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Stress development of direct-patternable PZT film for applying to micro-detecting system

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Abstract

Direct-patternable lead zirconate titanate (PZT) film was prepared by sol-gel technique using orth-nitrobenzaldehyde as a photosensitive agent. For applying this direct-patternable PZT ferroelectric film to micro electromechanical system, a development of stress in the film was investigated by modifying the anneal condition and the constituents of PZT sol. The residual stress in the conventional and modified (for stress-release) direct-patternable PZT films was investigated by the Raman spectroscopy. In addition, ferroelectric properties of modified PZT film were compared with those of conventional film. Finally, we assess the applying feasibility of direct-patternable PZT film to micro-detecting system.

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Authors and Affiliations

  1. Department of Ceramic Engineering, Yonsei University, Seoul, Korea

    Sang Woo Bae & Hyung-Ho Park

  2. Microsystem Research Center, Korea Institute of Science and Technology, Seoul, Korea

    Ghi Yuun Kang & Tae-Song Kim

Authors
  1. Sang Woo Bae
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  2. Ghi Yuun Kang
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  3. Hyung-Ho Park
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  4. Tae-Song Kim
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Correspondence to Hyung-Ho Park.

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Bae, S.W., Kang, G.Y., Park, HH. et al. Stress development of direct-patternable PZT film for applying to micro-detecting system. J Electroceram 17, 805–809 (2006). https://doi.org/10.1007/s10832-006-7238-8

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  • DOI: https://doi.org/10.1007/s10832-006-7238-8

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