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Mass-produced polyethylene-terephthalate film coated with tantalum pentoxide for pH measurement under ISFET detection configuration

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Abstract

This study reports an ISFET-based pH sensor utilizing a tantalum pentoxide (Ta2O5) as the sensing layer. Commercial PET film for mass production of touch panel coated with Ta2O5 film is used as the extended gate electrode connecting to a MOSFET chip for H+ ion measurement. The low-cost and plug-and-sense PET sensing file makes the developed sensor is disposable. The high corrosion-resistance of Ta2O5 layer greatly extends the lifetime and the pH sensing range for the solid-state sensor. Theoretical Nernst response is adopted to evaluate the sensing performance of the developed pH sensor. Results show that the developed pH sensor exhibits high sensitivity of 24.18 mV/pH and good linearity of R2 = 0.9798 in the pH range from 1 to 13. In addition, the developed sensor also shows excellent sensing performance including ultra-fast response (<10 s), good repeatability (variation ~0.32 %) and good stability (variation <1 %). Moreover, the developed Ta2O5-based pH sensor shows low interference response to the existence of sodium and potassium interference ions. The developed solid state pH sensor provides a low-cost yet high performance way for developing disposable pH sensors.

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Authors and Affiliations

  1. Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-sen University, Kaohsiung, Taiwan

    Yung-Chen Wu, Shang-Jing Wu & Che-Hsin Lin

  2. Metal Industries Research and Development Centre, Kaohsiung, Taiwan

    Yung-Chen Wu

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  1. Yung-Chen Wu
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  2. Shang-Jing Wu
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  3. Che-Hsin Lin
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Correspondence to Che-Hsin Lin.

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Wu, YC., Wu, SJ. & Lin, CH. Mass-produced polyethylene-terephthalate film coated with tantalum pentoxide for pH measurement under ISFET detection configuration. Microsyst Technol 23, 293–298 (2017). https://doi.org/10.1007/s00542-015-2474-y

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  • DOI: https://doi.org/10.1007/s00542-015-2474-y

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