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Ethanol gas sensors based on multi-wall carbon nanotubes on oxidized Si substrate

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Abstract

In this study, ethanol gas sensors were fulfilled by utilizing the vertically aligned carbon nanotubes (CNTs). CNTs were synthesized by thermal chemical vapor deposition (CVD) at 700 °C under C2H2 atmosphere. From field-emission scanning electron microscope (FESEM), it was found that the average length and average diameter of the CNTs were about 4.52 μm and 45 nm, respectively. Further, carbon nanotube ethanol gas sensors were fabricated. Under 800 ppm ethanol vapor concentration and at room temperature, it was found that the sensitivity of the carbon nanotube ethanol gas sensor was 1.67 %.

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References

  • Cantalini C, Valentini L, Armentano I, Lozzi L, Kenny JM, Santucci S (2003) Sensitivity to NO2 and cross-sensitivity analysis to NH3, ethanol and humidity of carbon nanotubes thin film prepared by PECVD. Sens Actuators B 95:195–202

    Article  Google Scholar 

  • Chang SJ, Hsueh TJ, Chen IC, Huang BR (2008) Highly sensitive ZnO nanowire CO sensors with the adsorption of Au nanoparticles. Nanotechnology 19:175502

    Article  Google Scholar 

  • da Silva LB, Fagan SB, Mota R (2004) Ab initio study of deformed carbon nanotube sensors for carbon monoxide molecules. Nano Lett 4:65–67

    Article  Google Scholar 

  • Emmenegger C, Bonard JM, Mauron P, Sudan P, Lepora A, Grobety B, Zuttel A, Schlapbach L (2003) Synthesis of carbon nanotubes over Fe catalyst on aluminium and suggested growth mechanism. Carbon 41:539–547

    Article  Google Scholar 

  • Hofmann S, Ducati C, Neill RJ, Piscanec S, Ferrari AC, Geng J, Dunin-Borkowski RE, Robertson J (2003) Gold catalyzed growth of silicon nanowires by plasma enhanced chemical vapor deposition. J Appl Phys 94:6005–6012

    Article  Google Scholar 

  • Huang CS, Huang BR, Jang YH, Tsai MS, Yeh CY (2005) Three-terminal CNTs gas sensor for N-2 detection. Diamond Relat Mater 14:1872–1875

    Article  Google Scholar 

  • Huang CS, Huang BR, Hsiao CH, Yeh CY, Huang CC, Jang YH (2008) Effects of the catalyst pretreatment on CO2 sensors made by carbon nanotubes. Diamond Relat Mater 17:624–627

    Article  Google Scholar 

  • Joshi KA, Prouza M, Kum M, Wang J, Tang J, Haddon R, Chen W, Mulchandani A (2006) V-type nerve agent detection using a carbon nanotube-based amperometric enzyme electrode. Anal Chem 78:331–336

    Article  Google Scholar 

  • Leite ER, Weber IT, Longo E, Varela JA (2000) A new method to control particle size and particle size distribution of SnO2 nanoparticles for gas sensor applications. Adv Mater 12:965–968

    Article  Google Scholar 

  • Li W, Jung H, Nguyen DH, Kim D, Hong SK, Kim H (2010) Nanocomposite of cobalt oxide nanocrystals and single-walled carbon nanotubes for a gas sensor application. Sens Actuators B 150:160–166

    Article  Google Scholar 

  • Miao JY, Hwang DW, Narasimhulu KV, Lin PI, Chen YT, Lin SH, Hwang LP (2004) Synthesis and properties of carbon nanospheres grown by CVD using Kaolin supported transition metal catalysts. Carbon 42:813–822

    Article  Google Scholar 

  • Odom TW, Huang JL, Kim P, Lieber CM (1998) Atomic structure and electronic properties of single-walled carbon nanotubes. Nature 391:62–64

    Article  Google Scholar 

  • Ouyang M, Huang JL, Lieber CM (2002) Fundamental electronic properties and applications of single-walled carbon nanotubes. Acc Chem Res 35:1018–1025

    Article  Google Scholar 

  • Penza M, Cassano G, Aversa P, Antolini F, Cusano A, Cutolo A, Giordano M, Nicolais L (2004) Alcohol detection using carbon nanotubes acoustic and optical sensors. Appl Phys Lett 85:2379–2381

    Article  Google Scholar 

  • Penza M, Cassano G, Aversa P, Cusano A, Cutolo A, Giordano M, Nicolais L (2005) Carbon nanotube acoustic and optical sensors for volatile organic compound detection. Nanotechnology 16:2536–2547

    Article  Google Scholar 

  • Penza M, Cassano G, Aversa P, Cusano A, Consales M, Giordano M, Nicolais L (2006) Acoustic and optical VOCs sensors incorporating carbon nanotubes. IEEE Sens J 6:867–875

    Article  Google Scholar 

  • Penza M, Rossi R, Alvisi M, Cassano G, Serra E (2009a) Functional characterization of carbon nanotube networked films functionalized with tuned loading of Au nanoclusters for gas sensing applications. Sens Actuators B 140:176–184

    Article  Google Scholar 

  • Penza M, Rossi R, Alvisi M, Signore MA, Cassano G, Dimaio D, Pentassuglia R, Piscopiello E, Serra E, Falconieri M (2009b) Characterization of metal-modified and vertically-aligned carbon nanotube films for functionally enhanced gas sensor applications. Thin Solid Films 517:6211–6216

    Article  Google Scholar 

  • Randeniya LK, Martin PJ, Bendavid A, McDonnell J (2011) Ammonia sensing characteristics of carbon-nanotube yarns decorated with nanocrystalline gold. Carbon 49:5265–5270

    Article  Google Scholar 

  • Someya T, Small J, Kim P, Nuckolls C, Yardley JT (2003) Alcohol vapor sensors based on single-walled carbon nanotube field effect transistors. Nano Lett 3:877–881

    Article  Google Scholar 

  • Varghese K, Kichambre PD, Gong D, Ong KG, Dickey EC, Grimes CA (2001) Gas sensing characteristics of multi-wall carbon nanotubes. Sens Actuators B 81:32–41

    Article  Google Scholar 

  • Wang ZL (2003) Nanobelts, nanowires, and nanodiskettes of semiconducting oxides—from materials to nanodevices. Adv Mater 15:432–436

    Article  Google Scholar 

  • Wildöer JWG, Venema LC, Rinzler AG, Smalley RE, Dekker C (1988) Electronic structure of atomically resolved carbon nanotubes. Nature 391:59–62

    Article  Google Scholar 

  • Wu RJ, Huang YC, Yu MR, Lin TH, Hung SL (2008) Application of m-CNTs/NaClO4/Ppy to a fast response, room working temperature ethanol sensor. Sens Actuators B 134:213–218

    Article  Google Scholar 

  • Zhang J, Boyd A, Tselev A, Paranjape M, Barbara P (2006) Mechanism of NO2 detection in carbon nanotube field effect transistor chemical sensors. Appl Phys Lett 88:123112

    Article  Google Scholar 

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Acknowledgments

This work was supported by Ministry of Science and Technology under Contract Numbers MOST 104-2221-E-150-042 and 103-2221-E-150-034. This work was also supported by National Science Council of Taiwan under Contract Numbers NSC 102-2221-E-150-046 and NSC 101-2221-E-150-043. Common Laboratory for Micro/Nano Science and Technology of National Formosa University that provided the partial equipment for measurement is acknowledged. The authors would also like to thank the Center for Micro/Nano Science and Technology of National Cheng Kung University for the assistance in device characterization. They would also like to thank Dr. C. H. Hsiao and Dr. C. S. Huang for the assistance in device fabrication and equipment support.

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  1. Department of Electronic Engineering, National Formosa University, Yunlin, 632, Taiwan

    S. J. Young & Z. D. Lin

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  1. S. J. Young
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  2. Z. D. Lin
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Correspondence to S. J. Young.

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Young, S.J., Lin, Z.D. Ethanol gas sensors based on multi-wall carbon nanotubes on oxidized Si substrate. Microsyst Technol 24, 55–58 (2018). https://doi.org/10.1007/s00542-016-3154-2

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