Abstract
A rapid manufacturing process for the micro solenoid fluxgate sensor integrating multilayer amorphous ribbon core has been established, which combines the micro assembling method and the MEMS technologies. We select Fe-based amorphous soft magnetic ribbons for core materials and have fabricated the micro fluxgate sensors by MEMS technologies, with single-layer core and double-layer core respectively. The micro fluxgate sensors with double-layer core show the advantageous to that with single-layer core and exhibit sensitivity of 1089.2 V/T at excitation current of 120 mA rms, wide linear range of −900 to 900 μT and power consumption of 24.48 mW. The noise power density of the single core fluxgate sensor is 2.48nT/Hz1/2@1 Hz.
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Acknowledgments
This work was supported by Basic Research Program of Science and Technology Committee of Shanghai (09JC1408600), The National Natural Science Foundation of China (No. 61074168), and National Key Laboratory Research Fund (9140C790403110C7905).
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Lei, C., Lei, J., Yang, Z. et al. Improved micro fluxgate sensor with double-layer Fe-based amorphous core. Microsyst Technol 19, 167–172 (2013). https://doi.org/10.1007/s00542-012-1523-z
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DOI: https://doi.org/10.1007/s00542-012-1523-z