Skip to main content
SpringerLink
Log in

A low noise 0.9 GHz FBAR clock

  • Published:
Analog Integrated Circuits and Signal Processing Aims and scope Submit manuscript

Abstract

A low noise 0.9 GHz FBAR clock consisting of an oscillator and divider circuit for single-sided-to-differential conversion for a high-speed interleaved pipeline A/D-converter was designed, realized with an in-house FBAR and a commercial 0.35 μm CMOS process, and tested. The circuit showed very good jitter and phase noise performance. A temperature coefficient of –47 ppm/K was measured.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. H.C. Nathanson, W.E. Newell, R.A. Wickstrom, and J.R. Davis, Jr. IEEE Trans. Electron Devices, vol. ED-14, no. 3, pp. 117–133, 1967.

  2. M. Ylimaula and M. Åberg, “A 500 kHz micro-mechanical oscillator based on cantilever resonator.” In Proceedings of the 15thEuropean Conference on Circuit Theory and Design ECCTD’01, Espoo, Finland, 2001, pp. 369–372.

  3. M.M. Driscoll, S.V. Krishnaswamy, R.A. Moore, and J.M. J.R. Szedon, “UHF film resonator and resonator-controlled oscillator and filter design using computer-aided design techniques.” In IEEE MTT-S Symposium Digest, pp. 239–242, vol. 85, St Louis, USA, 1985.

  4. B.P. Otis and J.M. Rabaey, “A 300 μW 1.9 GHz CMOS oscillator utilizing micromachined resonators.” In Proc. of IEEE ESSCIRC 2002 Conference, Florence, Italy, 2002, pp. 151–154.

  5. B.P. Otis and J.M. Rabaey, “A 300 μW 1.9 GHz CMOS oscillator utilizing micromachined resonators.” IEEE Journal of Solid-State Circuits, vol. 38, no. 7, pp. 1271–1274, 2003.

  6. R. Gabl, E. Green, M. Schreiter, H.D. Feucht, H. Zeiniger, R. Primig, D. Pitzer, G. Eckstein, W. Wersing, W Reichl, and J. Runck, “Novel integrated FBAR sensors: An universal technology platform for Bio- and gas detection.” In Proceedings of IEEE Sensors 2003 Conference, Toronto, Canada, 22–24, pp. 1184–1188.

  7. H. Zang, M.S. Marma, E.S. Kim, C.E. McKenna, and M.E. Thompson, “A film bulk acoustic resonator in liquid environments.” Journal of Micromechanics and Microengineering, vol. 15, no. 10, 2005, pp. 1911–1916.

  8. H. Zang and E.S. Kim, “Micromachined acoustic resonant mass sensor.” IEEE Journal of Micromechanical Systems, vol. 14, no. 4, pp. 699–706, 2005.

  9. A.P.S. Khanna, E. Grane, and T. Chong, “A 2 GHz voltage tunable FBAR oscillator.” In IEEE MTT-S Symposium Digest, Philadelphia, PA, USA, 2003, pp. 717–720.

  10. J.J. Kim, H. Zhang, W. Pang, H. Yu, and E.S. Kim, “Low phase noise, FBAR-based voltage controlled oscillator without varactor.” In Proc. of 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, 2005, pp. 10631–1066.

  11. A. Rantala, D. Gomes Martins, and M. Åberg, “A DLL clock generator for a high speed A/D-converter with 1 ps jitter and skew calibrator with 1 ps accuracy in 0.35 μm CMOS.” In Proc. of IEEE Norchip 2005 Conference, Oulu, Finland, 2005.

  12. E. A Vittoz, “High-performance crystal oscillator circuits: Theory and application.” IEEE Journal of Solid-State Circuits, vol. 23, 3, pp. 774–783, 1988

Download references

Author information

Authors and Affiliations

  1. VTT Information Technology, Microelectronics, P.O.B. 1208, FIN-02044, Finland

    Markku Åberg, Miikka Ylimaula, Markku Ylilammi, Tuomas Pensala & Arto Rantala

Authors
  1. Markku Åberg
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Miikka Ylimaula
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Markku Ylilammi
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Tuomas Pensala
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Arto Rantala
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Markku Åberg.

Additional information

Markku Åberg was born in Helsinki, Finland, on August 30, 1953. He received the M. S. degree in electronics from Helsinki University of Technology in 1977, the Lic. Tech. degree from Helsinki University of Technology in 1987 and the Ph.D. degree from Helsinki University of Technology in 1993. He has worked 1976–1984 as a research scientist at VTT, Telecommunications laboratory in the area of reliability physics and failure analysis of semiconductor devices. In 1985 he joined VTT, Semiconductor laboratory, today Microelectronics, acting as the leader of the research group of integrated circuits. In 2002 he was nominated as a joint VTT—Helsinki University of Technology Professor of Microcircuit Design (present position). He is also Docent of Microelectronics at Tampere University of Technology from 1999, and has acted as a Visiting associate Professor at the Royal University of Technology at Stockholm, 1998–1999. He is a member of IEEE and IMAPS and he has published over 90 journal and conference papers on rf and analog integrated circuits design and modeling, EL displays and power integrated circuits.

Miikka Ylimaula was born in Helsinki, Finland on March 18, 1977. He received the M.Sc. Degree in microelectronics from Helsinki University of Technology 2001. From the beginning of the year 2000 he has worked as a research scientist at VTT (Technical Research Centre of Finland). He made his diploma thesis about power micro mechanical oscillator. He has been working with MEMS and FBAR oscillator and sensor interface circuit design.

Markku Ylilammi received the Diploma Engineer and Doctor of Technology degrees in electrical engineering from the Helsinki University of Technology, Finland, in 1979 and 1996, respectively. After three years in semiconductor industry he joined VTT in 1981. His research activities included micromechanics, miniaturized sensors, and metrology. Thereafter he was developing ALD technology for thin film electroluminescence and since 1994 he has been exploring thin film acoustics in electronic applications.

Tuomas Pensala was born in Helsinki, Finland on 10.10.1972. He received his M.Sc. degree from the Department of Engineering Physics and Mathematics in Helsinki University of Technology in 2000. He joined VTT Technical Research Centre of Finland in 1998 to work on picosecond ultrasonic measurements and ’thin film bulk acoustic wave (BAW) technology. He is currently working as a research scientist at VTT Micro- and Nanoelectronics where his work includes modelling, characterisation, design, and fabrication of thin film BAW devices.

Arto Rantala was born in Vampula, Finland on May 7, 1968. He received the M.Sc. Degree in microelectronics from Tampere University of Technology 1995. From the beginning of the year 1994 he has worked as a research scientist at VTT (Technical Research Centre of Finland). He made his diploma thesis about power integrated circuits related to an integrated motor control and a laser driver. He has been working with mixed mode IC design in the field of integrated power controllers, instrumentation, satellite communications circuits, fast DA-converters and neural networks. He has published 24 journal and conference papers on analog and mixed signal integrated circuit design.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Åberg, M., Ylimaula, M., Ylilammi, M. et al. A low noise 0.9 GHz FBAR clock. Analog Integr Circ Sig Process 50, 29–37 (2007). https://doi.org/10.1007/s10470-006-9616-1

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10470-006-9616-1

Keywords

Search

Navigation