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Patterning and modification of PDMS surface through laser micromachining of silicon masters and molding

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Abstract

We describe preparation of micro patterned PDMS sample surfaces and their chemical modification for the purposes of increased hydrophobicity. The process includes ablation of micrometer sized patterns on a silicon master by pulsed radiation from a Nd:YAG laser, transfer of the patterns to PDMS through molding, and chemical modification of the topmost surface layers of the polymer sample by further laser irradiation and UV/ozone treatment. The samples were characterized by XPS, FTIR, contact angle measurements, optical microscopy and SEM. The study shows the feasibility of the method to manufacture regular patterns with micron-sized cylindrical pillars and to control surface composition. In the absence of chemical modification of the surfaces due to preparation, we compare the effect of increased roughness on the contact angle with theoretically predicted values. Samples with patterned and chemically modified surfaces due to UV/ozone treatment show reduced hydrophobicity.

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References

  1. D. Bäurle: Laser processing and chemistry, 3rd edn. (Springer, Berlin 2000)

  2. V.M. Graubner, R. Jordan, O. Nuyken, T. Lippert, M. Bauer, B. Schnyder, A. Wokaun: Appl. Surf. Sci. 197, 786 (2002)

    Article  ADS  Google Scholar 

  3. S.J. Clarson, J. A Semlyn: In: Polymer Science and Technology Series, ed. by E. Horwood (PTR Prentice Hall, New Jersey 1993) pp. 673

  4. R.N. Wenzel: Ind. Eng. Chem. 28(8), 988 (1936)

    Article  Google Scholar 

  5. A.B.D. Cassie, S. Baxter: Trans. Fara. Soc. 40, 546 (1944)

    Article  Google Scholar 

  6. S. Petronis, K. Berntsson, J. Gold, P. Gatenholm: J. Biomat. Sci.-Poly. Ed. 11(10), 1051 (2000)

    Article  Google Scholar 

  7. G.B. Shinn, F. Steigerwald, H. Stiegler, R. Sauerbrey, F.K. Tittel, W.L. Wilson: J. Vac. Sci. B 4(6), 1273 (1986)

    Article  Google Scholar 

  8. V. Gusev, A.A. Kolomenskii, P. Hess: Appl. Phys. A 61, 285 (1995)

    Article  ADS  Google Scholar 

  9. C.A. Macdonald, A.M. Malvezzi, F. Spaepen: Conference on Beam-solid interactions and phase transformations (1986)

  10. Y.Y. Xia, Q.P. Wang, L.M. Mei, C.Y. Tan, S.B. Yue, B.Z. Xu, X.D. Liu: J. Phys. D: Appl. Phys. 24, 1933 (1991)

    Article  ADS  Google Scholar 

  11. H.C. Liu, X.L. Mao, J.H. Yoo, R.E. Russo: Appl. Phys. Lett. 75, 1216 (1999)

    Article  ADS  Google Scholar 

  12. S. Strgar, J. Mozina: Ultrasonics 40(1–8), 791 (2002)

    Google Scholar 

  13. P.E. Dyer, S.M. Maswadi, C.D. Walton, M. Ersoz, P.D.I. Fletcher, V.N. Paunov: Appl. Phys. A 77(3–4), 391 (2003)

    Google Scholar 

  14. E. Delamarche, H. Schmid, B. Michel, H. Biebuyck: Adv. Mater. 9(9), 741 (1997)

    Article  Google Scholar 

  15. M. Ouyang, R.J. Muisener, A. Boulares, J.T. Koberstein: J. Membrane Sci. 177(1–2), 177 (2000)

    Google Scholar 

  16. K. Efimenko, W.E. Wallace, J. Genzer: J. Coll. Int. Sci. 254(2), 306 (2002)

    Article  Google Scholar 

  17. G. Beamson, D. Briggs: In: High resolution XPS of organic polymers. (John Wiley & sons, Chichester, England 1992)

  18. S. Siegel, H. Judeikis: J. Chem. Phys. 43(2), 343 (1965)

    Article  Google Scholar 

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Correspondence to D. Chakarov.

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52.38.Mf; 81.65.Cf; 81.05.Lg

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Holgerson, P., Sutherland, D., Kasemo, B. et al. Patterning and modification of PDMS surface through laser micromachining of silicon masters and molding. Appl. Phys. A 81, 51–56 (2005). https://doi.org/10.1007/s00339-004-3082-3

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  • DOI: https://doi.org/10.1007/s00339-004-3082-3

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