Abstract
Self-assembled InGaN quantum dots (QDs) were grown on GaN templates by metalorganic chemical vapor deposition. 2D–3D growth mode transition through Stranski–Krastanov mode was observed via atomic force microscopy. The critical thickness for In0.67Ga0.33N QDs was determined to be four monolayers. The effects of growth temperature, deposition thickness, and V/III ratio on QD formation were examined. The capping of InGaN QDs with GaN was analyzed. Optimized InGaN quantum dots emitted in green spectra at room temperature.
Similar content being viewed by others
References
C.J. Humphreys, MRS Bull. 33, 459 (2008)
Y. Cho, S.K. Lee, H.S. Kwack, J.Y. Kim, K.S. Lim, H.M. Kim, T.W. Kang, S.N. Lee, M.S. Seon, O.H. Nam, Y.J. Park, Appl. Phys. Lett. 83, 2578 (2003)
C. Bayram, F.H. Teherani, D. Rogers, M. Razeghi, Appl. Phys. Lett. 93, 081111 (2008)
F.A. Ponce, S. Srinivasan, A. Bell, L. Geng, R. Liu, M. Stevens, J. Cai, H. Omiya, H. Marui, S. Tanaka, Phys. Status Solidi 240, 273 (2003)
T. Kozaki, H. Matsumura, Y. Sugimoto, S. Nagahama, T. Mukai, Proc. SPIE 6133, 613306 (2006)
C. Bayram, J.L. Pau, R. McClintock, M. Razeghi, Appl. Phys. B (2008). doi:10.1007/s00340-008-3321-y
D.J. Eaglesham, M. Cerullo, Phys. Rev. Lett. 64, 1943 (1990)
M. Petroff, A. Lorke, A. Imomoglu, Phys. Today 54, 46 (2001)
K. Tachibana, T. Someya, Y. Arakawa, Appl. Phys. Lett. 74, 383 (1999)
B. Damilano, N. Grandjean, S. Dalmasso, J. Massies, Appl. Phys. Lett. 75, 3751 (1999)
O. Moriwaki, T. Someya, K. Tachibana, S. Ishida, Y. Arakawa, Appl. Phys. Lett. 76, 2361 (2000)
Y.K. Su, S.J. Chang, L.W. Ji, C.S. Chang, L.W. Wu, W.C. Lai, T.H. Fang, K.T. Lam, Semicond. Sci. Technol. 19, 389 (2004)
S. Choi, J. Jang, S. Yi, J. Kim, W. Jung, Proc. SPIE 6479, 64791F (2007)
V. Ranjan, G. Allan, C. Priester, C. Delerue, Phys. Rev. B 68, 115305 (2003)
I. Vurgaftman, J.R. Meyer, L.R. Ram-Mohan, Appl. Phys. Rev. 89, 5815 (2001)
K.S. Kim, C.H. Hong, W.H. Lee, C.S. Kim, O.H. Cha, G.M. Yang, E.K. Suh, K.Y. Lim, H.J. Lee, H.K. Cho, J.Y. Lee, J.M. Seo, MRS Int. J. Nitride Semicond. Res. 5S1, W11.74 (2000)
M. Androulidaki, N.T. Pelekanos, K. Tsagaraki, E. Dimakis, E. Iliopoulos, A. Adikimenakis, E. Bellet-Amalric, D. Jalabert, A. Georgakilas, Phys. Status Solidi 6, 1866 (2006)
S.L. Chuang, C.S. Chang, Phys. Rev. B 54, 2491 (1996)
M. Grundmann, O. Stier, D. Bimberg, Phys. Rev. B 52, 11969 (1995)
C.G. Van de Walle, M.D. McCluskey, C.P. Master, L.T. Romano, N.M. Johnson, Mat. Sci. Eng. B 59, 274 (1999)
O. Ambacher, J. Majewski, C. Miskys, A. Link, M. Hermann, M. Eicjkhoff, M. Stutzmann, F. Bernardini, V. Fiorentini, V. Tilak, B. Schaff, L.F. Eastman, J. Phys. Condens. Matter 14, 3399 (2002)
V.A. Fonoberov, A.A. Balandin, J. Appl. Phys. 94, 7178 (2003)
S.L. Chuang, Physics of Optoelectronic Devices (Wiley, New York, 1995)
S. Chichibu, T. Azuhata, T. Sota, S. Nakamura, Appl. Phys. Lett. 69, 4188 (1996)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Bayram, C., Razeghi, M. Stranski–Krastanov growth of InGaN quantum dots emitting in green spectra. Appl. Phys. A 96, 403–408 (2009). https://doi.org/10.1007/s00339-009-5186-2
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00339-009-5186-2