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Frequency scanning interferometry with nanometer precision using a vertical-cavity surface-emitting laser diode under scanning speed control

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Abstract

Frequency scanning interferometry technique with a nanometer precision using a vertical-cavity surface-emitting laser diode (VCSEL) is presented. Since the frequency scanning of the VCSEL is linearized by the phase-locked-loop technique, the gradient of the interference fringe order can be precisely determined using linear least squares fitting. This enables a length measurement with a precision better than a quarter wavelength, and the absolute fringe number including the integer part at the atomic transition spectrum (rubidium-D2 line) is accurately determined. The validity of the method is demonstrated by excellent results of block gauge measurement with a root mean square error better than 5 nm.

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Authors and Affiliations

  1. Division of Applied Physics, Graduate School of Engineering, Hokkaido University, N13W8, Kita-ku, Sapporo, 060-8628, Japan

    Seiichi Kakuma

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  1. Seiichi Kakuma
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Correspondence to Seiichi Kakuma.

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Kakuma, S. Frequency scanning interferometry with nanometer precision using a vertical-cavity surface-emitting laser diode under scanning speed control. Opt Rev 22, 869–874 (2015). https://doi.org/10.1007/s10043-015-0140-3

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  • DOI: https://doi.org/10.1007/s10043-015-0140-3

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