Abstract
High focusing efficiency Fresnel zone plates for hard X-ray imaging is fabricated by electron beam lithography, soft X-ray lithography, and gold electroplating techniques. Using the electron beam lithography, Fresnel zone plates which has an outermost zone width of 100 nm and thickness of 250 nm has been fabricated. Fresnel zone plates with outermost zone width of 150 nm and thickness of 660 nm has been fabricated by using soft X-ray lithography.
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Acknowledgments
The authors would like to acknowledge Professor Changqing Xie and Dr. Deqiang Wang for their help and useful discussion. This work is supported by National Natural Science Foundation of China (No.10675113).
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Liu, L., Liu, G., Xiong, Y. et al. Fabrication of Fresnel zone plates with high aspect ratio by soft X-ray lithography. Microsyst Technol 14, 1251–1255 (2008). https://doi.org/10.1007/s00542-007-0542-7
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DOI: https://doi.org/10.1007/s00542-007-0542-7