Skip to main content
SpringerLink
Log in

Phase-shifting interferometric profilometry with a wavelength-tunable diode source

  • Special Section: The Tenth Japan-Finland Joint Symposium on Optics in Engineering “OIE’13, Utsunomiya”
  • Regular Papers
  • Published:
Optical Review Aims and scope Submit manuscript

Abstract

A phase-shifting interferometer with a tunable external-cavity laser diode has been constructed for forming three-dimensional (3-D) phase profiles. The interference phase is shifted equally in four steps by varying the source wavelength. Profilometry is achieved by measuring the phase shifts that are extracted by the Carré algorithm. The linear regression of the distance measurement from 40 μm to 13mm has been experimentally demonstrated by phase-shifting interferometry. A laser-diode interferometer has been applied to 3-D profile measurement for a step-mirror object at a deep depth.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Y. Ishii: in Laser-Diode Interferometry, ed. E. Wolf (Elsevier, Amsterdam, 2004) Progress in Optics, Vol. 46, p. 243.

  2. O. Sasaki, T. Suzuki, and K. Takahashi: Opt. Eng. 29 (1990) 1511.

    Article  ADS  Google Scholar 

  3. D. A. Jackson, A. D. Kersey, M. Corke, and J. D. C. Jones: Electron. Lett. 18 (1982) 1081.

    Article  Google Scholar 

  4. T. Kubota, M. Nara, and T. Yoshino: Opt. Lett. 12 (1987) 310.

    Article  ADS  Google Scholar 

  5. H. Kikuta, K. Iwata, and R. Nagata: Appl. Opt. 25 (1986) 2976.

    Article  ADS  Google Scholar 

  6. J. Kato and I. Yamaguchi: Opt. Rev. 7 (2000) 158.

    Article  Google Scholar 

  7. C. J. Morgan: Opt. Lett. 7 (1982) 368.

    Article  ADS  Google Scholar 

  8. M. Kinoshita, M. Takeda, H. Yago, Y. Watanabe, and T. Kurokawa: Appl. Opt. 38 (1999) 7063.

    Article  ADS  Google Scholar 

  9. S. Kuwamura and I. Yamaguchi: Appl. Opt. 36 (1997) 4473.

    Article  ADS  Google Scholar 

  10. A. Yamamoto, C.-C. Kuo, K. Sunouchi, S. Wada, I. Yamaguchi, and H. Tashiro: Opt. Rev. 8 (2001) 59.

    Article  Google Scholar 

  11. T. H. Barnes, T. Eiju, and K. Matsuda: Optik 103 (1996) 93.

    Google Scholar 

  12. H. J. Tiziani, B. Franze, and P. Haible: J. Mod. Opt. 44 (1997) 1485.

    Article  ADS  Google Scholar 

  13. P. Carré: Metrologia 2 (1966) 13.

    Article  ADS  Google Scholar 

  14. D. Malacala, M. Servín, and Z. Malacala: Interferogram Analysis for Optical Testing (Marcel Dekker, New York, 1998) p. 224.

    Google Scholar 

  15. F. Lexer, C. K. Hitzenberger, A. F. Fercher, and M. Kulhavy: Appl. Opt. 36 (1997) 6548.

    Article  ADS  Google Scholar 

  16. R. Onodera and Y. Ishii: Appl. Opt. 33 (1994) 5052.

    Article  ADS  Google Scholar 

  17. J. H. Bruning: in Fringe-Scanning Interferometers, ed. D. Malacala (Wiley, New York, 1978) Optical Shop Testing, 1st ed., Chap. 13, p. 409.

Download references

Author information

Authors and Affiliations

  1. Department of Electronic and Information Systems Engineering, Polytechnic University, Kodaira, Tokyo, 187-0035, Japan

    Takeshi Takahashi & Ribun Onodera

  2. Department of Applied Physics, Tokyo University of Science, Katsushika, Tokyo, 125-8585, Japan

    Yukihiro Ishii

  3. Photonics Control Technology Team, RIKEN, Wako, Saitama, 351-0198, Japan

    Yukihiro Ishii

Authors
  1. Takeshi Takahashi
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Yukihiro Ishii
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Ribun Onodera
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Takeshi Takahashi.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Takahashi, T., Ishii, Y. & Onodera, R. Phase-shifting interferometric profilometry with a wavelength-tunable diode source. OPT REV 21, 410–414 (2014). https://doi.org/10.1007/s10043-014-0064-3

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10043-014-0064-3

Keywords

Search

Navigation