Skip to main content
Log in

Influence of light on interstitial copper in p -type silicon

  • Rapid communication
  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

In this work, the influence of light absorption on copper related defect reactions in p-type silicon is investigated by transient ion drift measurements. It is found that copper out-diffusion and formation of copper complexes are two competitive processes whose relative importance depends on light intensity. At low intensities, a reduced surface potential allows complete copper out-diffusion. Above a certain threshold value, however, copper complexes are formed which could be responsible for the earlier reported optically activated recombination activity of copper in silicon. It is shown that the observed Fermi-level dependence of the defect formation rate cannot be explained in terms of an optically induced change in the interstitial copper charge state. The high thermal stability of the formed copper complexes further points out that the formation of electrostatically bound copper-defect pairs may be ruled out.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. K. Graff: Metal Impurities in Silicon-Device Fabrication, (Springer, Berlin 1999) 2nd edn.

  2. F. Illuzzi: Sol. Stat. Phen. 8284, 1 (2002)

  3. E.P. Burte, W. Aderhold: Sol. Stat. Elec. 41, 1021 (1997)

    Article  ADS  Google Scholar 

  4. R. Gonella, P. Motte, J. Torres: Microelec. Reliab. 40, 1305 (2000)

    Article  Google Scholar 

  5. G. Zoth, W. Bergholz: J. Appl. Phys. 67, 6764 (1990)

    Article  ADS  Google Scholar 

  6. W.B. Henley, D.A. Ramappa: Appl. Phys. Lett. 74, 278 (1999)

    Article  ADS  Google Scholar 

  7. M. Yli-Koski, M. Palokangas, A. Haarahiltunen, H. Väinölä, J. Storgårds, H. Holmberg, J. Sinkkonen: J. Phys.: Condens. Matter. 14, 13119 (2002)

    ADS  Google Scholar 

  8. D.A. Ramappa: Appl. Phys. Lett. 76, 3756 (2000)

    Article  ADS  Google Scholar 

  9. T. Heiser, S.A. McHugo, H. Hiesmair, E.R. Weber: Appl. Phys. Lett 70, 3576 (1997)

    Article  ADS  Google Scholar 

  10. T. Heiser, C. Brochard, M. Swaanen: Mater. Res. Soc. Symp. Proc. 612, D.7.3.1 (2000)

  11. A. Belayachi, T. Heiser, J.P. Schunck, S. Bourdais, P. Bloechl, A. Huber, A. Kempf: Mater. Sci. Eng. B 102, 218 (2003)

    Article  Google Scholar 

  12. H. Väinölä, M. Yli-Koski, A. Haarahiltunen, J. Sinkkonen: In: Proc. of 202nd Electrochem. Soc. Meeting, Salt-Lake City, USA (2002)

  13. Y. Kitagawara, H. Takeno, S. Tobe, Y. Hayamizu, T. Koide, T. Takenaka: Mater. Res. Soc. Symp. Proc. 510, 3 (1998)

    Article  Google Scholar 

  14. M. Seibt, M. Griess, A.A. Istratov, H. Hedemann, A. Sattler, W. Schröter: Phys. Status Solidi A 166, 171 (1998)

    Article  ADS  Google Scholar 

  15. C. Flink, H. Feick, S.A. McHugo, A. Mohammed, W. Seifert, H. Hieslmair, T. Heiser, A.A. Istratov, E.R. Weber: Physica B 273274, 437 (1999)

  16. C. Flink, H. Feick, S.A. McHugo, W. Siefert, H. Hieslmair, T. Heiser, A.A. Istratov, E.R. Weber: Phys. Rev. Lett. 85, 4900 (2000)

    Article  ADS  Google Scholar 

  17. T. Zundel, J. Weber, B. Benson, P.O. Hahn, A. Schnegg, H. Prigge: Appl. Phys. Lett. 53, 1426 (1988)

    Article  ADS  Google Scholar 

  18. A.A. Istratov, H. Hieslmair, C. Flink, T. Heiser, E.R. Weber: Appl. Phys. Lett. 71, 2349 (1997)

    Article  ADS  Google Scholar 

  19. T. Heiser, A.A. Istratov, C. Flink, E.R. Weber: Mater. Sci. Eng. B58, 149 (1999)

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to T. Heiser.

Additional information

PACS

61.72.Cc; 61.72.Ss; 66.30.Jt

Rights and permissions

Reprints and permissions

About this article

Cite this article

Belayachi, A., Heiser, T., Schunck, J. et al. Influence of light on interstitial copper in p -type silicon. Appl. Phys. A 80, 201–204 (2005). https://doi.org/10.1007/s00339-004-3038-7

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-004-3038-7

Keywords

Navigation