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Dynamic characteristics of micro air bearings for microsystems

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Abstract

This paper reports on the dynamic characteristics of micro air bearings that include thrust and journal air bearings for microsystems. The dynamic thrust air bearing employs a spiral groove configuration. Analysis shows that the motion stability and load capacity of a thrust air bearing imposes a contradictive requirement on the groove pattern of the air bearing. The dynamic journal air bearing is realized by using a plain circular trench with a narrow radial clearance of C, and a very small aspect ratio of bearing length versus diameter (L/D). Analysis on the shock tolerance of the journal air bearing shows that the shock tolerance increases with the bearing number, the bearing aspect ratio of L/D and its initial equilibrium eccentricity ratio ε 0. The optimum values of the bearing parameters are explored and recommended. A prototype of turbine device has been designed based on the recommended bearing configurations and realized via microfabrication.

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References

  • Constantinscu VN, Galetuse G (1987) Stability criterion for spiral-grooved thrust gas bearing. ASME Trans J Tribology 109:183–188

    Article  Google Scholar 

  • Constantinscu VN, Galetuse G (1990) On the dynamic stability of the spiral-grooved gas-lubricated thrust bearing. ASME Trans J Tribology 112:734–737

    Article  Google Scholar 

  • Hamrock J (1994) Fundamentals of fluid lubrication. McGraw-Hill, New York

    Google Scholar 

  • Piekos ES (2000) Numerical simulation of gas-lubricated journal bearings for microfabricated machines. Doctoral thesis, MIT, Cambridge, MA, USA

  • Savoulides S, Breuer KS, Jacobson S, Ehrich F (2001) Low-order models for very short hybrid gas bearings. ASME Trans J Tribology 123:368–375

    Article  Google Scholar 

  • Zhang QD, Guo GX, Bi C (2005) Air bearing spindle motor for hard disk drives. STLE Tribology Trans 48:468–473

    Article  MATH  Google Scholar 

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Authors and Affiliations

  1. Data Storage Institute, DSI Building, NUS Campus, Singapore, Singapore, 117608

    Q. D. Zhang

  2. Singapore Institute of Manufacturing Technology (SIMTech), 71 Nanyang Drive, Singapore, Singapore, 638705

    X. C. Shan

Authors
  1. Q. D. Zhang
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  2. X. C. Shan
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Correspondence to X. C. Shan.

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Zhang, Q.D., Shan, X.C. Dynamic characteristics of micro air bearings for microsystems. Microsyst Technol 14, 229–234 (2008). https://doi.org/10.1007/s00542-007-0414-1

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  • DOI: https://doi.org/10.1007/s00542-007-0414-1

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