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Micro-mirror laser scanner combined with a varifocal mirror

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Abstract

A laser beam scanning system consisting of a scanning micro-mirror and a varifocal micro-mirror is fabricated for laser beam sensing with variable beam diameter. The scanning micro-mirror is operated under the resonant oscillation condition with an electrostatic comb-drive actuator. The varifocal micro-mirror is driven by a bending moment generated at the circumference of mirror with a parallel-palate electrostatic actuator. The scanning micro-mirror and the varifocal mirror are fabricated on a silicon on insulator wafer. The rotational angle of 9° at 766 Hz is obtained at the voltage of 300 V. The spot size of the laser beam is adjusted from 0.5 to 3.5 cm at the distance of 43 m by changing varifocal voltage. The proposed scanning system can be useful for several sensing techniques.

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Acknowledgments

The authors thank Yoshikaki Kanamori, Kazuo Sato, Yasufumi Yamada, Hidemi Senda for their useful discussion. This work was supported partially by μSIC. Microfabricaiton was carried out in Micro Nano Center, Tohoku University.

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Authors and Affiliations

  1. Department of Nanomechanics, Tohoku University, Sendai, 980-8579, Japan

    R. Hokari & K. Hane

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  1. R. Hokari
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  2. K. Hane
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Correspondence to K. Hane.

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Hokari, R., Hane, K. Micro-mirror laser scanner combined with a varifocal mirror. Microsyst Technol 18, 475–480 (2012). https://doi.org/10.1007/s00542-011-1416-6

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  • DOI: https://doi.org/10.1007/s00542-011-1416-6

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