedi M, Itoh T, Umeda M, Uchida I (2003) Electrochem 71(12):1061

    CAS  Google Scholar 

  111. Dokko K, Anzue N, Mohamedi M, Itoh T, Uchida I (2004) Electrochem Comm 6:384

    Article  CAS  Google Scholar 

  112. Huang H, Yao X, Wu X, Wang M, Zhang L (2003) Microelectr Eng 66:688

    Article  CAS  Google Scholar 

  113. Kim YT, Gopukumar S, Kim KB, Cho BW (2003) J Power Sources 117:110

    Article  CAS  Google Scholar 

  114. Lu J, Chu J, Huang W, Ping Z (2003) Sensors Actuators A 108:2

    Article  CAS  Google Scholar 

  115. Shu D, Chung KY, Cho WI, Kim KB (2003a) J Power Sources 114:253

    Article  CAS  Google Scholar 

  116. Shu D, Kumar G, Kim KB, Ryu KS, Chan SH (2003b) Solid State Ionics 160:227

    Article  CAS  Google Scholar 

  117. Chung KY, Shu D, Kim KB (2004) Electrochim Acta 49:887

    Article  CAS  Google Scholar 

  118. Hou X, Choy K-L (2004) Surface Coat Technol 180–181:15

    Article  CAS  Google Scholar 

  119. Jayasinghe SN, Edirisinghe MJ, Wang DZ (2004b) Nanotechnology 15:1519

    Article  CAS  Google Scholar 

  120. Kim IH, Kim KB (2004) J Electrochem Soc 151(1):E7

    Article  CAS  Google Scholar 

  121. Matsushima Y, Nemoto Y, Yamazaki T, Maeda K, Suzuki T (2004) Sensors Actuators B 96:133

    Article  CAS  Google Scholar 

  122. Morota K, Matsumoto H, Mizukoshi T, Konosu Y, Minagawa M, Tanioka A, Yamagata Y, Inoue K (2004) J Colloid Interface Sci 279:484

    Article  CAS  Google Scholar 

  123. Saf R, Goriup M, Steindl T, Hamedinger TE, Sandholzer D, Hayn G (2004) NatMat 3(5):323

    Article  CAS  Google Scholar 

  124. Sanders EH, McGrady KA, Wnek GE, Edmondson CA, Mueller JM, Fontanella JJ, Suarez S, Greenbaum SG (2004) J Power Sources 129:55

    Article  CAS  Google Scholar 

  125. Siebers MC, Walboomers XF, Leeuwenburgh SCG, Wolke JGC, Jansen JA (2004) Biomater 25:2019

    Article  CAS  Google Scholar 

  126. Leeuwenburgh SCG, Wolke JGC, Schoonman J, Jansen JA (2004) Biomater 25:641

    Article  CAS  Google Scholar 

  127. Uematsu I, Matsumoto H, Morota K, Minagawa M, Tanioka A, Yamagata Y, Inoue K (2004) J Colloid Interface Sci 269:336

    Article  CAS  Google Scholar 

  128. Jayasinghe SN, Edirisinghe MJ (2005a) Appl Phys A 80:399

    Article  CAS  Google Scholar 

  129. Dorey RA, Whatmore RW (2004) J Electroceramics 12:19

    Article  CAS  Google Scholar 

  130. Michelson D, Richardson OW (1963) Nucl Instrum Methods 21:355

    Article  Google Scholar 

  131. Su B, Choy KL (2000c) Thin Solid Films 361–362:102

    Article  Google Scholar 

  132. Jiang SP, Chan SH (2004) J Mater Sci 39(14):4405

    Article  CAS  Google Scholar 

  133. Will J, Mitterdorfer A, Kleinlogel C, Perednis D, Gauckler LJ (2000) Solid State Ionics 131:79

    Article  CAS  Google Scholar 

  134. Kelder EM, Nijs OCJ, Schoonman J (1994) Solid State Ionics 68(1–2):5

    Article  CAS  Google Scholar 

  135. Chen CH, Kelder EM, Schoonman J (1998a) J Europ Ceramic Soc 18:1439

    Article  CAS  Google Scholar 

  136. Su B, Choy KL (1999b) J Mater Chem 9(7):1629

    Article  CAS  Google Scholar 

  137. Grigoriev DA, Edirisinghe M, Bao X (2002) J Mater Res 17(2):487

    CAS  Google Scholar 

  138. Su B, Choy KL (2000d) J Mater Chem 10(4):949

    Article  CAS  Google Scholar 

  139. Choy KL (2000) Surf Eng, 16(6):469

    CAS  Google Scholar 

  140. Leeuwenburgh S, Wolke J, Schoonman J, Jansen J (2003) J Biomed Mater Res A 66A(2):330

    Article  CAS  Google Scholar 

  141. Chen CH, Kelder EM, vanderPut PJJM, Schoonman J (1996d) J Mater Chem 6(5):765

    Article  CAS  Google Scholar 

  142. Schoonman J (2000) Solid State Ionics 135:5

    Article  CAS  Google Scholar 

  143. Grigoriev DA, Edirisinghe M (2002) J Appl Phys 91(1):437

    Article  CAS  Google Scholar 

  144. Madou MJ (2002) Fundamentals of microfabrication. CRC Press

  145. Colby BN, Evans CA Jr (1973) Anal Chem 45(11):884

    Article  Google Scholar 

  146. Krohn VE, Ringo GR (1975) Appl Phys Lett 27(9):479

    Article  CAS  Google Scholar 

  147. Arnold PG, Balachandran W (1995) Electrostatics Inst. Phys. Conf. Ser. No. 143:283–288

  148. Melngailis J (1987) J Vac Sci Technol B5(2):469

    Google Scholar 

  149. Jeynes C (1989) Vacuum 39(11–12):1047

    Article  CAS  Google Scholar 

  150. Mair GLR (1992) Int J Mass Spectr Ion Proc 114(1–2):1

    Article  CAS  Google Scholar 

  151. Orloff J (1993) Rev Sci Instrum 64(5):1105

    Article  CAS  Google Scholar 

  152. Stevie FA, Shane TC, Kahora PM, Hull R, Bahnck D, Kannan VC, David E (1995) Surf Interface Anal 23(2):61

    Article  CAS  Google Scholar 

  153. Reyntjens S, Puers R (2001) J Micromech Microeng 11(4):287

    Article  CAS  Google Scholar 

  154. Mackenzie RAD, Smith GDW (1990) Nanotechnology 1(2):163

    Article  Google Scholar 

  155. Mitterauer J (1995) Appl Surf Sci 87–88:79

    Article  Google Scholar 

  156. Gomer R (1979) Appl Phys 19(4):365

    Article  CAS  Google Scholar 

  157. Forbes RG (1997) Vacuum 48(1):85

    Article  Google Scholar 

  158. Forbes RG (2000) J Aerosol Sci 31(1):97

    Article  CAS  Google Scholar 

  159. Van Es JJ, Gierak J, Forbes RG, Suvorov VG, Van den Berghe T, Dubuisson Ph, Monnet I, Septier A (2004) Microelectr Eng 73–74:132

    Google Scholar 

  160. Bischoff L, Akhmadaliev C, Mair AWR, Mair GLR, Ganetsos T, Aidinis CJ (2004a) Appl Phys A 79:89

    Article  CAS  Google Scholar 

  161. Wagner A, Hall TM (1979) J Vac Sci Technol 16(6):1871

    Article  CAS  Google Scholar 

  162. Bell AE, Swanson LW (1986) Appl Phys A 41:335

    Article  Google Scholar 

  163. Seliger RL, Ward JW, Wang V, Kubena RL (1979) Appl Phys Lett 34(5):310

    Article  Google Scholar 

  164. Cheng J, Steckl AJ (2001) J Vacuum Sci Technol B19(6):2551

    Google Scholar 

  165. Prewett PD, Jefferies DK (1980) J Phys D: Appl Phys 13(9):1747

    Article  CAS  Google Scholar 

  166. Benassayag G, Sudraud P, Jouffrey B (1985) Ultramicroscopy 16(1):1

    Article  CAS  Google Scholar 

  167. Benassayag G, Orloff J, Swanson LW (1986) J Physique C7 47(Suppl. 11):389

    Google Scholar 

  168. Davies ST, Khamsehpour B (1996) Vacuum 47(5):455

    Article  CAS  Google Scholar 

  169. Gierak J, Septier A, Vieu C (1999) Methods Phys Res A427:91

    Article  Google Scholar 

  170. Vladimirov VV, Badan VE, Goshkov VN, Soloshenko IA (1993) Appl Surf Sci 65/66(1–4):1

    Article  Google Scholar 

  171. Purcell ST, Binh VT, Thevenard P (2001) Nanotechnology 12(2):168

    Article  CAS  Google Scholar 

  172. Clampitt R, Jefferies DK (1978) Nucl Instrum Methods 149:739

    Article  CAS  Google Scholar 

  173. Yamaguti T (1977) Japan J Appl Phys 16(9):1547

    Article  CAS  Google Scholar 

  174. Noda T, Okutani T, Yagi K, Tamura H, Okano H, Watanabe H (1982) Rev Sci Instrum 53(9):1482

    Article  CAS  Google Scholar 

  175. Ishikawa J, Tsuji H, Aoyama Y, Takagi T (1990) Rev Sci Instrum 61(1, pt.2):592

    Article  CAS  Google Scholar 

  176. Ishikawa J, Takagi T (1984) J Appl Phys 56(11):3050

    Article  CAS  Google Scholar 

  177. Bahasadri A, Brown WL, Saedi R, Pourrezaei K (1988) J Vac Sci Technol B6(6):2085

    Google Scholar 

  178. Mahoney JF, Yahiku AY, Daley HL, Moore RD, Perel J (1969) J Appl Phys 40(13):5101

    Article  CAS  Google Scholar 

  179. Evans CA Jr, Hendricks CD (1972) Rev Sci Instrum 43(10):1527

    Article  CAS  Google Scholar 

  180. Mair GLR, von Engel A (1981) J Phys D: Appl Phys 14(9):1721

    Article  CAS  Google Scholar 

  181. Mahony C, Prewett PD (1984) Vacuum 34(1–2):301

    Article  CAS  Google Scholar 

  182. D’Cruz C, Pourrezaei K, Wagner A (1985) J Appl Phys 58(7):2724

    Article  CAS  Google Scholar 

  183. Nagamachi S, Yamakage Y, Ueda M, Maruno H, Shinada K, Fujiyama Y, Asari M, Ishikawa J (1994) Appl Phys Lett 65(25):3278

    Article  CAS  Google Scholar 

  184. Nagamachi S, Yamakage Y, Ueda M, Maruno H, Ishikawa J (1996) Rev Sci Instrum 67(6):2351

    Article  CAS  Google Scholar 

  185. Chen CA, Acquaviva P, Chun JH, Ando T (1996a) Scripta Materialia 34(5):689

    Article  CAS  Google Scholar 

  186. Driesel W, Dietzsch Ch, Möser M (1996) J Phys D: Appl Phys 29:2492

    Article  CAS  Google Scholar 

  187. Vieu C, Gierak J, David C, Lagadec Y, Bourlange A, Larigaldie D, Wang Z, Flicstein J, Launois H (1997) Microelectr Eng 35:349

    Article  CAS  Google Scholar 

  188. Saito Y, Murata K, Hamaguchi K, Fujita H, Kotake S, Suzuki Y, Senoo M, Hu C-W, Kasuya A, Nishina Y (1998) J Cluster Sci 9(2):123

    Article  CAS  Google Scholar 

  189. Sazio PJA, Vijendran S, Yu W, Beere HE, Jones GAC, Linfield EH, Ritchie DA (1999) J Crystal Growth 201/202:12

    Article  CAS  Google Scholar 

  190. Vijendran S, Sazio PJA, Beere HE, Jones GAC, Ritchie DA, Norman CE (1999) J Vacuum Sci Technol B 17(6):3226

    Article  CAS  Google Scholar 

  191. Akhmadaliev C, Mair GLR, Aidinis CJ, Bischoff L (2002) J Phys D: Appl Phys 35:L91

    Article  CAS  Google Scholar 

  192. Akhmadaliev Ch, Bischoff L, Mair GLR, Aidinis CJ, Ganetsos Th, Anagnostakis E (2003) J Phys D: Appl Phys 36:L18

    Article  CAS  Google Scholar 

  193. Akhmadaliev Ch, Bischoff L, Mair GLR, Aidinis CJ, Ganetsos Th (2004) Microelectr Eng 73–74:120

    Article  Google Scholar 

  194. Mair GLR, Akhmadaliev Ch, Bischoff L, Ganetsos Th, Aidinis CJ (2003) Nuclear Instrum Meth Phys Res B 211:556

    Article  CAS  Google Scholar 

  195. Mair GLR, Akhmadaliev Ch, Bischoff L, Ganetsos Th, Aidinis CJ, Anagnostakis EA (2004) Nucl Instrum Meth Phys Res B 217:347

    Article  CAS  Google Scholar 

  196. Bischoff L, Mair GLR, Aidinis CJ, Londos CA, Akhmadaliev C, Ganetsos Th (2004c) Ultramicroscopy 100:1

    Article  CAS  Google Scholar 

  197. Vijendran S, Lin SD, Jones GAC (2004) Microelectr Eng 73–74:111

    Article  Google Scholar 

  198. Hu CW, Kasuya A, Wowro A, Horiguchi N, Czajka R, Nishina Y, Saito Y, Fujita H (1996) Mater Sci Eng A 217–218:103

    Google Scholar 

  199. Vijendran S, Jones GAC, Beere HE, Shields AJ (2000) Microelectr Eng 53:631

    Article  CAS  Google Scholar 

  200. Krohn VE Jr (1961) In: Langmuir DB, Stuhlinger E, Sellen JM Jr (eds) Electrostatic propulsion. Academic Press, New York, London, pp 73–80

  201. Mair GLR (1984) J Phys D: Appl Phys 17(11):2323

    Article  CAS  Google Scholar 

  202. Beckman JC, Chang THP, Wagner A, Pease RFW (1996) J Vacuum Sci Technol B14(6):3911

    Google Scholar 

  203. Beckman JC, Chang THP, Wagner A, Pease RFW (1997) J Vacuum Sci Technol B15(6):2332

    Google Scholar 

  204. Aidinis CJ, Mair GLR, Bischoff L, Papadopoulos I (2001) J Phys D: Appl Phys 34:L14

    Article  CAS  Google Scholar 

  205. Suvorov VG, Forbes RG (2004) Microelectr Eng 73–74:126

    Article  Google Scholar 

  206. Mair GLR (1996) J Phys D: Appl Phys 29:2186

    Article  CAS  Google Scholar 

  207. Gabovich MD (1983) Usp Fiz Nauk 140(1):137 (in Russian)

    CAS  Google Scholar 

  208. Gabovich MD, Poritsky WJa (1983) Zh Eksper Teor Fiz 85(1):146 (in Russian)

    CAS  Google Scholar 

  209. Praprotnik B, Driesel W, Dietzsch Ch, Niedrig H (1994) Surface Sci 314:353

    Article  CAS  Google Scholar 

  210. Driesel W, Dietzsch Ch (1996) Appl Surface Sci 96:179

    Article  Google Scholar 

  211. Bischoff L, Mair GLR, Mair AWR, Ganetsos T, Akhmadaliev C (2004b) Methods Phys Res B 222:622

    Article  CAS  Google Scholar 

  212. Mair GLR (1990) J Phys D: Appl Phys 23:1239

    Article  CAS  Google Scholar 

  213. Hesse E, Mair GLR, Bischoff L, Teichert J (1996) J Phys D Appl Phys 29:2193

    Article  CAS  Google Scholar 

  214. Mair GLR, von Engel A (1979) J Appl Phys 50(9):5592

    Article  CAS  Google Scholar 

  215. Thompson SP (1984) Vacuum 34(1–2):223

    Article  CAS  Google Scholar 

  216. Barr DL (1987) J Vac Sci Technol B5(1):184

    Google Scholar 

  217. Kingham DR (1983) Appl Phys A 31(3):161

    Article  Google Scholar 

  218. Mair GLR, Ganetsos Th, Bischoff L, Teichert J (2000) J Phys D: Appl Phys 33:L86

    Article  CAS  Google Scholar 

  219. Swanson LW, Kingham DR (1986) Appl Phys A 41(3):223

    Article  Google Scholar 

  220. Kingham DR, Swanson LW (1984) Appl Phys A 34(2):123

    Article  Google Scholar 

  221. Kingham DR, Swanson LW (1986) Appl Phys A 41(2):157

    Article  Google Scholar 

  222. Ganetsos Th, Mair GLR, Bischoff L, Teichert J, Kioussis D (2001) Solid State Electron 45:1049

    Article  CAS  Google Scholar 

  223. Bischoff L, Teichert J, Ganetsos Th, Mair GLR (2001) J Vacuum Sci Technol B19(1):76

    Google Scholar 

  224. Aidinis CJ, Bischoff L, Mair GLR, Londos CA, Ganetsos Th, Akhamdaliev C (2004a) Microelectr Eng 73–74:116

    Article  Google Scholar 

  225. Aidinis CJ, Mair GLR, Bischoff L, Londos CA, Akhamdaliev Ch, Ganetsos Th (2004b) Nuclear Instrum Meth Phys Res B 222:627

    Article  CAS  Google Scholar 

  226. Gopalakrishnan MV, Metzgar K, Rosetta D, Krishnamurthy R (2003) J Mater Proc Technol 135:228

    Article  CAS  Google Scholar 

  227. Yu F, Cui J, Ranganathan S, Dwarakadasa ES (2001) Mater Sci Eng A304–306:621

    Google Scholar 

  228. Lawley A, Leatham AG (1999) Adv Powder Technol, Mater Sci Forum 299(3):407

    Google Scholar 

  229. Chaudhury SK, Sivaramakrishnan CS, Panigrahi SC (2004) J Mater Proc Technol 145:385

    Article  CAS  Google Scholar 

  230. Mesquita RA, Barbosa CA (2004) Mater Sci Eng A 383:87

    Article  CAS  Google Scholar 

  231. Cantor B, Baik KH, Grant PS (1997) Progress Mater Sci 42:373

    Article  CAS  Google Scholar 

  232. Smallman RE, Harris IR, Duggan MA (1997) J Mater Proc Technol 63:18

    Article  Google Scholar 

  233. Schneider A, Uhlenwinkel V, Harig H, Bauckhage K (2004) Mater Sci Eng A 383:114

    Article  CAS  Google Scholar 

  234. Srivastava VC, Mandal RK, Ojha SN (2001) Mater Sci Eng A304–306:555

    Google Scholar 

  235. Jayasinghe SN, Edirisinghe MJ (2005b) Appl Phys A 80:701

    Article  CAS  Google Scholar 

  236. Valaskovic GA, Murphy III JP, Lee MS (2004) J Am Soc Mass Spectrom 15:1201

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of Fluid Flow Machinery, Polish Academy of Sciences, Fiszera 14, Gdańsk, 80-952, Poland

    A. Jaworek

Authors
  1. A. Jaworek
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to A. Jaworek.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Jaworek, A. Electrospray droplet sources for thin film deposition. J Mater Sci 42, 266–297 (2007). https://doi.org/10.1007/s10853-006-0842-9

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10853-006-0842-9

Keywords

Search

Navigation