Abstract
Microfluidic channels have been created for quartz material using micromechanical manufacturing technologies such as micro laser machining, micro ultrasonic machining, and ultra-precision machining. Ultra-precision machining has been used to manufacture cross-junction channels 14 µm wide and 28 µm deep with a three-dimensional triangle cross-section. Micro laser machining has been used
to manufacture U-shaped and 
-shaped microfluidic channels. Deep holes and microfluidic channels with a high slenderness ratio (width/depth) can be obtained by using micro ultrasonic machining technology. These three machining techniques are compared with respect to surface profiles and machining quality.
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References
Anderson DG, Xu QB, Hashimoto M, Whitesides GM, Langer R (2009) Preparation of monodisperse biodegradable polymer microparticles using a microfluidic flow-focusing device for controlled drug delivery. Small 5:1575–1581
Bhuyan MK, Courvoisier F, Lacourt PA, Jacquot M, Furfaro L, Withford MJ, Dudley JM (2010) High aspect ratio taper-free microchannel fabrication using femtose-cond Bessel beams. Opt Express 18:566–574
Bokenkamp D, Desai A, Yang X, Tai YC, Marzluff E, Mayo S (1998) Microfabricated silicon mixers for submillisecond quench-flow analysis. Anal Chem 70:232–236
Borghi A, Gualtieri E, Marchetto D, Moretti L, Valeri S (2008) Tribological effects of surface texturing on nitriding steel for high-performance engine applications. Wear 2651046-2651051
Brivio M, Verboom W, Reinhoudt DN (2006) Miniaturized continuous flow reaction vessels: influence on chemical reactions. Lab Chip 6:329–344
Chu LY, Utada AS, Shah RK, Kim JW, Weitz DA (2007) Controllable monodisperse multiple emulsions. Angew Chem Int Ed 46:8970–89744
Dittrich PS, Manz A (2006) Lab-on-a-chip: microfluidics in drug discovery. Rev Drug Discov 5:211–218
Gattass RR, Mazur E (2008) Femtosecond laser micromachining in transparent materials. Nat Photon 2:219–225
Hettiarachchi K, Talu E, Longo ML, Dayton PA, Lee AP (2007) On-chip generation of microbubbles as a practical technology for manufacturing contrast agents for ultrasonic imaging. Lab Chip 7:463–468
Hisamoto H, Saito T, Tokeshi M, Hibara A, Kitamori T (2001) Fast and high conversion phase-transfer synthesis exploiting the liquid–liquid interface. Chem Commun 24:2662–2663
Kalek C, Robert L, Boy JJ, Blind P (2007) Deep microstructuring in glass for microfluidic applications. Microsyst Technol 13:447–453
Leng XF, Zhang WH, Wang CM, Cui L, Yang CY (2010) Agarose droplet microfluidics for highly parallel and efficient single molecule emulsion PCR. Lab Chip 10:2841–2843
Liu C, Liao Y, He F, Shen Y, Chen D, Cheng Y, Xu Z, Sugioka K, Midorkawa K (2012) Fabrication of three-dimensional microfluidic channels inside glass using nanosecond laser direct writing. Opt Express 20:4291–4296
Menezes PL, Kailas, Kishore SV, Lovell MR (2010) Response of materials during sliding on various surface textures. J Mater Eng Perform 20:1438–1449
Mitchell MC, Spikmans V, de Mello AJ (2001) Microchip-based synthesis and analysis: control of multicomponent reaction products and intermediates. Analyst 126:24–27
Nakano M, Korenaga A, Korenaga A, Miyake K, Murakami T, Ando Y, Usami H, Sasaki S (2007) Applying micro-texture to cast iron surfaces to reduce the friction coefficient under lubricated conditions. Tribol Lett 28:131–137
Queste S, Salut R, Clatot S, Rauch JY, Malek CGK (2010) Manufacture of microfluidic glass chips by deep plasma etching, femtosecond laser ablation, and anodic bonding. Microsyst Technol 16:1485–1493
Stroock AD, Dertinger SKW, Ajdari A, Mezi’ C, Stone I, Whitesides GM (2002) Chaotic mixer for microchannel. Science 295:647–651
Utada AS, Lorenceau E, Link DR, Kaplan PD, Stone HA, Weitz DA (2005) Monodisperse double emulsions generated from a microcapillary device. Science 308:537–541
Yang Z, Matsumoto S, Goto H, Matsumoto M, Maeda R (2001) Ultrasonic micromixer for microfluidic systems sensor. Actuat A-Phys 93:266–272
Zhang J, Midorikawa K (1999) High-quality and high-efficiency machining of glass materials by laser-induced plasma-assisted ablation using conventional nanosecond UV, visible, and infrared lasers Appl. Phys A 69:S879–S882
Zhang J, Sugioka K, Midorikawa K (1998) High-speed machining of glass materials by laser-induced plasma-assisted ablation using a 532-nm laser. Appl Phys A 67:499–501
Zhang B, Tice JD, Ismagilov RF (2004) Formation of droplets of in microfluidic channels alternating composition and applications to indexing of concentrations in droplet-based. Anal Chem 76:4977–49782
Zhang H, Tumarkin E, Peerani R, Nie Z, Sullan RM, Walker GC, Kumacheva E (2006) Microfluidic production of biopolymer microcapsules with controlled morphology. J Am Chem Soc 128:12205–12210
Zheng HY, Lee T (2005) Studies of CO2 laser peeling of glass substrates. J Micromech Microeng 15:2093–2097
Acknowledgments
The support from the Ministry of Economic Affairs and Micro/Meso Mechanical Manufacturing R&D Department, Taiwan, through Grants A0245010 and A0245020 is gratefully acknowledged.
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Lin, YC., Lee, CC., Lin, HS. et al. Fabrication of microfluidic structures in quartz via micro machining technologies. Microsyst Technol 23, 1661–1669 (2017). https://doi.org/10.1007/s00542-015-2717-y
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DOI: https://doi.org/10.1007/s00542-015-2717-y