Abstract
A new slip model derived by molecular dynamics has been used to investigate the ultra-thin gas-lubricated slider bearings beneath the three bushings of an electrostatic micromotor in micro-electro-mechanical systems (MEMS). Modified Reynolds equation is proposed based on the modified slip model. Analytical solutions for flow rate, pressure distribution, load carrying capacity and streamwise location using the modified Reynolds equation are obtained and compared with the results gained from those in the literature. It demonstrates that the new second-order slip model is of greater accuracy than that predicted by the first-order, second-order slip models and MMGL model and produces a good approximation to variable hard sphere (VHS) and variable soft sphere (VSS) models, which agree well with the solution obtained from the linearized Boltzmann equation. It is indicated that the slip effect reduces the pressure distribution and load carrying capacity, and shifts the streamwise location of the load carrying capacity, which should not be ignored to study the step-shaped slider bearings in micromotors for MEMS devices.
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Acknowledgments
The authors are grateful to Prof. H. G. Li and Dr. H. Huang for their fruitful suggestions and discussions. This work was supported by the National Natural Science Foundation of China under Grant No. 10602033, the National Outstanding Youth Foundation of China under Grant No. 10325209, and the China Postdoctoral Science Foundation under Grant No. 20060400165.
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Zhang, WM., Meng, G., Zhou, JB. et al. Slip model for the ultra-thin gas-lubricated slider bearings of an electrostatic micromotor in MEMS. Microsyst Technol 15, 953–961 (2009). https://doi.org/10.1007/s00542-009-0828-z
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DOI: https://doi.org/10.1007/s00542-009-0828-z