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Parametric characterization of piezoelectric valveless micropump

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Abstract

Experimental investigations are performed to determine the influence of electrical excitation and geometrical parameters on the performance of piezoelectric valveless micropumps fabricated on printed circuit board substrates. Strain gauges and shunt resistor are used in conjunction with a data acquisition system to form an effective transducer, capable of providing magnitude and phase response information pertaining to fluid–structure interaction. Effect of conical diffuser geometry on the displacement response and pressure flow characteristics are studied. With suitable variations in the design of the diffuser element and input excitation parameters, the ability of the valveless micropump can be extended to include forward, reversed and bidirectional flow features. The characteristic signatures of single and two peaks in flowrate or pressure data are captured in the displacement phase response. System identification approach is proposed to model and predict the performance of valveless micropumps.

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References

  • Andersson H, Wouter W, Nilsson P, Enoksson P, Stemme G (2001) A valve-less diffuser micropump for microfluidic analytical systems. Sens Actuators B 72:259–265

    Article  Google Scholar 

  • Bardell RL, Sharma NR, Forster FK, Martin AA, Penney RJ (1997) Designing high performance micro-pumps based on no-moving parts valves, ASME microelectromechanical systems. DSC 62:47–53

    Google Scholar 

  • Forster FK, Bardell RL, Afromowitz MA, Sharma NR, Blanchard A (1995) Design, fabrication and testing of fixed-valve micropumps. In: Proc ASME Fluids Eng Division, IMECE 234:39–44

  • Gerlach T (1998) Microdiffusers as dynamic passive valves for micropump applications. Sens Actuators A 69:181–191

    Article  Google Scholar 

  • Gerlach T, Matthias S, Wurmus H (1995) A new micropump principle of the reciprocating type using pyramidic micro flowchannels as passive valves. J Micromech Microeng 5:199–201

    Article  Google Scholar 

  • Hamdan MN, Abdallah S, Al-Qaisia A (2010) Modeling and study of dynamic performance of a valveless micropump. J Sound Vib 329:3121–3136

    Article  Google Scholar 

  • Iverson BD, Garimella SV (2008) Recent advances in microscale pumping technologies: a review and evaluation. Microfluid Nanofluid 5:145–174

    Article  Google Scholar 

  • Izzo I, Accoto D, Menciassi A, Schmitt L, Dario P (2007) Modeling and experimental validation of a piezoelectric micropump with novel no-moving-part valves. Sens Actuator A 133(1):128–140

    Article  Google Scholar 

  • Laser DJ, Santiago JG (2004) A review of micropumps. J Micromech Microeng 14:R35–R64

    Article  Google Scholar 

  • Merkel T, Graeber M, Pagel L (1999) A new technology for fluidic microsystems based on PCB technology. Sens Actuators A 77:98–105

    Article  Google Scholar 

  • Nabavi M (2009) Steady and unsteady flow analysis in microdiffusers and micropumps: a critical review. Microfluid Nanofluid 7(5):599–619

    Article  Google Scholar 

  • Nguyen NT, Huang X (2001) Miniature valveless pumps based on printed circuit board technique. Sens Actuators A 88:104–111

    Article  Google Scholar 

  • Olsson A, Enoksson P, Stemme G, Stemme E (1997) Micromachined flat-walled valveless diffuser pumps. J Microelectromech Syst 6:161–166

    Article  Google Scholar 

  • Pan LS, Ng TY, Wu XH, Lee HP (2003) Analysis of valveless micropumps with inertial effects. J Micromech Microeng 13:390–399

    Article  Google Scholar 

  • Shen CY, Liu HK (2008) Fabrication and drive test of piezoelectric PDMS valveless micropump. J Chin Inst Eng 31(4):615–623

    Article  Google Scholar 

  • Singhal V, Garimella SV (2007) Induction electrohydrodynamic micropump for high heat flux cooling. Sens Actuators A 134:650–659

    Article  Google Scholar 

  • Stemme E, Stemme G (1993) A valveless diffuser/nozzle-based fluid pump. Sens Actuators A 39:159–167

    Article  Google Scholar 

  • Ullmann A, Fono I (2002) The piezoelectric valve-less pump-improved dynamic model. J Microelectromech Syst 11(6):655–664

    Article  Google Scholar 

  • Verma P (2011) Investigations on piezoelectric valveless micropump for integrated electronic cooling, Dissertation, Indian Institute of Technology Madras

  • Verma P, Chatterjee D, Nagarajan T (2009) Design and development of modular valveless micropump on PCB for integrated electronic cooling. Proc IMechE, Part C J Mech Eng Sci 223:953–963

  • Wang QM, Zhang Q, Xu B, Liu R, Cross LE (1999) Nonlinear piezoelectric behaviour of ceramic bending mode actuators under strong electric fields. J Appl Phys 86(6):3352–3360

    Article  Google Scholar 

  • Wang YC, Hsu JC, Kuo PC, Lee YC (2009) Loss characteristics and flow rectification property of diffuser valves for micropump applications. Int J Heat Mass Transf 52:328–336

    Article  MATH  Google Scholar 

  • Zhang T, Wang QM (2005) Valveless piezoelectric micropump for fuel delivery in direct methanol fuel cell (DMFC) devices. J Power Sources 140:72–80

    Article  Google Scholar 

  • Zhang J, Lu J, Xia Q, Hong L (2007) Theoretical analysis and experimental investigation of valveless piezoelectric pump with unsymmetrical ridges. Front Mech Eng China 2(1):13–19

    Article  Google Scholar 

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Authors and Affiliations

  1. Department of Mechanical Engineering, IIT Madras, Chennai, 600 036, India

    Parikshit Verma & Dhiman Chatterjee

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  1. Parikshit Verma
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  2. Dhiman Chatterjee
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Correspondence to Dhiman Chatterjee.

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Verma, P., Chatterjee, D. Parametric characterization of piezoelectric valveless micropump. Microsyst Technol 17, 1727–1737 (2011). https://doi.org/10.1007/s00542-011-1364-1

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  • DOI: https://doi.org/10.1007/s00542-011-1364-1

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