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Preparation and Application of PZT Films in Microelectronics

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Future Information Communication Technology and Applications

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 235))

Abstract

The paper describes conceptual framework for understanding the behavior of piezoelectric materials by emphasizing important relationships between internal structure and properties of thin films. It attempts to present a general picture of the piezoelectric material nature and the mechanisms that act upon, modify, and control their properties. The development of PZT materials in the form of films on the conception of multiphase structure has been carried out in this paper. Metal alkoxide solutions and PZT powder suspensions were used for thin films preparation by electrophoretic deposition (EPD) technique. Specific features of the EPD method were considered. Microstructure of the films was examined as well as their physical properties.

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Authors and Affiliations

  1. Department of Microelectronics, National Research University of Electronic Technology (MIET), Bld.5, Pas.4806, Zelenograd, Moscow, Russia

    S. Timishenkov, V. Vodopyanov, Yu Stepanova, Yu Cherkasova & N. Korobova

Authors
  1. S. Timishenkov
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  2. V. Vodopyanov
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  3. Yu Stepanova
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  4. Yu Cherkasova
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  5. N. Korobova
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Corresponding author

Correspondence to N. Korobova .

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Editors and Affiliations

  1. , Computer Engineering, Paichai University, Baejae-ro, Seo-gu 155-40, Daejeon, 302-735, Korea, Republic of (South Korea)

    Hoe-Kyung Jung

  2. , Electronic Engineering, Mokwon University, Doanbookro, Seo-Ku 88, Daejeon, 302-729, Korea, Republic of (South Korea)

    Jung Tae Kim

  3. PO Box 2434, Electrical Engineering, QUT Gardens Point, George Street 2, Brisbane, 4001, Queensland, Australia

    Tony Sahama

  4. Normal University, Graduate Institute of Information, National Kaohsiung, No.116, Heping 1st Rd., Lingya District, Kaohsiung City, 80201, Kao-hsiung, Taiwan R.O.C.

    Chung-Huang Yang

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Timishenkov, S., Vodopyanov, V., Stepanova, Y., Cherkasova, Y., Korobova, N. (2013). Preparation and Application of PZT Films in Microelectronics. In: Jung, HK., Kim, J., Sahama, T., Yang, CH. (eds) Future Information Communication Technology and Applications. Lecture Notes in Electrical Engineering, vol 235. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-6516-0_54

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  • DOI: https://doi.org/10.1007/978-94-007-6516-0_54

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  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-007-6515-3

  • Online ISBN: 978-94-007-6516-0

  • eBook Packages: EngineeringEngineering (R0)

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