Abstract
In this paper, we improve and develop a micro cam system, in which reciprocating linear movement of two electrostatic linear comb-drive actuators (ELCA) is transformed into the unilateral rotation of a cam rim through six elastic wings of motion-transmission mechanisms. The system was fabricated by using SOI-MEMS technology and only one photo mask. Our experimental results show that the new micro cam system runs stably while the driving frequency ranging from 1 to 30 Hz with the driving voltage V pp = 100 V. In addition, the average angular velocities of the cam rim matched with the theoretical results better than the velocities measured in the previous micro cam system.
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This research is funded by Vietnam National Foundation for Science and Technology Development (NAFOSTED) under Grant Number 107.01-2015.18.
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Pham, P.H., Dang, L.B., Nguyen, V.H. et al. Development of new electrostatic micro cam system driven by elastic wings. Microsyst Technol 23, 5669–5675 (2017). https://doi.org/10.1007/s00542-017-3422-9
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DOI: https://doi.org/10.1007/s00542-017-3422-9