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Characterization of the quality of metal–graphene contact with contact end resistance measurement

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Abstract

The quality of metal–graphene contact has a great influence on the performance of graphene-based electronic devices. In this paper, a simple, fast and accurate method is introduced to evaluate the quality of metal–graphene contact, which is based on measuring the contact end resistance. Using this method, the effect of rapid thermal annealing on the metal–graphene contact is investigated. It is common observation that before the rapid thermal annealing, contact end resistance has a large variation showing that the metal–graphene contact is in a relatively unstable state when the device is just prepared. After the rapid thermal annealing treatment, contact end resistances show a good consistency for all the devices. The results of contact end resistance are consistent with the images of scanning electron microscope observed before and after the rapid thermal annealing, which indicates that using the contact end resistance to evaluate the quality of metal–graphene contact is an efficient and effective way to predict the contact quality.

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Acknowledgments

This work was subsidized by National Science and Technology Major Project (Grant No. 2011ZX02707.3), the National Natural Science Foundation of China (Nos. 61136005, 61404167), and Chinese Academy of Sciences (KGZD-EW-303).

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Authors and Affiliations

  1. Department of Microwave IC, Institute of Microelectronics, Chinese Academy of Sciences, No. 3, Beitucheng West Road, Beijing, 100029, People’s Republic of China

    Shaoqing Wang, Dacheng Mao, Asif Muhammad, Songang Peng, Dayong Zhang, Jingyuan Shi & Zhi Jin

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  1. Shaoqing Wang
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  2. Dacheng Mao
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  3. Asif Muhammad
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  4. Songang Peng
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  7. Zhi Jin
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Correspondence to Zhi Jin.

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Wang, S., Mao, D., Muhammad, A. et al. Characterization of the quality of metal–graphene contact with contact end resistance measurement. Appl. Phys. A 122, 643 (2016). https://doi.org/10.1007/s00339-016-0152-2

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  • DOI: https://doi.org/10.1007/s00339-016-0152-2

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