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Electro-thermal Stimuli for MEMS Testing in FSBM Technology

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Abstract

The development of low-cost go/no-go procedures for MEMS production testing is one of the main issues of MEMS manufacturability. In particular, the generation of low-cost test stimuli is a real challenge. In this paper, we investigate the generation of electrically-induced thermal stimuli to test electro-mechanical structures. Static, transient and harmonic responses are studied and it is demonstrated that they can be used for efficient detection and classification of several faulty devices.

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Authors and Affiliations

  1. LIRMM, University of Montpellier/CNRS, Montpellier, France

    N. Dumas, F. Azaïs, L. Latorre & P. Nouet

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  1. N. Dumas
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  2. F. Azaïs
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  3. L. Latorre
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  4. P. Nouet
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Additional information

Norbert Dumas received an electrical engineering diploma in 2002, from the National Institute of Applied Science (INSA) of Lyon, France. Then, he has prepared a PhD thesis in LIRMM laboratory, Montpellier, France, that was defended in October 2005. His work concerns the design and test of monolithic Microsystems. He is currently a research associate at Lancaster University, England.

Florence Azaïs received the Ph.D. degree in electrical engineering from the University of Montpellier, France in 1996. She is currently working in the Microelectronics department of the Laboratory of Computer Science, Robotics and Microelectronics of Montpellier (LIRMM) as a researcher of the National Council of Scientific Research (CNRS). Since 1993, she has been interested in the general domain of test and reliability of integrated circuits and systems. Her main research interests include fault modeling, analog and mixed-signal circuit testing, MEMS testing, reliability and failure analysis of integrated systems. She has authored or co-authored over 80 international papers on these topics. She also served as a member of the Program Committee of several international conferences (DATE, ICCD, ETS, IMSTW, LATW).

Laurent Latorre received the mechanical engineering diploma in 1994, from the Ecole Nationale d’Ingénieur de Belfort. He then received a MS degree in Microelectronics from the University of Montpellier in 1995. He achieved a Ph.D. thesis in the field of Microsystems in LIRMM laboratory from 1996 to 1999. After a post-doc period at UCLA (CA) where he worked on the design of liquid metal micro-relays, he obtained an associate professor position at the University of Montpellier in 2001. His current research interests concern the design and test of CMOS Microsystems. It includes the modeling and characterization of transducers and the design of microelectronic interfaces.

Pascal Nouet received the PhD in Microelectronics from the University of Montpellier, France in 1991. He is currently a full professor at the Polytechnic Engineering School of the University of Montpellier where he is teaching analogue circuits and systems. From 1987, he has been involved on various research projects such as Electron-Beam Testing of ICs, effect of irradiations on CMOS circuits, characterization and modeling of CMOS devices and interconnects. His current research interest concerns the design, test and reliability of integrated systems including a large variety of heterogeneous systems (MEMS and NEMS). As an active member of a European network of excellence on Design for Manufacturing of Micro and Nano Systems, he is currently leading the activity on Design for Testability of MNS over a group of six European institutes. He’s mentoring or has mentored a total of 16 PhD students and has been author or co-author of numerous papers. Among them more than eighty appeared in journals or have been presented in major international conferences.

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Dumas, N., Azaïs, F., Latorre, L. et al. Electro-thermal Stimuli for MEMS Testing in FSBM Technology. J Electron Test 22, 189–198 (2006). https://doi.org/10.1007/s10836-005-6132-7

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  • DOI: https://doi.org/10.1007/s10836-005-6132-7

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