Skip to main content
SpringerLink
Log in

Structural, optical and electrical properties of cubic AlN films deposited by laser molecular beam epitaxy

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Cubic AlN films were successfully deposited on TiN buffered Si (100) substrates by a laser molecular beam epitaxy (LMBE) technique, and their crystal structure and optical and electrical properties were studied. The results indicate that cubic AlN films show the NaCl-type structure with a (200) preferred orientation, and the lattice parameter is determined to be 0.4027 nm. The Fourier transform infrared (FTIR) pattern of the cubic AlN film displays sharp absorption peaks at 668 cm−1 and 951 cm−1, corresponding to the transverse and longitudinal optical vibration modes. Ellipsometric measurements evidence a refractive index of 1.66–1.71 and an extinction coefficient of about zero for the cubic AlN film in the visible range. Capacitance–voltage (C–V) traces of the metal–insulator–semiconductor (MIS) device exhibit that the cubic AlN film has a dielectric constant of 8.1, and hysteresis in the C–V traces indicates a significant number of charge traps in the film.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5

Similar content being viewed by others

References

  1. I. Petrov, E. Mojab, R.C. Powell, J.E. Greene, L. Hultman, J.E. Sundgren, Appl. Phys. Lett. 60, 2491 (1992)

    Article  ADS  Google Scholar 

  2. M.P. Thompson, G.W. Auner, A.R. Drews, J. Electron. Mater. 10, L17 (1999)

    Article  Google Scholar 

  3. L.D. Wang, H.S. Kwok, Appl. Surf. Sci. 154–155, 439 (2000)

    Article  Google Scholar 

  4. M. Shahien, M. Yamada, T. Yasui, M. Fukumoto, J. Therm. Spray Technol. 19, 635 (2010)

    Article  ADS  Google Scholar 

  5. Z.M. Ren, Y.F. Lu, H.Q. Ni, J. Appl. Phys. 88, 7346 (2000)

    Article  ADS  Google Scholar 

  6. S. Mohri, T. Yoshitake, T. Hara, K. Nagayama, Diam. Relat. Mater. 17, 1796 (2008)

    Article  ADS  Google Scholar 

  7. S. Okubo, N. Shibata, T. Saito, Y. Ikuhara, J. Cryst. Growth 189–190, 452 (1998)

    Article  Google Scholar 

  8. M. Röppischer, R. Goldhahn, G. Rossbach, P. Schley, C. Cobet, N. Esser, T. Schupp, K. Lischka, D.J. As, J. Appl. Phys. 106, 076104 (2009)

    Article  ADS  Google Scholar 

  9. G. Shukla, A. Khare, Appl. Surf. Sci. 255, 2057 (2008)

    Article  ADS  Google Scholar 

  10. Y.K. Ke, H.R. Dong, Handbook of Chemical Analysis (Chemical Industry Press, Beijing, 1998)

    Google Scholar 

  11. L.I. Wei, C.J. Fang, Appl. Surf. Sci. 253, 7019 (2007)

    Article  ADS  Google Scholar 

  12. M. Bernard, A. Deneuville, O. Thomas, P. Gergaud, P. Sandstrom, J. Birch, Thin Solid Films 380, 252 (2000)

    Article  ADS  Google Scholar 

  13. C. Ristoscu, C. Ducu, G. Socol, F. Craciunoiu, I.N. Mihailescu, Appl. Surf. Sci. 248, 411 (2005)

    Article  ADS  Google Scholar 

  14. J. Baek, J. Ma, M.F. Becker, J.W. Keto, D. Kovar, Thin Solid Films 515, 7096 (2007)

    Article  ADS  Google Scholar 

  15. P.E. Silva, P.R. De, L.C. Carvalho, Microelectron. J. 34, 721 (2003)

    Article  Google Scholar 

Download references

Acknowledgements

This work was financially supported by the Open Foundation of the Key Laboratory of New Processing Technology for Nonferrous Metals and Materials (No. GXKFZ-05) and the Guangxi High Education Scientific Research Project (No. 200103YB003).

Author information

Authors and Affiliations

  1. Key Laboratory of New Processing Technology for Materials and Nonferrous Metals, Ministry of Education, College of Materials Science and Engineering, Guangxi University, Nanning, 530004, China

    Yuechun Fu, Xuefei Li, Yunyun Wang, Huan He & Xiaoming Shen

Authors
  1. Yuechun Fu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Xuefei Li
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Yunyun Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Huan He
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Xiaoming Shen
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Yuechun Fu.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Fu, Y., Li, X., Wang, Y. et al. Structural, optical and electrical properties of cubic AlN films deposited by laser molecular beam epitaxy. Appl. Phys. A 106, 937–940 (2012). https://doi.org/10.1007/s00339-011-6713-5

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-011-6713-5

Keywords

Search

Navigation